KR930024628U - 플라즈마 측정장치 - Google Patents

플라즈마 측정장치

Info

Publication number
KR930024628U
KR930024628U KR2019920005910U KR920005910U KR930024628U KR 930024628 U KR930024628 U KR 930024628U KR 2019920005910 U KR2019920005910 U KR 2019920005910U KR 920005910 U KR920005910 U KR 920005910U KR 930024628 U KR930024628 U KR 930024628U
Authority
KR
South Korea
Prior art keywords
measurement device
plasma measurement
plasma
measurement
Prior art date
Application number
KR2019920005910U
Other languages
English (en)
Other versions
KR950010292Y1 (ko
Inventor
강형창
성노영
이상윤
이재근
Original Assignee
현대전자산업 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업 주식회사 filed Critical 현대전자산업 주식회사
Priority to KR92005910U priority Critical patent/KR950010292Y1/ko
Publication of KR930024628U publication Critical patent/KR930024628U/ko
Application granted granted Critical
Publication of KR950010292Y1 publication Critical patent/KR950010292Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32458—Vessel
    • H01J37/32513—Sealing means, e.g. sealing between different parts of the vessel

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)
KR92005910U 1992-04-10 1992-04-10 플라즈마 측정장치 KR950010292Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR92005910U KR950010292Y1 (ko) 1992-04-10 1992-04-10 플라즈마 측정장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR92005910U KR950010292Y1 (ko) 1992-04-10 1992-04-10 플라즈마 측정장치

Publications (2)

Publication Number Publication Date
KR930024628U true KR930024628U (ko) 1993-11-27
KR950010292Y1 KR950010292Y1 (ko) 1995-12-08

Family

ID=19331561

Family Applications (1)

Application Number Title Priority Date Filing Date
KR92005910U KR950010292Y1 (ko) 1992-04-10 1992-04-10 플라즈마 측정장치

Country Status (1)

Country Link
KR (1) KR950010292Y1 (ko)

Also Published As

Publication number Publication date
KR950010292Y1 (ko) 1995-12-08

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Legal Events

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E701 Decision to grant or registration of patent right
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Payment date: 20041119

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