KR940021139U - Photosensitive liquid detector - Google Patents

Photosensitive liquid detector

Info

Publication number
KR940021139U
KR940021139U KR2019930001814U KR930001814U KR940021139U KR 940021139 U KR940021139 U KR 940021139U KR 2019930001814 U KR2019930001814 U KR 2019930001814U KR 930001814 U KR930001814 U KR 930001814U KR 940021139 U KR940021139 U KR 940021139U
Authority
KR
South Korea
Prior art keywords
photosensitive liquid
liquid detector
detector
photosensitive
liquid
Prior art date
Application number
KR2019930001814U
Other languages
Korean (ko)
Other versions
KR950005969Y1 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019930001814U priority Critical patent/KR950005969Y1/en
Publication of KR940021139U publication Critical patent/KR940021139U/en
Application granted granted Critical
Publication of KR950005969Y1 publication Critical patent/KR950005969Y1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
KR2019930001814U 1993-02-11 1993-02-11 Sensor for photoresist KR950005969Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019930001814U KR950005969Y1 (en) 1993-02-11 1993-02-11 Sensor for photoresist

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019930001814U KR950005969Y1 (en) 1993-02-11 1993-02-11 Sensor for photoresist

Publications (2)

Publication Number Publication Date
KR940021139U true KR940021139U (en) 1994-09-24
KR950005969Y1 KR950005969Y1 (en) 1995-07-26

Family

ID=19350644

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019930001814U KR950005969Y1 (en) 1993-02-11 1993-02-11 Sensor for photoresist

Country Status (1)

Country Link
KR (1) KR950005969Y1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100390216B1 (en) * 1995-05-25 2003-09-13 가부시키가이샤 산요붓산 Pachinkogi Bead Disconnection Detector

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100390216B1 (en) * 1995-05-25 2003-09-13 가부시키가이샤 산요붓산 Pachinkogi Bead Disconnection Detector

Also Published As

Publication number Publication date
KR950005969Y1 (en) 1995-07-26

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E701 Decision to grant or registration of patent right
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