KR930007505U - 화공약품 부족 경보장치 - Google Patents

화공약품 부족 경보장치

Info

Publication number
KR930007505U
KR930007505U KR2019910015022U KR910015022U KR930007505U KR 930007505 U KR930007505 U KR 930007505U KR 2019910015022 U KR2019910015022 U KR 2019910015022U KR 910015022 U KR910015022 U KR 910015022U KR 930007505 U KR930007505 U KR 930007505U
Authority
KR
South Korea
Prior art keywords
warning device
shortage warning
chemical
chemical shortage
warning
Prior art date
Application number
KR2019910015022U
Other languages
English (en)
Other versions
KR950005097Y1 (ko
Inventor
김진옥
Original Assignee
금성일렉트론 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 금성일렉트론 주식회사 filed Critical 금성일렉트론 주식회사
Priority to KR2019910015022U priority Critical patent/KR950005097Y1/ko
Publication of KR930007505U publication Critical patent/KR930007505U/ko
Application granted granted Critical
Publication of KR950005097Y1 publication Critical patent/KR950005097Y1/ko

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/52—Controlling or regulating the coating process

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
KR2019910015022U 1991-09-14 1991-09-14 화공약품 부족 경보장치 KR950005097Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019910015022U KR950005097Y1 (ko) 1991-09-14 1991-09-14 화공약품 부족 경보장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019910015022U KR950005097Y1 (ko) 1991-09-14 1991-09-14 화공약품 부족 경보장치

Publications (2)

Publication Number Publication Date
KR930007505U true KR930007505U (ko) 1993-04-26
KR950005097Y1 KR950005097Y1 (ko) 1995-06-22

Family

ID=19319300

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019910015022U KR950005097Y1 (ko) 1991-09-14 1991-09-14 화공약품 부족 경보장치

Country Status (1)

Country Link
KR (1) KR950005097Y1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030048193A (ko) * 2001-12-11 2003-06-19 동부전자 주식회사 반도체 제조설비의 화학약품 공급장치

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030048193A (ko) * 2001-12-11 2003-06-19 동부전자 주식회사 반도체 제조설비의 화학약품 공급장치

Also Published As

Publication number Publication date
KR950005097Y1 (ko) 1995-06-22

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Legal Events

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E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
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Year of fee payment: 10

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