KR940001304A - Quartz Boat Self-cleaning System - Google Patents

Quartz Boat Self-cleaning System Download PDF

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Publication number
KR940001304A
KR940001304A KR1019920009722A KR920009722A KR940001304A KR 940001304 A KR940001304 A KR 940001304A KR 1019920009722 A KR1019920009722 A KR 1019920009722A KR 920009722 A KR920009722 A KR 920009722A KR 940001304 A KR940001304 A KR 940001304A
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KR
South Korea
Prior art keywords
die
boat
body frame
door
unit
Prior art date
Application number
KR1019920009722A
Other languages
Korean (ko)
Other versions
KR950006978B1 (en
Inventor
팽재원
서병주
김염규
지재풍
Original Assignee
김주용
현대전자산업주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
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Application filed by 김주용, 현대전자산업주식회사 filed Critical 김주용
Priority to KR1019920009722A priority Critical patent/KR950006978B1/en
Publication of KR940001304A publication Critical patent/KR940001304A/en
Application granted granted Critical
Publication of KR950006978B1 publication Critical patent/KR950006978B1/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67288—Monitoring of warpage, curvature, damage, defects or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders

Abstract

본 발명은 반도체 제조공정 중 발생하는 보트 잔류물을 고순도 질소(N2)가스를 이용하여 자동으로 세척할 수 있는 석영 보트자동 세척 시스팀에 관한 것이다.The present invention relates to a quartz boat self-cleaning system capable of automatically cleaning boat residues generated during a semiconductor manufacturing process using high purity nitrogen (N 2 ) gas.

본 발명은, 정방형 육면체의 몸체 프레임(11)과, 상기 몸체 프레임(11)의 상부에 설치된 도어(9)와, 상기 몸체 프레임의 내부에 설치되는 다이(12)와, 상기 다이(12)를 지지하도록 연결되어 상기 다이(12)의 자동상승/하강을 구동하는 다이 상승/하강 유니트(13)와, 상기 다이(12)의 하측에 고정 설치되는 모터(1)와, 상기 모터(1)의 측에 연결되고, 상기 다이(12)의 고정 설치되는 회전판(6)과, 상기 회전판(6)의 양단부에 고정 설치되는 보트 걸이(3)와, 상기 다이(12)에 고정 설치되는노즐판(15)에 부착되며 보트 세척가스를 분사하는 노즐(7)과, 상기 다이(12)에 고정설치되면 상기 도어(12)에 연결되어 도어(12)의 자동개폐를 구동하는 도어 상승/하강 유니트(13)와, 상기 몸체 프레임(11)의 내측에서 외측으로 관통되게 설치되어 보트(2)에서 제거된 입자를 배출시키는 배출구(8)를 구비한 챕버(10)와, 상기 몸체프레임(11)의 외측에 부착되며 동작 명령을 입력하는데 이용되는 조작 키 판넬(5)과, 상기 조작 키 판넬(5)과 도어 상승/하강 유니트(14)와 모터(1)와 다이 상승/하강 유니트(13)와 전기적으로 연결되어 보트(2) 세척에 대한 전반적인 동작을 제어하는 전자 제어장치(16)를 구비한다.The present invention, the body frame 11 of the square hexahedron, the door 9 provided on the upper portion of the body frame 11, the die 12 provided in the body frame and the die 12 A die raising / lowering unit 13 which is connected to support and drives the automatic raising / lowering of the die 12, a motor 1 fixedly installed below the die 12, and the motor 1 of A rotating plate 6 which is connected to the side and fixedly installed on the die 12, a boat hanger 3 fixedly installed at both ends of the rotating plate 6, and a nozzle plate fixedly installed on the die 12. 15 is attached to the nozzle (7) for injecting the boat washing gas, and fixed to the die 12, the door lifting / lowering unit connected to the door 12 to drive the automatic opening and closing of the door 12 ( 13) and an outlet for penetrating outward from the inside of the body frame 11 to discharge the particles removed from the boat 2 A chapter 10 having an 8, an operation key panel 5 attached to an outer side of the body frame 11 and used to input an operation command, the operation key panel 5 and a door lift / lower An electronic control device 16 is electrically connected to the unit 14 and the motor 1 and the die raising / lowering unit 13 to control the overall operation of the boat 2 cleaning.

Description

석영 보트 자동세척 시스팀Quartz Boat Self-cleaning System

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제1a도는 본 발명인 석영 보트 자동세척 시스팀의 전체구성도.Figure 1a is an overall configuration of the present invention quartz boat automatic cleaning system.

제1b도는 도어의 작용상태도.Figure 1b is a working state of the door.

제2도는 전자제어장치의 세부 구성도.2 is a detailed configuration diagram of the electronic control apparatus.

* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings

1 : 모터 2 : 보트1: motor 2: boat

3 : 보트 거리 4 : 보트 걸이 홈3: Boat Street 4: Boat Hanger Home

5 : 조작 키 판넬 6 : 회전판5: operation key panel 6: rotating plate

7 : 세척 노즐 8 : 배출구7: washing nozzle 8: outlet

9 : 도어 10 : 챔버9: door 10: chamber

11 : 몸체프레임 12 : 다이11 body frame 12 die

13 : 다이상승/하강 유니트 14 : 도어 상승/하강 유니트13: die raising / lowering unit 14: door raising / lowering unit

15 : 노즐관 16 : 전자제어장치15 nozzle nozzle 16 electronic controller

Claims (5)

보트(boat) 세척 시스템에 있어서, 정방향 육면체의 몸체 프레임(11)과 상기 몸체 프레임(11)의 상부에 설치된 도어(9)와 상기 몸체 프레임의 내부에 설치되는 다이(12)와, 상기 다이(12)를 지지하도록 연결되어 상기 다이(12)의 자동 상승/하강을 구동하는 다이 상승/하강 구동수단(13)과, 상기 다이(12)의 하측에 고정 설치되는 회전 동력원 수단(1)과, 상기 회전 동력 수단(1)의 축에 연결되고 상기 다이(12)의 상측에 설치되는 회전판(6)과, 상기 회전판(6)의 양단부에 고정 설치되어 보트 걸이(3)와, 상기 다이(12)에 고정 설치되는 노즐관(15)에 부착되며 보트 세척가스를 분사하는 세척노즐(7)과, 상기 다이(12)에 고정 설치되며 상기 다이(12)에 연결되어 도어(12)의 자동개폐를 구동하는 도어 상승/하강 구동수단(13)과, 상기 몸체 프레임(11)의 내측에서 외측으로 관통되게 설치되어 보트(2)에서 제거된 입자를 배출시키는 배출구(8)를 구비한 챔버(10)와, 상기 몸체 프레임(11)의 외측에 부착되며 동작명령을 입력하는데 이용되는 조작키 판넬(5)과, 상기 조작 키 판넬(5)과 도어 상승/하강 구동수단(14)과 회전동력원 수단(1)와 다이 상승/하강 구동수단(13)과 전기적으로 연결되어 보트(2) 세척에 대한 전반적인 동작을 제어하는 전자 제어수단(16)을 구비한 것을 특징으로 하는 보트 자동 세척시스템.In the boat washing system, the body frame 11 of the forward hexahedron, the door 9 installed on the upper part of the body frame 11 and the die 12 installed inside the body frame, and the die ( 12, a die raising / lowering driving means 13 which is connected to support 12 to drive the automatic raising / lowering of the die 12, and a rotating power source means 1 fixedly installed at the lower side of the die 12; Rotating plate 6 which is connected to the shaft of the rotary power means 1 and is installed on the upper side of the die 12, fixed to both ends of the rotating plate 6, the boat hanger 3 and the die 12 Attached to the nozzle tube (15) fixedly installed on the nozzle nozzle (15) for injecting the boat washing gas, and fixedly installed on the die (12) and connected to the die (12) to automatically open and close the door (12). Door up / down driving means for driving a 13 and, through the inside of the body frame 11 to pass through A chamber 10 having a discharge port 8 installed to discharge particles removed from the boat 2, and an operation key panel 5 attached to an outer side of the body frame 11 and used to input an operation command; And, electrically connected to the operation key panel 5, the door lift / lower drive means 14, the rotary power source means 1, and the die lift / lower drive means 13, for overall operation of the boat 2 cleaning. Boat automatic washing system, characterized in that it comprises an electronic control means for controlling the 16. 제1항에 있어서, 상기 세척 노즐(7)의 가스 분출구는 보트(2)와 웨이퍼가 접촉하는 방향으로 향하게 설계되는 것을 특징으로 하는 보트 자동 세척시스템.2. Automatic boat cleaning system according to claim 1, characterized in that the gas outlet of the cleaning nozzle (7) is designed to face the boat (2) and the wafer in contact. 제1항에 있어서, 상기 세척노즐(7)의 가스 콘테이너는 각 방향의 가스 입력을 균일하게 하기 위하여 테프론 재질로 가공 설치하는 것을 특징으로 하는 보트 자동 세척시스템.2. The automatic boat cleaning system according to claim 1, wherein the gas container of the washing nozzle (7) is processed and installed in a Teflon material in order to uniformize the gas input in each direction. 제1항에 있어서, 상기 챔버(10)는 보트(2)에서 떨어진 입자를 효과적으로 배출하기 위하여 유선형을 형성하는 것을 특징으로 하는 보트 자동 세척시스템.2. The automatic boat cleaning system according to claim 1, wherein the chamber (10) forms a streamline to effectively discharge particles dropped from the boat (2). 제1항에 있어서, 상기 전자제어장치(16)는, 시스템을 제어하는 CPU(21)와, 상기 CPU(21)에 클럭을 제공하고 리셋시키는 클럭 발진/리셋제어부(34)와, 상기 CPU(21)에 어드레스 버스와 데이타 버스로 연결되어 데이타를 저장하는 기능을 하는 램과 롬으로 구성된 메모리부(22)와, 상기 CPU(21)에 어드레스 버스로 연결되고 데이타와 어드레스를 분리하여 어드레스 래치시키는 어드레스 래치부(23)와, 상기 CPU(21)와 연결되고 동작하는 기능부를 선택하는 칩 선택 로지기부(24)와, 상기 메모리부(22)에 데이타 및 어드레스 버스로 연결된 버퍼부(35)와 데이타 래치부(25,26,31), 상기 데이타 래치부(25)에 연결되어 기구부를 구동하는 솔레노이드와 릴레이를 구동하는 신호를 제공하는 증폭부(27)와, 상기 데이타 래치부(26)에 연결되어 래치된 디지탈 신호를 아날로그 신호로 바꾸는 디지탈/아날로그 변환부(28)와, 상기 디지탈/아날로그 변환부(28)에 연결되어 모터(1)로 향하는 신호를 증폭하여 출력하는 증폭부(29)와, 상기 데이타 래치부(31)와 버퍼부(35)에 연결되어 조작키(32)와, 상기 데이타 및 어드레스버스에 연결되어 디스플레이할 신호를 전송하는 디스플레이버퍼(35)와, 상기 데이타 및 어드레스버스에 연결되어 디스플레이할 신호를 전송하는 디스플레이버퍼(33)와, 상기 데이타 및 어드레스버스에 연결되어 센서로부터 입력되는 신호를 입력되는 버퍼부(30)을 구비하는 것을 특징으로 하는 보트 자동 세척시스템.The electronic control device (16) according to claim 1, wherein the electronic controller (16) includes: a CPU (21) for controlling a system, a clock oscillation / reset controller (34) for providing and resetting a clock to the CPU (21); A memory unit 22 having a RAM and a ROM connected to an address bus and a data bus to store data, and an address bus connected to the CPU 21 to separate an address and a data latch. A chip select register 24 for selecting an address latch unit 23, a functional unit connected to the CPU 21, and a buffer unit 35 connected to the memory unit 22 by a data and address bus; A data latch unit (25, 26, 31), an amplification unit (27) connected to the data latch unit (25) for driving a mechanism and a signal for driving a relay; Replace connected and latched digital signals with analog signals A digital / analog converter 28, an amplifier 29 connected to the digital / analog converter 28 to amplify and output a signal directed to the motor 1, and the data latch unit 31 and A display buffer 35 connected to the buffer unit 35 to transmit a signal to be displayed by being connected to the operation key 32 and the data and address buses, and a signal to be displayed connected to the data and address buses to be displayed. And a display buffer (33), and a buffer unit (30) connected to the data and address bus to receive a signal input from a sensor. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019920009722A 1992-06-05 1992-06-05 Automatic cleaning system of quartz boat KR950006978B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019920009722A KR950006978B1 (en) 1992-06-05 1992-06-05 Automatic cleaning system of quartz boat

