KR930016212U - 광센서 감도 다중 검출회로 - Google Patents
광센서 감도 다중 검출회로Info
- Publication number
- KR930016212U KR930016212U KR2019910022684U KR910022684U KR930016212U KR 930016212 U KR930016212 U KR 930016212U KR 2019910022684 U KR2019910022684 U KR 2019910022684U KR 910022684 U KR910022684 U KR 910022684U KR 930016212 U KR930016212 U KR 930016212U
- Authority
- KR
- South Korea
- Prior art keywords
- detection circuit
- optical sensor
- sensor sensitivity
- multiple detection
- sensitivity multiple
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Geophysics And Detection Of Objects (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019910022684U KR940007814Y1 (ko) | 1991-12-18 | 1991-12-18 | 광센서 감도 다중 검출회로 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019910022684U KR940007814Y1 (ko) | 1991-12-18 | 1991-12-18 | 광센서 감도 다중 검출회로 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR930016212U true KR930016212U (ko) | 1993-07-28 |
KR940007814Y1 KR940007814Y1 (ko) | 1994-10-24 |
Family
ID=19324579
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019910022684U KR940007814Y1 (ko) | 1991-12-18 | 1991-12-18 | 광센서 감도 다중 검출회로 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR940007814Y1 (ko) |
-
1991
- 1991-12-18 KR KR2019910022684U patent/KR940007814Y1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR940007814Y1 (ko) | 1994-10-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E701 | Decision to grant or registration of patent right | ||
REGI | Registration of establishment | ||
FPAY | Annual fee payment |
Payment date: 20040920 Year of fee payment: 11 |
|
LAPS | Lapse due to unpaid annual fee |