KR940025543U - 노광램프 소등시 노광차단 제어회로 - Google Patents

노광램프 소등시 노광차단 제어회로

Info

Publication number
KR940025543U
KR940025543U KR2019930006125U KR930006125U KR940025543U KR 940025543 U KR940025543 U KR 940025543U KR 2019930006125 U KR2019930006125 U KR 2019930006125U KR 930006125 U KR930006125 U KR 930006125U KR 940025543 U KR940025543 U KR 940025543U
Authority
KR
South Korea
Prior art keywords
exposure
control circuit
goes out
blocking
lamp goes
Prior art date
Application number
KR2019930006125U
Other languages
English (en)
Other versions
KR950009250Y1 (ko
Inventor
노석원
김태규
Original Assignee
엘지일렉트론 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지일렉트론 주식회사 filed Critical 엘지일렉트론 주식회사
Priority to KR2019930006125U priority Critical patent/KR950009250Y1/ko
Publication of KR940025543U publication Critical patent/KR940025543U/ko
Application granted granted Critical
Publication of KR950009250Y1 publication Critical patent/KR950009250Y1/ko

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
KR2019930006125U 1993-04-17 1993-04-17 노광램프 소등시 노광차단 제어회로 KR950009250Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019930006125U KR950009250Y1 (ko) 1993-04-17 1993-04-17 노광램프 소등시 노광차단 제어회로

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019930006125U KR950009250Y1 (ko) 1993-04-17 1993-04-17 노광램프 소등시 노광차단 제어회로

Publications (2)

Publication Number Publication Date
KR940025543U true KR940025543U (ko) 1994-11-18
KR950009250Y1 KR950009250Y1 (ko) 1995-10-23

Family

ID=19353824

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019930006125U KR950009250Y1 (ko) 1993-04-17 1993-04-17 노광램프 소등시 노광차단 제어회로

Country Status (1)

Country Link
KR (1) KR950009250Y1 (ko)

Also Published As

Publication number Publication date
KR950009250Y1 (ko) 1995-10-23

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