KR940016982A - Manufacturing method of 3-pole bandpass filter with YBCO / MGO / AU structure - Google Patents
Manufacturing method of 3-pole bandpass filter with YBCO / MGO / AU structure Download PDFInfo
- Publication number
- KR940016982A KR940016982A KR1019920025340A KR920025340A KR940016982A KR 940016982 A KR940016982 A KR 940016982A KR 1019920025340 A KR1019920025340 A KR 1019920025340A KR 920025340 A KR920025340 A KR 920025340A KR 940016982 A KR940016982 A KR 940016982A
- Authority
- KR
- South Korea
- Prior art keywords
- circuit pattern
- high temperature
- frequency
- mgo
- temperature superconducting
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 229910021521 yttrium barium copper oxide Inorganic materials 0.000 title 1
- 239000000758 substrate Substances 0.000 claims abstract description 5
- 239000013078 crystal Substances 0.000 claims abstract description 4
- 239000002184 metal Substances 0.000 claims abstract 3
- 229910052751 metal Inorganic materials 0.000 claims abstract 3
- 239000002887 superconductor Substances 0.000 claims abstract 3
- 238000000608 laser ablation Methods 0.000 abstract description 4
- 239000010409 thin film Substances 0.000 abstract description 4
- 238000000034 method Methods 0.000 abstract description 2
- 238000000059 patterning Methods 0.000 abstract description 2
- 239000010949 copper Substances 0.000 abstract 2
- 239000010931 gold Substances 0.000 abstract 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract 1
- 101000661807 Homo sapiens Suppressor of tumorigenicity 14 protein Proteins 0.000 abstract 1
- 101000661808 Mus musculus Suppressor of tumorigenicity 14 protein homolog Proteins 0.000 abstract 1
- 102100037942 Suppressor of tumorigenicity 14 protein Human genes 0.000 abstract 1
- 238000004891 communication Methods 0.000 abstract 1
- 229910052802 copper Inorganic materials 0.000 abstract 1
- 230000006866 deterioration Effects 0.000 abstract 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract 1
- 229910052737 gold Inorganic materials 0.000 abstract 1
- 238000010295 mobile communication Methods 0.000 abstract 1
- 238000004549 pulsed laser deposition Methods 0.000 abstract 1
- 238000007493 shaping process Methods 0.000 abstract 1
- 238000001039 wet etching Methods 0.000 abstract 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0268—Manufacture or treatment of devices comprising copper oxide
- H10N60/0296—Processes for depositing or forming copper oxide superconductor layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/80—Constructional details
- H10N60/85—Superconducting active materials
- H10N60/855—Ceramic superconductors
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Control Of Motors That Do Not Use Commutators (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
Abstract
본 발명은 이동통신 및 위성통신용 고주파 수동소자의 한 종류로서, 고온초전도 에피박막을 이용하여 개발한 고주파용(-10㎓) 고온초전도 3극 대역통과 여파기(YBa2Cu3O7-x/MgO/Au구조)에 관한 것으로, 소자의 회로패턴을 제작하기에 앞서 시뮬레이선(模擬實驗)으로 최적회로패턴을 설계하며, 고온 초전도 박막의 습식식각에 의한 초전도성의 열화를 최소화하기 위해, 펄스레이저증착(pulsed laser deposition 또는 laser ablation)법을 응용한 금속마스크 형상화공정(laser ablation aided mask-patterning process)으로 유전체 단결정 MgO 기판(5) 위에 최적설계된 여파기 회로패턴을 직접형상화한후, 자체제작한 고주파 하우징(microwave housing 또는 jig)를 이용하여 이 소자의 고주파 특성을 측정함으로써 고온초전도체의 고주파 응용가능성을 타진하고 기존의 금속제(금,구리등) 고주파수소자보다 성능이 우수한가를 살펴보았는바, 실제로 고온초전도체의 임계온도 이하에서는 금속박막형 소자보다 훨씬 우수한 고주파 특성을 보여 주었다.The present invention is a kind of high frequency passive device for mobile communication and satellite communication, and is developed for high frequency (-10㎓) high temperature superconducting tripolar band pass filter (YBa 2 Cu 3 O 7-x / MgO) developed using high temperature superconducting epi thin film. / Au structure) to design the optimal circuit pattern with a simulated line before fabricating the circuit pattern of the device, and to minimize the superconductivity deterioration by wet etching of the high temperature superconducting thin film. Self-manufactured high frequency after direct shaping of optimally designed filter circuit pattern on dielectric single crystal MgO substrate (5) by laser ablation aided mask-patterning process using pulsed laser deposition or laser ablation method By measuring the high-frequency characteristics of the device using a microwave housing or jig, the high-frequency application of high-temperature superconductors is possible and the existing metal (gold, copper, etc.) It was found that the performance is better than the wave element, and in fact, it showed much higher frequency characteristics than the metal thin-film element below the critical temperature of the high temperature superconductor.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제 1 도는 본 발명에 따라 고온초전도 회로패턴을 기판위에 증착하기 위한 "레이저 애블레이션을 응용한 금속 마스크 형상화공정(laser ablation aided mctal-patterning process)"에 대한 개략도, 제 2 도는 고온 초전도 단결정 박막을 이용하여 제작된 Y-Ba-Cu-O-MgO/Au구조의 3극-대역통과 여파기의 단면도, 제 3 도는 대역통과 여파기의 회로패턴만을 강조하기 위해 나타낸 평면도.1 is a schematic diagram of a "laser ablation aided mctal-patterning process using laser ablation" for depositing a high temperature superconducting circuit pattern on a substrate according to the present invention, and FIG. 2 is a high temperature superconducting single crystal thin film. Fig. 3 is a sectional view of a three-pole-pass filter of the Y-Ba-Cu-O-MgO / Au structure fabricated using Fig. 3 is a plan view showing only a circuit pattern of the band-pass filter.
Claims (2)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019920025340A KR950009637B1 (en) | 1992-12-24 | 1992-12-24 | Manufacturing mehtod of ybco/mgo/au structure three pole bandpass filter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019920025340A KR950009637B1 (en) | 1992-12-24 | 1992-12-24 | Manufacturing mehtod of ybco/mgo/au structure three pole bandpass filter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR940016982A true KR940016982A (en) | 1994-07-25 |
| KR950009637B1 KR950009637B1 (en) | 1995-08-25 |
Family
ID=19346504
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019920025340A KR950009637B1 (en) | 1992-12-24 | 1992-12-24 | Manufacturing mehtod of ybco/mgo/au structure three pole bandpass filter |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR950009637B1 (en) |
-
1992
- 1992-12-24 KR KR1019920025340A patent/KR950009637B1/en not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| KR950009637B1 (en) | 1995-08-25 |
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| Date | Code | Title | Description |
|---|---|---|---|
| A201 | Request for examination | ||
| G160 | Decision to publish patent application | ||
| E701 | Decision to grant or registration of patent right | ||
| GRNT | Written decision to grant | ||
| FPAY | Annual fee payment |
Payment date: 19980616 Year of fee payment: 4 |
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| LAPS | Lapse due to unpaid annual fee |