KR940001318A - Chemical supply - Google Patents

Chemical supply Download PDF

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Publication number
KR940001318A
KR940001318A KR1019920011474A KR920011474A KR940001318A KR 940001318 A KR940001318 A KR 940001318A KR 1019920011474 A KR1019920011474 A KR 1019920011474A KR 920011474 A KR920011474 A KR 920011474A KR 940001318 A KR940001318 A KR 940001318A
Authority
KR
South Korea
Prior art keywords
chemical
container
weight
chemical liquid
liquid supply
Prior art date
Application number
KR1019920011474A
Other languages
Korean (ko)
Other versions
KR950007965B1 (en
Inventor
임천희
Original Assignee
김광호
삼성전자주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자주식회사 filed Critical 김광호
Priority to KR1019920011474A priority Critical patent/KR950007965B1/en
Publication of KR940001318A publication Critical patent/KR940001318A/en
Application granted granted Critical
Publication of KR950007965B1 publication Critical patent/KR950007965B1/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching

Abstract

본 발명은 시약 용기(또는 약액탱크)의 마개와 연결되는 약액 공급호스를 부분적으로 벨로우즈 형태로 형성함으로써, 종래 시약 용기 또는 화학 용액 교환시 문제가 되었던 요소를 안전성을 확보함과 더불어 용기 내부의 바닥면과 밀착되는 호스는 끝단에 웨이트를 설치하여 호스의 부유현상을 방지 할 뿐만 아니라, 상기 웨이트 밑면의 일부에 오목한 홈을 형성함으로써, 용기 냅의 밑면과 밀착되어 발생다는 약액 공급 불량을 제거한 것이다.The present invention partially forms a chemical supply hose connected to the stopper of the reagent container (or chemical tank) in a bellows shape, thereby ensuring safety of elements that have been a problem when exchanging a conventional reagent container or chemical solution and at the bottom of the container. Hose that is in close contact with the surface to prevent the floating phenomenon of the hose by installing the weight at the end, as well as forming a concave groove in the bottom portion of the weight, eliminating the poor supply of the chemical liquid that occurs in close contact with the bottom of the container nap.

Description

약액 공급 장치Chemical supply

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제3도는 본 발명의 약액 공급 장치의 사시도.3 is a perspective view of the chemical liquid supply apparatus of the present invention.

제4도는 제3도의 웨이트 부분(3b)을 확대 도시한 도면이다.4 is an enlarged view of the weight portion 3b of FIG.

Claims (2)

화학 용액을 담기 위한 시약 용기, 상기 시약 용기의 마개 및 상기 마개와 일체로 형성된 약액 공급 호스로 구성되는 약액 공급 장치에 있어서, 상기 약액 공급 호스는 부분적으로 마개 주위가 벨로우즈(bellows)로 형성됨과 동시에 상기 시약 용기 내부의 바닥면과 밀착되는 그 끝단부에 웨이트(weight)가 설치된 것을 특징으로 하는 약액 공급 장치.A chemical liquid supply device comprising a reagent container for containing a chemical solution, a cap of the reagent container, and a chemical liquid supply hose integrally formed with the cap, wherein the chemical liquid supply hose is partially formed with bellows around the cap. A chemical liquid supply device, characterized in that a weight is provided at the end of the reagent container in close contact with the bottom surface. 제1항에 있어서, 상기 약액 공급 호스의 끝단부에 설치된 웨이트는 용기 내부의 바닥면과 밀착되는 것을 방지하기 위해 그 끝단의 일부에 소정두께의 홈이 형성된 것을 특징으로 하는 약액 공급 장치.2. The chemical liquid supply device according to claim 1, wherein the weight provided at the end of the chemical supply hose is formed with a groove having a predetermined thickness in a part of the end to prevent the weight from coming into close contact with the bottom surface of the container. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019920011474A 1992-06-29 1992-06-29 Chemical liquor supplying apparatus KR950007965B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019920011474A KR950007965B1 (en) 1992-06-29 1992-06-29 Chemical liquor supplying apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019920011474A KR950007965B1 (en) 1992-06-29 1992-06-29 Chemical liquor supplying apparatus

Publications (2)

Publication Number Publication Date
KR940001318A true KR940001318A (en) 1994-01-11
KR950007965B1 KR950007965B1 (en) 1995-07-21

Family

ID=19335516

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019920011474A KR950007965B1 (en) 1992-06-29 1992-06-29 Chemical liquor supplying apparatus

Country Status (1)

Country Link
KR (1) KR950007965B1 (en)

Also Published As

Publication number Publication date
KR950007965B1 (en) 1995-07-21

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