KR940016982A - Manufacturing method of 3-pole bandpass filter with YBCO / MGO / AU structure - Google Patents

Manufacturing method of 3-pole bandpass filter with YBCO / MGO / AU structure Download PDF

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Publication number
KR940016982A
KR940016982A KR1019920025340A KR920025340A KR940016982A KR 940016982 A KR940016982 A KR 940016982A KR 1019920025340 A KR1019920025340 A KR 1019920025340A KR 920025340 A KR920025340 A KR 920025340A KR 940016982 A KR940016982 A KR 940016982A
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South Korea
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circuit pattern
high temperature
frequency
mgo
temperature superconducting
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KR1019920025340A
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Korean (ko)
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KR950009637B1 (en
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강광용
성건용
이종용
서정대
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양승택
재단법인 한국전자통신연구소
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0268—Manufacture or treatment of devices comprising copper oxide
    • H10N60/0296—Processes for depositing or forming copper oxide superconductor layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/80—Constructional details
    • H10N60/85—Superconducting active materials
    • H10N60/855—Ceramic superconductors

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)

Abstract

본 발명은 이동통신 및 위성통신용 고주파 수동소자의 한 종류로서, 고온초전도 에피박막을 이용하여 개발한 고주파용(-10㎓) 고온초전도 3극 대역통과 여파기(YBa2Cu3O7-x/MgO/Au구조)에 관한 것으로, 소자의 회로패턴을 제작하기에 앞서 시뮬레이선(模擬實驗)으로 최적회로패턴을 설계하며, 고온 초전도 박막의 습식식각에 의한 초전도성의 열화를 최소화하기 위해, 펄스레이저증착(pulsed laser deposition 또는 laser ablation)법을 응용한 금속마스크 형상화공정(laser ablation aided mask-patterning process)으로 유전체 단결정 MgO 기판(5) 위에 최적설계된 여파기 회로패턴을 직접형상화한후, 자체제작한 고주파 하우징(microwave housing 또는 jig)를 이용하여 이 소자의 고주파 특성을 측정함으로써 고온초전도체의 고주파 응용가능성을 타진하고 기존의 금속제(금,구리등) 고주파수소자보다 성능이 우수한가를 살펴보았는바, 실제로 고온초전도체의 임계온도 이하에서는 금속박막형 소자보다 훨씬 우수한 고주파 특성을 보여 주었다.The present invention is a kind of high frequency passive device for mobile communication and satellite communication, and is developed for high frequency (-10㎓) high temperature superconducting tripolar band pass filter (YBa 2 Cu 3 O 7-x / MgO) developed using high temperature superconducting epi thin film. / Au structure) to design the optimal circuit pattern with a simulated line before fabricating the circuit pattern of the device, and to minimize the superconductivity deterioration by wet etching of the high temperature superconducting thin film. Self-manufactured high frequency after direct shaping of optimally designed filter circuit pattern on dielectric single crystal MgO substrate (5) by laser ablation aided mask-patterning process using pulsed laser deposition or laser ablation method By measuring the high-frequency characteristics of the device using a microwave housing or jig, the high-frequency application of high-temperature superconductors is possible and the existing metal (gold, copper, etc.) It was found that the performance is better than the wave element, and in fact, it showed much higher frequency characteristics than the metal thin-film element below the critical temperature of the high temperature superconductor.

Description

YBCO/MGO/AU구조의 3극 대역통과여파기의 제조방법Manufacturing method of 3-pole bandpass filter with YBCO / MGO / AU structure

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제 1 도는 본 발명에 따라 고온초전도 회로패턴을 기판위에 증착하기 위한 "레이저 애블레이션을 응용한 금속 마스크 형상화공정(laser ablation aided mctal-patterning process)"에 대한 개략도, 제 2 도는 고온 초전도 단결정 박막을 이용하여 제작된 Y-Ba-Cu-O-MgO/Au구조의 3극-대역통과 여파기의 단면도, 제 3 도는 대역통과 여파기의 회로패턴만을 강조하기 위해 나타낸 평면도.1 is a schematic diagram of a "laser ablation aided mctal-patterning process using laser ablation" for depositing a high temperature superconducting circuit pattern on a substrate according to the present invention, and FIG. 2 is a high temperature superconducting single crystal thin film. Fig. 3 is a sectional view of a three-pole-pass filter of the Y-Ba-Cu-O-MgO / Au structure fabricated using Fig. 3 is a plan view showing only a circuit pattern of the band-pass filter.

Claims (2)

유전체 단결정 MgO기판(5)과, MgO 기판(5) 위에 형성되고 회로패턴을 갖는 초전도체막(3)과, 상기 유전체 단결정 MgO 기판(5) 아래에 전도성 금속에 의해 형성되는 접지평면(7)으로 구성되는 것을 특징으로 하는 3극 대역통과 여파기.A dielectric single crystal MgO substrate (5), a superconductor film (3) formed on the MgO substrate (5) and having a circuit pattern, and a ground plane (7) formed by a conductive metal under the dielectric single crystal MgO substrate (5). 3-pole bandpass filter, characterized in that the configuration. 제 1 항에 있어서, 상기 접지평면(7)은 1㎛정도의 두께를 갖는 Au인 것을 특징으로 하는 3극 대역통과 여파기.3. The three-pole bandpass filter as claimed in claim 1, wherein the ground plane (7) is Au having a thickness of about 1 mu m. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019920025340A 1992-12-24 1992-12-24 Manufacturing mehtod of ybco/mgo/au structure three pole bandpass filter KR950009637B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019920025340A KR950009637B1 (en) 1992-12-24 1992-12-24 Manufacturing mehtod of ybco/mgo/au structure three pole bandpass filter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019920025340A KR950009637B1 (en) 1992-12-24 1992-12-24 Manufacturing mehtod of ybco/mgo/au structure three pole bandpass filter

Publications (2)

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KR940016982A true KR940016982A (en) 1994-07-25
KR950009637B1 KR950009637B1 (en) 1995-08-25

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