KR950012036A - Optical measuring device for three-dimensional shape of mirrored object - Google Patents

Optical measuring device for three-dimensional shape of mirrored object Download PDF

Info

Publication number
KR950012036A
KR950012036A KR1019930022378A KR930022378A KR950012036A KR 950012036 A KR950012036 A KR 950012036A KR 1019930022378 A KR1019930022378 A KR 1019930022378A KR 930022378 A KR930022378 A KR 930022378A KR 950012036 A KR950012036 A KR 950012036A
Authority
KR
South Korea
Prior art keywords
point
laser
mirror
dimensional shape
optical measuring
Prior art date
Application number
KR1019930022378A
Other languages
Korean (ko)
Other versions
KR970003272B1 (en
Inventor
조형석
박원식
Original Assignee
천성순
한국과학기술원
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 천성순, 한국과학기술원 filed Critical 천성순
Priority to KR1019930022378A priority Critical patent/KR970003272B1/en
Publication of KR950012036A publication Critical patent/KR950012036A/en
Application granted granted Critical
Publication of KR970003272B1 publication Critical patent/KR970003272B1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Abstract

되반사 재질의 반사광 회귀특성을을 이용하여 경면물체의 삼차원 형상을 물체표면의 전 영역에 걸쳐 측정해내는 장치를 제공하기 위한 본 발명은 광학적 측정장치는 되반사 재질의 반구형의 반사체,레이져 스캐닝미러,빔스플리터,레이져 광원,광센서를 적절히 구성하여 경면물체의 삼차원 형상을 측정하는 시각 측정장치로서,이와 같은 본 발명에 의하면 기존의 일반적인 광학적(시각적인)방법으로는 측정하기 어려운 경면물체의 3차원 형상을 측정할 수 있으며,또한 기존의 경면물체 측정방법보다 단순한 장치의 구성으로 고분해능의 측정을 수행할 수 있다.The present invention provides an apparatus for measuring a three-dimensional shape of a mirror object over an entire surface of an object surface by using reflected light regression characteristics of a reflective material. The optical measuring device includes a hemispherical reflector and a laser scanning mirror of a reflective material. A visual measuring apparatus for measuring a three-dimensional shape of a specular object by properly configuring a beam splitter, a laser light source, and an optical sensor. According to the present invention, three of the specular objects that are difficult to measure by conventional optical (visual) methods The dimensional shape can be measured, and the measurement of high resolution can be performed with the configuration of a simpler device than the conventional mirror measuring method.

Description

경면물체의 삼차원 형상에 대한 광학적 측정장치Optical measuring device for three-dimensional shape of mirrored object

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제1도는 경면물체의 광학적 반사 특성 설명도.1 is an explanatory diagram of optical reflection characteristics of a mirror object.

제2도는 127개 점광원을 사용한 경면물체의 형상 측정장치.2 is a shape measuring apparatus of a mirror object using 127 point light sources.

제3도는 일반적인 표면(a)과 되반사 재질(b)의 광학적 반사 특성 설명도.3 is an explanatory diagram of optical reflection characteristics of a general surface (a) and a reflective material (b).

제4도는 되반사 재질을 이용한 표면검사장치 원리도.4 is a principle diagram of the surface inspection apparatus using a reflective material.

제5도는 본 발명의 일시예에 의한 경면물체의 형상 측정장치의 개략 구성도.5 is a schematic configuration diagram of an apparatus for measuring the shape of a specular object according to one embodiment of the present invention.

제6도는 되반사 재질의 반사 특성을 이용한 본 발명 장치의 측정 원리도.6 is a measurement principle diagram of the apparatus of the present invention using the reflection characteristics of the reflective material.

Claims (4)

