KR930026512U - 도어개폐장치 - Google Patents
도어개폐장치Info
- Publication number
- KR930026512U KR930026512U KR2019920007672U KR920007672U KR930026512U KR 930026512 U KR930026512 U KR 930026512U KR 2019920007672 U KR2019920007672 U KR 2019920007672U KR 920007672 U KR920007672 U KR 920007672U KR 930026512 U KR930026512 U KR 930026512U
- Authority
- KR
- South Korea
- Prior art keywords
- door opening
- closing device
- closing
- door
- opening
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR92007672U KR950001743Y1 (ko) | 1992-05-07 | 1992-05-07 | 도어개폐장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR92007672U KR950001743Y1 (ko) | 1992-05-07 | 1992-05-07 | 도어개폐장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR930026512U true KR930026512U (ko) | 1993-12-28 |
KR950001743Y1 KR950001743Y1 (ko) | 1995-03-13 |
Family
ID=19332766
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR92007672U KR950001743Y1 (ko) | 1992-05-07 | 1992-05-07 | 도어개폐장치 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR950001743Y1 (ko) |
-
1992
- 1992-05-07 KR KR92007672U patent/KR950001743Y1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR950001743Y1 (ko) | 1995-03-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E701 | Decision to grant or registration of patent right | ||
REGI | Registration of establishment | ||
FPAY | Annual fee payment |
Payment date: 20030218 Year of fee payment: 9 |
|
LAPS | Lapse due to unpaid annual fee |