KR940027589U - Position control device of sputter - Google Patents

Position control device of sputter

Info

Publication number
KR940027589U
KR940027589U KR2019930007705U KR930007705U KR940027589U KR 940027589 U KR940027589 U KR 940027589U KR 2019930007705 U KR2019930007705 U KR 2019930007705U KR 930007705 U KR930007705 U KR 930007705U KR 940027589 U KR940027589 U KR 940027589U
Authority
KR
South Korea
Prior art keywords
sputter
control device
position control
control
Prior art date
Application number
KR2019930007705U
Other languages
Korean (ko)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019930007705U priority Critical patent/KR940027589U/en
Publication of KR940027589U publication Critical patent/KR940027589U/en

Links

KR2019930007705U 1993-05-10 1993-05-10 Position control device of sputter KR940027589U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019930007705U KR940027589U (en) 1993-05-10 1993-05-10 Position control device of sputter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019930007705U KR940027589U (en) 1993-05-10 1993-05-10 Position control device of sputter

Publications (1)

Publication Number Publication Date
KR940027589U true KR940027589U (en) 1994-12-10

Family

ID=60916710

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019930007705U KR940027589U (en) 1993-05-10 1993-05-10 Position control device of sputter

Country Status (1)

Country Link
KR (1) KR940027589U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100346772B1 (en) * 1993-07-16 2002-12-05 어플라이드 머티어리얼스, 인코포레이티드 Method and apparatus for adjustment of spacing between waeer and pvd target during semiconductor processing

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100346772B1 (en) * 1993-07-16 2002-12-05 어플라이드 머티어리얼스, 인코포레이티드 Method and apparatus for adjustment of spacing between waeer and pvd target during semiconductor processing

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Legal Events

Date Code Title Description
WITN Withdrawal due to no request for examination