되반사 재질의 반사광 회귀특성을 이용한 경면물체의 삼차원 형상 측정장치에 있어서,상기 장치는 내부에 배치되는 경면의 측정대상 물체에서 정반사에 의한 반사광이 새어 나가는 것을 방지하고 모든 방향의 반사광에 대해 유사한 강도의 회귀광을 발산하며 그 천정부위가 천공된 반구형 되반사 재질의 반사체(16),그 천공 상단에 위치한 레이져 스캐닝 미러(15),빔스플리터(14),레이져광원(13) 및 수검요소로 구성되어,반구형 되반사 재질의 반사체 내부에 배치되는 경면의 측정대상 물체표면의 한점(A)에 상기 레이져 광원으로부터 빔스플리터,레이져 스캐닝 미러 및 반사체의 천공부를 차례로 거쳐 레이져 광선이 입사되고 이 점에서 정반사를 경유하여 1차 반사광이 반구형 되반사 반사체상의 한점(B)으로 입사된 다음 되반사 재질의 광학적 반사 특성에 의하여 입사된 방향으로 반사되어 측정대상 물체표면의 A점 근처인 C점으로 입사되며,C점에 입사된 회귀광은 3차 정반사를 경유하여 레이져 스캐닝 미러 및 빔스프리터를 통해 수검요소로 입사되어서 A점의 정보와 수검요소에 결상된 C점의 화상으로써 C점의 정보를 측정해내고,알아낸 C점에 다시 레이져 광선을 입사시켜 위의 과정을 반복적으로 되풀이함으로써 경면물체의 전 표면에 걸쳐 삼차원 형상을 측정하도록 된 것을 특징으로 하는 경면물체의 삼차원 형상에 대한 광학적 측정장치.In the three-dimensional shape measuring apparatus of the mirror object using the reflected light regression characteristics of the reflective material, the device prevents the reflected light from the specular reflection from leaking from the measurement object of the mirror surface disposed therein and has a similar intensity for the reflected light in all directions It consists of a reflector 16 made of hemispherical back reflection material which emits the return light of the ceiling, and the laser scanning mirror 15, the beam splitter 14, the laser light source 13 and the inspection element which are located at the upper part of the perforation. And a laser beam is incident from the laser light source through a beam splitter, a laser scanning mirror, and a perforation part of the reflector to a point A on the surface of the object to be measured, which is disposed inside a reflector made of a hemispherical back reflection material. Through specular reflection, the primary reflected light enters a point (B) on the hemispherical back reflection reflector and then the optical reflection characteristics of the back reflection material. Is reflected in the incident direction to the point C near the point A on the surface of the object to be measured, and the return light incident on the point C is incident to the inspection element through the laser scanning mirror and the beam splitter via the third order reflection. By measuring the information of point C as the image of point C and the image of point C formed on the inspection element, and repeating the above process by injecting the laser beam again into the known point C, three-dimensionally covering the entire surface of the mirror object Optical measuring device for the three-dimensional shape of the mirrored object, characterized in that for measuring the shape. 제1항에 있어서,수검요소가 줌렌즈(17)를 부착한 CCD 카메라 또는 PSD 카메라(18)인 것을 특징으로 하는 경면물체의 삼차원 형상에 대한 광학적 측정장치.The optical measuring device according to claim 1, wherein the inspection element is a CCD camera or a PSD camera with a zoom lens (17) attached thereto. 제1항에 있어서,레이져 광원(13)이 소구경의 레이져 광선(Colimated Laser Beam)을 방사하는 다이오드 레이져 또는 He-Ne 레이져인 것을 특징으로 하는 경면물체의 삼차원 형상에 대한 광학적 측정장치.The optical measuring device according to claim 1, wherein the laser light source (13) is a diode laser or a He-Ne laser that emits a small-diameter Colimated Laser Beam. 제1항에 있어서,측정대상 물체를 X-Y 방향으로 이송할 수 있는 X-Y 테이블(18)을 추가로 구비하는 것을 특징으로 하는 경면물체의 삼차원 형상에 대한 광학적 측정장치.The optical measuring apparatus according to claim 1, further comprising an X-Y table (18) capable of conveying the object to be measured in the X-Y direction. ※참고사항:최초출원 내용에 의하여 공개하는 것임.※ Note: This is to be disclosed based on the first application.
KR1019930022378A 1993-10-26 1993-10-26 Specular surface inspection in three dimensional material by retroreflective KR970003272B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019930022378A KR970003272B1 (en) 1993-10-26 1993-10-26 Specular surface inspection in three dimensional material by retroreflective

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019930022378A KR970003272B1 (en) 1993-10-26 1993-10-26 Specular surface inspection in three dimensional material by retroreflective

Publications (2)

Publication Number Publication Date
KR950012036A true KR950012036A (en) 1995-05-16
KR970003272B1 KR970003272B1 (en) 1997-03-17

Family

ID=19366623

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019930022378A KR970003272B1 (en) 1993-10-26 1993-10-26 Specular surface inspection in three dimensional material by retroreflective

Country Status (1)

Country Link
KR (1) KR970003272B1 (en)

Also Published As

Publication number Publication date
KR970003272B1 (en) 1997-03-17

Similar Documents

Publication Publication Date Title
DE69928453D1 (en) Measuring a three-dimensional body by confocal focusing with a mirror with a central aperture
KR920020187A (en) Coating state measuring method and device
DE3879224D1 (en) DEVICE FOR OPTICALLY SCANNING THE SURFACE OF AN OBJECT.
KR960018638A (en) Atomic force microscope
GB1517882A (en) Inspection apparatus for automatically detecting the unevenness in the surface of an object
KR930010527A (en) Surface condition inspection method using irradiation and its device
KR930004754A (en) Interferometric Ball Bearing Inspection Apparatus and Method
US7079255B2 (en) Optical coherence interferometry and coherence tomography with spatially partially coherent light sources
Jecić et al. The assessment of structured light and laser scanning methods in 3D shape measurements
US6396587B1 (en) Method for recording depth profiles in a specimen and apparatus therefor
KR890013458A (en) Surface roughness photodetection method and apparatus
KR880008043A (en) Non-contact auto focus positioning method and device.
US5917655A (en) Method and apparatus for generating a stereoscopic image
EP0152894A3 (en) Device for optically detecting local inhomogeneities in the structure of tested objects
JPH11211433A (en) Measuring method and measuring system of surface form of molding
KR950021326A (en) Method and apparatus for measuring insulating film thickness of semiconductor wafer
SE8500204D0 (en) DEVICE FOR OPTICAL SEATING OF LONG-TERM FORMALS
ATE115738T1 (en) DEVICE AND METHOD FOR TRANSMISSION AND REFLECTION IMAGING.
KR950012036A (en) Optical measuring device for three-dimensional shape of mirrored object
ATE114816T1 (en) METHOD OF OPTICALLY SCANNING THE SURFACE OF AN OBJECT, WHICH SURFACE IS CAPABLE OF REFLECTING OR DIFFusing LIGHT, AND APPARATUS THEREOF.
US3702737A (en) Method of and arrangement for examining moving objects by coherent light
IT201800005143A1 (en) Method for checking an object made of transparent material and related control system
JP2737271B2 (en) Surface three-dimensional shape measuring method and device
RU1805286C (en) Device for measuring linear dimensions of parts
US3873208A (en) Measuring the index of refraction

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
G160 Decision to publish patent application
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20030228

Year of fee payment: 7

LAPS Lapse due to unpaid annual fee