KR940015506A - 표면 분석장비의 가스주입 장치 - Google Patents
표면 분석장비의 가스주입 장치 Download PDFInfo
- Publication number
- KR940015506A KR940015506A KR1019920023350A KR920023350A KR940015506A KR 940015506 A KR940015506 A KR 940015506A KR 1019920023350 A KR1019920023350 A KR 1019920023350A KR 920023350 A KR920023350 A KR 920023350A KR 940015506 A KR940015506 A KR 940015506A
- Authority
- KR
- South Korea
- Prior art keywords
- gas injection
- analysis equipment
- injection device
- surface analysis
- electric valve
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
- G01N23/06—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption
- G01N23/083—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption the radiation being X-rays
Landscapes
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Sampling And Sample Adjustment (AREA)
Abstract
본 발명은 시료의 표면분석 장비에 관한 것으로 시료의 깊이분포 분석시 분석챔버내로 가스주입을 위한 샘 밸브와 상기 이온총 사이에 장착된 전기밸브와, 상기 전기밸브를 제어하는 제어수단을 포함한 것을 특징으로 하는 표면분석 장비의 가스주입 장치이다.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제2도는 본 발명에 따른 표면분석장비의 구성도, 제3도는 본 발명에 따른 깊이 분포 분석의 진행도.
Claims (1)
- 시료의 깊이분포 분석시 분석챔버내로 가스주입을 위한 샘밸브와 이온총을 포함한 표면분석장비에 있어서, 상기 샘밸브(12)와 상기 이온총(4) 사이에 장착된 전기밸브(13)와, 상기 전기밸브(13)를 제어하되, 상기 전기밸브(3)를 통해 표면 분석시 가스를 차단하고 표면 식각시에만 흐르게 제어하는 제어수단을 포함한 것을 특징으로 하는 표면분석 장비의 가스주입 장치.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR92023350A KR960009759B1 (en) | 1992-12-04 | 1992-12-04 | Gas injecting apparatus for surface analysing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR92023350A KR960009759B1 (en) | 1992-12-04 | 1992-12-04 | Gas injecting apparatus for surface analysing equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR940015506A true KR940015506A (ko) | 1994-07-21 |
| KR960009759B1 KR960009759B1 (en) | 1996-07-24 |
Family
ID=19344765
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR92023350A KR960009759B1 (en) | 1992-12-04 | 1992-12-04 | Gas injecting apparatus for surface analysing equipment |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR960009759B1 (ko) |
-
1992
- 1992-12-04 KR KR92023350A patent/KR960009759B1/ko not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| KR960009759B1 (en) | 1996-07-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A201 | Request for examination | ||
| E902 | Notification of reason for refusal | ||
| E601 | Decision to refuse application | ||
| J2X1 | Appeal (before the patent court) |
Free format text: APPEAL AGAINST DECISION TO DECLINE REFUSAL |
|
| G160 | Decision to publish patent application | ||
| B701 | Decision to grant | ||
| GRNT | Written decision to grant | ||
| LAPS | Lapse due to unpaid annual fee |