KR940023561U - Nitride Etcher Electrode Structure - Google Patents

Nitride Etcher Electrode Structure

Info

Publication number
KR940023561U
KR940023561U KR2019930003529U KR930003529U KR940023561U KR 940023561 U KR940023561 U KR 940023561U KR 2019930003529 U KR2019930003529 U KR 2019930003529U KR 930003529 U KR930003529 U KR 930003529U KR 940023561 U KR940023561 U KR 940023561U
Authority
KR
South Korea
Prior art keywords
electrode structure
nitride
nitride etcher
etcher electrode
etcher
Prior art date
Application number
KR2019930003529U
Other languages
Korean (ko)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019930003529U priority Critical patent/KR940023561U/en
Publication of KR940023561U publication Critical patent/KR940023561U/en

Links

KR2019930003529U 1993-03-11 1993-03-11 Nitride Etcher Electrode Structure KR940023561U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019930003529U KR940023561U (en) 1993-03-11 1993-03-11 Nitride Etcher Electrode Structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019930003529U KR940023561U (en) 1993-03-11 1993-03-11 Nitride Etcher Electrode Structure

Publications (1)

Publication Number Publication Date
KR940023561U true KR940023561U (en) 1994-10-22

Family

ID=60915053

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019930003529U KR940023561U (en) 1993-03-11 1993-03-11 Nitride Etcher Electrode Structure

Country Status (1)

Country Link
KR (1) KR940023561U (en)

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application