KR930000850A - Linear bearing assemblies with rolling elements and printing machines including them - Google Patents

Abstract

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Description

Linear bearing assemblies with rolling elements and printing machines including them

Since this is an open matter, no full text was included.

1 is a schematic representation of an improved linear bearing assembly according to the present invention.

2 is a schematic diagram of an electron beam copying machine incorporating the present invention.

3 is an exploded view of the X-Y table of FIG.

Claims (6)

A linear bearing assembly having parallel guides for guiding the rolling elements forced to the care paper to provide movement to the moving and stationary parts, and having elastic means for reducing or eliminating the movement of the rolling elements . The cage according to claim 1, wherein means for reducing or eliminating movement are provided on the cage with at least one pair of resilient elements, one end of which is connected to the cage and the other end of which is respectively connected to the movement guide and the stationary guide. Linear bearing assembly, characterized in that. The linear bearing assembly of claim 2 wherein said resilient element is a coil spring. Particle beams are transferred onto the substrate through the beam column, with a magnetic diffraction assembly for positioning the beam within an area of a selected size, and printing with a 5X-Y table for mounting the substrate and moving in the X and Y directions A machine comprising: a set of linear bearing assemblies positioned between said first and second stages, said first and second stages capable of moving in one direction, reducing the movement of rolling elements mounted on said respective linear bearing assembly sets Or elastic means for removal, a third stage that moves in a direction perpendicular to the second stage, located between the second stage and the third stage, and perpendicular to the aforementioned set for mutual movement therebetween. Linear bearing assembly positioned in an orientation direction, a linear bearing assembly positioned between the second stage and the third stage And a resilient element mounted on said X-Y table for reducing or eliminating the movement of the rolling element installed in the assembly. 5. The device of claim 4, wherein the resilient means consists of four devices each having a guide, a rolling element, and a rolling element cage, wherein the rolling element and the cage are installed to move within the guide and the two resilient means A copying machine, which is connected to one end of the guide, the other two elastic means are attached to the second guide, and the four elastic devices are all attached to the cage. A printing machine according to claim 5, wherein said elastic means is a coil spring. ※ Note: The disclosure is based on the initial application.