KR940023566U - 마스크와 웨이퍼 정렬을 위한 광학계 - Google Patents

마스크와 웨이퍼 정렬을 위한 광학계

Info

Publication number
KR940023566U
KR940023566U KR2019930004205U KR930004205U KR940023566U KR 940023566 U KR940023566 U KR 940023566U KR 2019930004205 U KR2019930004205 U KR 2019930004205U KR 930004205 U KR930004205 U KR 930004205U KR 940023566 U KR940023566 U KR 940023566U
Authority
KR
South Korea
Prior art keywords
mask
optical system
wafer alignment
wafer
alignment
Prior art date
Application number
KR2019930004205U
Other languages
English (en)
Other versions
KR960007144Y1 (ko
Inventor
최권섭
Original Assignee
금성일렉트론 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 금성일렉트론 주식회사 filed Critical 금성일렉트론 주식회사
Priority to KR2019930004205U priority Critical patent/KR960007144Y1/ko
Publication of KR940023566U publication Critical patent/KR940023566U/ko
Application granted granted Critical
Publication of KR960007144Y1 publication Critical patent/KR960007144Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/682—Mask-wafer alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
KR2019930004205U 1993-03-20 1993-03-20 마스크와 웨이퍼 정렬을 위한 광학계 KR960007144Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019930004205U KR960007144Y1 (ko) 1993-03-20 1993-03-20 마스크와 웨이퍼 정렬을 위한 광학계

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019930004205U KR960007144Y1 (ko) 1993-03-20 1993-03-20 마스크와 웨이퍼 정렬을 위한 광학계

Publications (2)

Publication Number Publication Date
KR940023566U true KR940023566U (ko) 1994-10-22
KR960007144Y1 KR960007144Y1 (ko) 1996-08-22

Family

ID=19352403

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019930004205U KR960007144Y1 (ko) 1993-03-20 1993-03-20 마스크와 웨이퍼 정렬을 위한 광학계

Country Status (1)

Country Link
KR (1) KR960007144Y1 (ko)

Also Published As

Publication number Publication date
KR960007144Y1 (ko) 1996-08-22

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