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019920009722A KR950006978B1 (en) 1992-06-05 1992-06-05 Automatic cleaning system of quartz boat

Publications (2)

Publication Number Publication Date
KR940001304A true KR940001304A (en) 1994-01-11
KR950006978B1 KR950006978B1 (en) 1995-06-26

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030002041A (en) * 2001-06-30 2003-01-08 남종현 Herb medicinal rice wine and preparing method thereof
KR100385322B1 (en) * 1999-11-27 2003-05-23 새천년 태양 주식회사 A method for preparing healthy alcohol using medicinal herbs
KR100468081B1 (en) * 2002-03-21 2005-01-26 강정호 A Fermented Drink of Herb Extract And Its Making Process
KR100802301B1 (en) * 2003-12-30 2008-02-11 동부일렉트로닉스 주식회사 Automatic Door Device of Bath
CN116435226A (en) * 2023-05-04 2023-07-14 浙江海纳半导体股份有限公司 Method for removing metal contamination of monocrystalline silicon piece and decontamination equipment
CN116435226B (en) * 2023-05-04 2024-04-26 浙江海纳半导体股份有限公司 Method for removing metal contamination of monocrystalline silicon piece and decontamination equipment

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101353494B1 (en) * 2007-02-16 2014-01-22 엘아이지에이디피 주식회사 Apparatus for opening and closing inspection aperture, and manufacturing machine FPD having the same

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100385322B1 (en) * 1999-11-27 2003-05-23 새천년 태양 주식회사 A method for preparing healthy alcohol using medicinal herbs
KR20030002041A (en) * 2001-06-30 2003-01-08 남종현 Herb medicinal rice wine and preparing method thereof
KR100468081B1 (en) * 2002-03-21 2005-01-26 강정호 A Fermented Drink of Herb Extract And Its Making Process
KR100802301B1 (en) * 2003-12-30 2008-02-11 동부일렉트로닉스 주식회사 Automatic Door Device of Bath
CN116435226A (en) * 2023-05-04 2023-07-14 浙江海纳半导体股份有限公司 Method for removing metal contamination of monocrystalline silicon piece and decontamination equipment
CN116435226B (en) * 2023-05-04 2024-04-26 浙江海纳半导体股份有限公司 Method for removing metal contamination of monocrystalline silicon piece and decontamination equipment

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