KR940004318U - Semiconductor manufacturing equipment - Google Patents

Semiconductor manufacturing equipment

Info

Publication number
KR940004318U
KR940004318U KR2019920013280U KR920013280U KR940004318U KR 940004318 U KR940004318 U KR 940004318U KR 2019920013280 U KR2019920013280 U KR 2019920013280U KR 920013280 U KR920013280 U KR 920013280U KR 940004318 U KR940004318 U KR 940004318U
Authority
KR
South Korea
Prior art keywords
semiconductor manufacturing
manufacturing equipment
equipment
semiconductor
manufacturing
Prior art date
Application number
KR2019920013280U
Other languages
Korean (ko)
Other versions
KR0120285Y1 (en
Inventor
유왕희
임천희
Original Assignee
삼성전자주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 삼성전자주식회사 filed Critical 삼성전자주식회사
Priority to KR92013280U priority Critical patent/KR0120285Y1/en
Publication of KR940004318U publication Critical patent/KR940004318U/en
Application granted granted Critical
Publication of KR0120285Y1 publication Critical patent/KR0120285Y1/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/42—Stripping or agents therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
KR92013280U 1992-07-18 1992-07-18 Apparatus for manufacturing a semiconductor device KR0120285Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR92013280U KR0120285Y1 (en) 1992-07-18 1992-07-18 Apparatus for manufacturing a semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR92013280U KR0120285Y1 (en) 1992-07-18 1992-07-18 Apparatus for manufacturing a semiconductor device

Publications (2)

Publication Number Publication Date
KR940004318U true KR940004318U (en) 1994-02-24
KR0120285Y1 KR0120285Y1 (en) 1998-08-01

Family

ID=19336941

Family Applications (1)

Application Number Title Priority Date Filing Date
KR92013280U KR0120285Y1 (en) 1992-07-18 1992-07-18 Apparatus for manufacturing a semiconductor device

Country Status (1)

Country Link
KR (1) KR0120285Y1 (en)

Also Published As

Publication number Publication date
KR0120285Y1 (en) 1998-08-01

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Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20070322

Year of fee payment: 10

EXPY Expiration of term