KR940004328U - 웨이퍼 세척조 - Google Patents

웨이퍼 세척조

Info

Publication number
KR940004328U
KR940004328U KR2019920013007U KR920013007U KR940004328U KR 940004328 U KR940004328 U KR 940004328U KR 2019920013007 U KR2019920013007 U KR 2019920013007U KR 920013007 U KR920013007 U KR 920013007U KR 940004328 U KR940004328 U KR 940004328U
Authority
KR
South Korea
Prior art keywords
cleaning tank
wafer cleaning
wafer
tank
cleaning
Prior art date
Application number
KR2019920013007U
Other languages
English (en)
Other versions
KR950010125Y1 (ko
Inventor
정찬만
Original Assignee
Lg 반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lg 반도체주식회사 filed Critical Lg 반도체주식회사
Priority to KR92013007U priority Critical patent/KR950010125Y1/ko
Publication of KR940004328U publication Critical patent/KR940004328U/ko
Application granted granted Critical
Publication of KR950010125Y1 publication Critical patent/KR950010125Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H01L21/67057—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/048—Overflow-type cleaning, e.g. tanks in which the liquid flows over the tank in which the articles are placed

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
KR92013007U 1992-07-14 1992-07-14 웨이퍼 세척조 KR950010125Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR92013007U KR950010125Y1 (ko) 1992-07-14 1992-07-14 웨이퍼 세척조

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR92013007U KR950010125Y1 (ko) 1992-07-14 1992-07-14 웨이퍼 세척조

Publications (2)

Publication Number Publication Date
KR940004328U true KR940004328U (ko) 1994-02-24
KR950010125Y1 KR950010125Y1 (ko) 1995-11-27

Family

ID=19336728

Family Applications (1)

Application Number Title Priority Date Filing Date
KR92013007U KR950010125Y1 (ko) 1992-07-14 1992-07-14 웨이퍼 세척조

Country Status (1)

Country Link
KR (1) KR950010125Y1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100334058B1 (ko) * 1999-07-15 2002-04-26 김광교 반도체 웨이퍼 제조용 세정조의 세척수안정화 장치

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100334058B1 (ko) * 1999-07-15 2002-04-26 김광교 반도체 웨이퍼 제조용 세정조의 세척수안정화 장치

Also Published As

Publication number Publication date
KR950010125Y1 (ko) 1995-11-27

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Legal Events

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