KR950007022U - Substrate Damage Detection Device - Google Patents
Substrate Damage Detection DeviceInfo
- Publication number
- KR950007022U KR950007022U KR2019930016459U KR930016459U KR950007022U KR 950007022 U KR950007022 U KR 950007022U KR 2019930016459 U KR2019930016459 U KR 2019930016459U KR 930016459 U KR930016459 U KR 930016459U KR 950007022 U KR950007022 U KR 950007022U
- Authority
- KR
- South Korea
- Prior art keywords
- detection device
- damage detection
- substrate damage
- substrate
- detection
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019930016459U KR970005433Y1 (en) | 1993-08-24 | 1993-08-24 | Detecting device of board injury |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019930016459U KR970005433Y1 (en) | 1993-08-24 | 1993-08-24 | Detecting device of board injury |
Publications (2)
Publication Number | Publication Date |
---|---|
KR950007022U true KR950007022U (en) | 1995-03-21 |
KR970005433Y1 KR970005433Y1 (en) | 1997-06-04 |
Family
ID=19361830
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019930016459U KR970005433Y1 (en) | 1993-08-24 | 1993-08-24 | Detecting device of board injury |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970005433Y1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100493766B1 (en) * | 1998-04-30 | 2005-08-01 | 삼성전자주식회사 | Substrate transfer tool of etching facility for manufacturing LCD and substrate transfer method |
-
1993
- 1993-08-24 KR KR2019930016459U patent/KR970005433Y1/en not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100493766B1 (en) * | 1998-04-30 | 2005-08-01 | 삼성전자주식회사 | Substrate transfer tool of etching facility for manufacturing LCD and substrate transfer method |
Also Published As
Publication number | Publication date |
---|---|
KR970005433Y1 (en) | 1997-06-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E701 | Decision to grant or registration of patent right | ||
REGI | Registration of establishment | ||
LAPS | Lapse due to unpaid annual fee |