KR940001343A - Incline Detection Method of Integrated Circuit - Google Patents

Incline Detection Method of Integrated Circuit Download PDF

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Publication number
KR940001343A
KR940001343A KR1019930011939A KR930011939A KR940001343A KR 940001343 A KR940001343 A KR 940001343A KR 1019930011939 A KR1019930011939 A KR 1019930011939A KR 930011939 A KR930011939 A KR 930011939A KR 940001343 A KR940001343 A KR 940001343A
Authority
KR
South Korea
Prior art keywords
inspection area
tip
inspection
pin
inclination
Prior art date
Application number
KR1019930011939A
Other languages
Korean (ko)
Inventor
코오지 마스모토
Original Assignee
타카토리 수나오
가부시키가이샤 이이젤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP4194920A external-priority patent/JP2851023B2/en
Priority claimed from JP5031545A external-priority patent/JP2600048B2/en
Application filed by 타카토리 수나오, 가부시키가이샤 이이젤 filed Critical 타카토리 수나오
Publication of KR940001343A publication Critical patent/KR940001343A/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10—Measuring as part of the manufacturing process
    • H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/08—Monitoring manufacture of assemblages

Abstract

본 발명은 IC의 위치결정을 위한 경사검사를 2치화상에 기초하지 않고도, 고속이며 고정도로 실행할 수 있는 집직회로 즉 IC의 경사검사 방법을 제공하는 것을 목적으로 한다.SUMMARY OF THE INVENTION An object of the present invention is to provide an integrated circuit, that is, an inclination inspection method of an IC, which can be executed at high speed and with high accuracy without the inclination inspection for positioning the IC based on a binary image.

본 발명의 IC의 경사검사 방법은 IC핀선단을 포함하는 검사영역을 설정하고, 각각의 검사영역의 농도투영도로 부터 각각의 IC핀의 선단을 검출하고, 이 선단에 따른 직선상에서 각 검사영역의 대표하는 대표점을 구하고, 대변에 위치하는 검사영역을 대표하는 점의 좌표차에 기초하여 IC의 중심 및 경사를 구한다.The tilt inspection method of the IC of the present invention sets the inspection area including the IC pin tip, detects the tip of each IC pin from the concentration projection of each inspection area, and checks each inspection area on a straight line according to the tip. The representative representative point is obtained, and the center and the slope of the IC are obtained based on the coordinate difference between the points representing the inspection area located on the stool.

(대표도면) 제 1도(Representative drawing) Figure 1

Description

집적회로의 경사검출방법Incline Detection Method of Integrated Circuit

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제1도는 본 발명의 1실시예를 나타내는 순서도.1 is a flow chart showing one embodiment of the present invention.

제2도는 검사영역의 설정을 나타내는 개념도.2 is a conceptual diagram showing the setting of the inspection area.

제3도는 검사영역의 농도투영. 1차미분, 각 핀에 대옹하는 점을 나타내는 개념도.3 is the concentration projection of the inspection area. First-order differential, a conceptual diagram showing the points that support each pin

Claims (2)

각 변이 X축,Y축에 대략 평행하게 되도록 배치되는 IC의 경사검사 방법에 있어서, IC의 화상을 입력하고, 이 화상에서 복수의 소정위치에 IC핀의 선단을 포함하는 검사영역을 설정하고, 각 검사영역 내의 농도투영을 생성하고, 이 농도투영의 1차미분에서 소정값 이상의 위치를 각 IC핀의 양단 및 선단으로 간주하고, 이 선단위치에 대해 전기한 각 검사영역의 소정위치에 있어서의 대표점을 추출해서 대변에 위치하는 검사영역의 대표점의 각검사영역의 대표점을 실질적으로 차에 기초하여 IC의 경사를 산출하는 것을 특징으로 하는 집적회로의 경사검사 방법.In the inclination inspection method of IC arrange | positioned so that each side may be substantially parallel to an X-axis and a Y-axis, the image of an IC is input, and the inspection area | region containing the front-end | tip of an IC pin is set in a some predetermined position in this image, A concentration projection in each inspection area is generated, and a position of a predetermined value or more in the first derivative of the concentration projection is regarded as both ends and a tip of each IC pin, and at the predetermined position of each inspection area described for this tip position. An inclination inspection method for an integrated circuit comprising extracting a representative point and calculating an inclination of the IC based on a difference between the representative point of each inspection area of the representative point of the inspection area located on the stool. 제1항에 있어서, 대표점은 개개의 IC핀폭의 중앙점의 평균인 것을 특징으로 하는 집적회로의 경사검사방법.The method of claim 1, wherein the representative point is an average of a center point of individual IC pin widths. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019930011939A 1992-06-29 1993-06-29 Incline Detection Method of Integrated Circuit KR940001343A (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP4194920A JP2851023B2 (en) 1992-06-29 1992-06-29 IC tilt inspection method
JP92-194920 1992-06-29
JP93-031545 1993-02-22
JP5031545A JP2600048B2 (en) 1993-02-22 1993-02-22 cutter

Publications (1)

Publication Number Publication Date
KR940001343A true KR940001343A (en) 1994-01-11

Family

ID=67134583

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019930011939A KR940001343A (en) 1992-06-29 1993-06-29 Incline Detection Method of Integrated Circuit

Country Status (1)

Country Link
KR (1) KR940001343A (en)

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