KR950009992U - 진공판 배기장치 - Google Patents
진공판 배기장치Info
- Publication number
- KR950009992U KR950009992U KR2019930019643U KR930019643U KR950009992U KR 950009992 U KR950009992 U KR 950009992U KR 2019930019643 U KR2019930019643 U KR 2019930019643U KR 930019643 U KR930019643 U KR 930019643U KR 950009992 U KR950009992 U KR 950009992U
- Authority
- KR
- South Korea
- Prior art keywords
- exhaust system
- vacuum plate
- plate exhaust
- vacuum
- plate
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/38—Exhausting, degassing, filling, or cleaning vessels
- H01J9/385—Exhausting vessels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2209/00—Apparatus and processes for manufacture of discharge tubes
- H01J2209/38—Control of maintenance of pressure in the vessel
- H01J2209/383—Vacuum pumps
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019930019643U KR0133792Y1 (ko) | 1993-09-27 | 1993-09-27 | 진공판 배기장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019930019643U KR0133792Y1 (ko) | 1993-09-27 | 1993-09-27 | 진공판 배기장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR950009992U true KR950009992U (ko) | 1995-04-21 |
KR0133792Y1 KR0133792Y1 (ko) | 1999-01-15 |
Family
ID=19364533
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019930019643U KR0133792Y1 (ko) | 1993-09-27 | 1993-09-27 | 진공판 배기장치 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR0133792Y1 (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN116398489A (zh) * | 2023-06-07 | 2023-07-07 | 苏州焜原光电有限公司 | 应用于分子束外延设备的扩散泵控制系统及真空系统 |
-
1993
- 1993-09-27 KR KR2019930019643U patent/KR0133792Y1/ko not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN116398489A (zh) * | 2023-06-07 | 2023-07-07 | 苏州焜原光电有限公司 | 应用于分子束外延设备的扩散泵控制系统及真空系统 |
Also Published As
Publication number | Publication date |
---|---|
KR0133792Y1 (ko) | 1999-01-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E701 | Decision to grant or registration of patent right | ||
REGI | Registration of establishment | ||
LAPS | Lapse due to unpaid annual fee |