KR930018586U - Mixing tank temperature control unit in wet station - Google Patents

Mixing tank temperature control unit in wet station

Info

Publication number
KR930018586U
KR930018586U KR2019920000371U KR920000371U KR930018586U KR 930018586 U KR930018586 U KR 930018586U KR 2019920000371 U KR2019920000371 U KR 2019920000371U KR 920000371 U KR920000371 U KR 920000371U KR 930018586 U KR930018586 U KR 930018586U
Authority
KR
South Korea
Prior art keywords
control unit
temperature control
mixing tank
tank temperature
wet station
Prior art date
Application number
KR2019920000371U
Other languages
Korean (ko)
Other versions
KR0119240Y1 (en
Inventor
최주훈
Original Assignee
엘지반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체주식회사 filed Critical 엘지반도체주식회사
Priority to KR92000371U priority Critical patent/KR0119240Y1/en
Publication of KR930018586U publication Critical patent/KR930018586U/en
Application granted granted Critical
Publication of KR0119240Y1 publication Critical patent/KR0119240Y1/en

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00—Control of temperature
    • G05D23/19—Control of temperature characterised by the use of electric means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
KR92000371U 1992-01-14 1992-01-14 Mixing tank temperature control apparatus for wet station KR0119240Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR92000371U KR0119240Y1 (en) 1992-01-14 1992-01-14 Mixing tank temperature control apparatus for wet station

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR92000371U KR0119240Y1 (en) 1992-01-14 1992-01-14 Mixing tank temperature control apparatus for wet station

Publications (2)

Publication Number Publication Date
KR930018586U true KR930018586U (en) 1993-08-21
KR0119240Y1 KR0119240Y1 (en) 1998-08-01

Family

ID=19327809

Family Applications (1)

Application Number Title Priority Date Filing Date
KR92000371U KR0119240Y1 (en) 1992-01-14 1992-01-14 Mixing tank temperature control apparatus for wet station

Country Status (1)

Country Link
KR (1) KR0119240Y1 (en)

Also Published As

Publication number Publication date
KR0119240Y1 (en) 1998-08-01

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20060220

Year of fee payment: 9

EXPY Expiration of term