KR940017865U - 알루미늄을 이용한 마그네틱 코일 - Google Patents
알루미늄을 이용한 마그네틱 코일Info
- Publication number
- KR940017865U KR940017865U KR2019920024166U KR920024166U KR940017865U KR 940017865 U KR940017865 U KR 940017865U KR 2019920024166 U KR2019920024166 U KR 2019920024166U KR 920024166 U KR920024166 U KR 920024166U KR 940017865 U KR940017865 U KR 940017865U
- Authority
- KR
- South Korea
- Prior art keywords
- aluminum
- magnetic coil
- coil
- magnetic
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3266—Magnetic control means
- H01J37/32678—Electron cyclotron resonance
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67069—Apparatus for fluid treatment for etching for drying etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
- H01J2237/334—Etching
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Particle Accelerators (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR92024166U KR950008584Y1 (ko) | 1992-12-02 | 1992-12-02 | 알루미늄을 이용한 마그네틱 코일 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR92024166U KR950008584Y1 (ko) | 1992-12-02 | 1992-12-02 | 알루미늄을 이용한 마그네틱 코일 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR940017865U true KR940017865U (ko) | 1994-07-28 |
| KR950008584Y1 KR950008584Y1 (ko) | 1995-10-11 |
Family
ID=19345447
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR92024166U KR950008584Y1 (ko) | 1992-12-02 | 1992-12-02 | 알루미늄을 이용한 마그네틱 코일 |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR950008584Y1 (ko) |
-
1992
- 1992-12-02 KR KR92024166U patent/KR950008584Y1/ko not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| KR950008584Y1 (ko) | 1995-10-11 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A201 | Request for examination | ||
| E701 | Decision to grant or registration of patent right | ||
| REGI | Registration of establishment | ||
| FPAY | Annual fee payment |
Payment date: 20070914 Year of fee payment: 13 |
|
| EXPY | Expiration of term |