KR950002237U - Auto handler's preheater stopper device - Google Patents

Auto handler's preheater stopper device

Info

Publication number
KR950002237U
KR950002237U KR2019930010573U KR930010573U KR950002237U KR 950002237 U KR950002237 U KR 950002237U KR 2019930010573 U KR2019930010573 U KR 2019930010573U KR 930010573 U KR930010573 U KR 930010573U KR 950002237 U KR950002237 U KR 950002237U
Authority
KR
South Korea
Prior art keywords
preheater
stopper device
auto handler
handler
auto
Prior art date
Application number
KR2019930010573U
Other languages
Korean (ko)
Other versions
KR200165862Y1 (en
Inventor
이병오
Original Assignee
현대반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대반도체주식회사 filed Critical 현대반도체주식회사
Priority to KR2019930010573U priority Critical patent/KR200165862Y1/en
Publication of KR950002237U publication Critical patent/KR950002237U/en
Application granted granted Critical
Publication of KR200165862Y1 publication Critical patent/KR200165862Y1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
KR2019930010573U 1993-06-16 1993-06-16 Free heater stopper apparatus of auto-handler KR200165862Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019930010573U KR200165862Y1 (en) 1993-06-16 1993-06-16 Free heater stopper apparatus of auto-handler

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019930010573U KR200165862Y1 (en) 1993-06-16 1993-06-16 Free heater stopper apparatus of auto-handler

Publications (2)

Publication Number Publication Date
KR950002237U true KR950002237U (en) 1995-01-04
KR200165862Y1 KR200165862Y1 (en) 2000-01-15

Family

ID=19357206

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019930010573U KR200165862Y1 (en) 1993-06-16 1993-06-16 Free heater stopper apparatus of auto-handler

Country Status (1)

Country Link
KR (1) KR200165862Y1 (en)

Also Published As

Publication number Publication date
KR200165862Y1 (en) 2000-01-15

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KR950002237U (en) Auto handler's preheater stopper device

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20050922

Year of fee payment: 7

LAPS Lapse due to unpaid annual fee