KR920020277A - How to prevent dark reaction when storing photoresist - Google Patents

How to prevent dark reaction when storing photoresist Download PDF

Info

Publication number
KR920020277A
KR920020277A KR1019910005362A KR910005362A KR920020277A KR 920020277 A KR920020277 A KR 920020277A KR 1019910005362 A KR1019910005362 A KR 1019910005362A KR 910005362 A KR910005362 A KR 910005362A KR 920020277 A KR920020277 A KR 920020277A
Authority
KR
South Korea
Prior art keywords
photoresist
dark reaction
prevent dark
storing
sealed
Prior art date
Application number
KR1019910005362A
Other languages
Korean (ko)
Inventor
김원호
박한수
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019910005362A priority Critical patent/KR920020277A/en
Publication of KR920020277A publication Critical patent/KR920020277A/en

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

내용 없음No content

Description

포토레지스트 보관시 암반응 방지방법How to prevent dark reaction when storing photoresist

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제2도는 본 발명에 따른 포토레지스트 보관방법에 관한 실시예를 나타낸 도면이다.2 is a view showing an embodiment of a photoresist storage method according to the present invention.

Claims (3)

혼합 포토레지스트 보관시 암반응 현상을 방지하기 위한 방법에 있어서, 상기 혼합 포토레지스트가 저장된 탱크내부의 공간부분에 존재하는 공기를 배출시킨후 불활성가스를 중입하고 밀봉하여 냉장 보관함을 특징으로 하는 포토레지스트 보관시 암반응 방지방법.A method for preventing a dark reaction phenomenon when storing a mixed photoresist, the photoresist storage characterized in that the air is discharged in the space portion of the tank in which the mixed photoresist is stored, and then refrigerated and sealed by inert gas and sealed To prevent cancer reactions 제1항에 있어서, 상기 불활성가스가 헬륨임을 특징으로 하는 포토레지스트 보관시 암반응 방지방법.The method of claim 1, wherein the inert gas is helium. 제1항에 있어서, 상기 냉장보관은 2~8℃사이에서 항상 일정한 온도로 유지함을 특징으로 하는 포토레지스트 보관시 암반응 방지방법.The method of claim 1, wherein the refrigerated storage is kept at a constant temperature between 2 ° C. and 8 ° C. at all times. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019910005362A 1991-04-03 1991-04-03 How to prevent dark reaction when storing photoresist KR920020277A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019910005362A KR920020277A (en) 1991-04-03 1991-04-03 How to prevent dark reaction when storing photoresist

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019910005362A KR920020277A (en) 1991-04-03 1991-04-03 How to prevent dark reaction when storing photoresist

Publications (1)

Publication Number Publication Date
KR920020277A true KR920020277A (en) 1992-11-20

Family

ID=67400321

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019910005362A KR920020277A (en) 1991-04-03 1991-04-03 How to prevent dark reaction when storing photoresist

Country Status (1)

Country Link
KR (1) KR920020277A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100961625B1 (en) * 2001-09-03 2010-06-08 스미또모 가가꾸 가부시키가이샤 Method for the preservation of colored photosensitive resin composition

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100961625B1 (en) * 2001-09-03 2010-06-08 스미또모 가가꾸 가부시키가이샤 Method for the preservation of colored photosensitive resin composition

Similar Documents

Publication Publication Date Title
JPS51125144A (en) Stabilized organic materials composition
FR2509694B1 (en)
KR920018015A (en) Stabilization method and stabilized isocyanate composition of isocyanate compound
KR920020277A (en) How to prevent dark reaction when storing photoresist
KR890011588A (en) Liver fibrosis inhibitor
JPS55111425A (en) Stabilization of tetrafluoroethylene
JPS523005A (en) Process for stabilization of furon
KR900001298A (en) Herbicidal granular composition
KR910018200A (en) Ink ribbon cassette
JPS5327984A (en) Intermediate hinge-up deck for cargo carrier vessels
KR850005657A (en) Small high pressure gas container for mobile device
JPS5297467A (en) T divergence connection part of low temperature coolant transportation pipe
JPS523006A (en) Process for stabilization of furon
James A Critical Examination of the Text of Isaiah Based on the Dead Sea Scroll of Isaiah (DSIa), the Masoretic Text, the Septuagint and the Isaiah Texts of Clement of Alexandria, Origen, and Eusebius
JPS5229850A (en) Stabilized polyurethane composition with reduced discoloration
JPS52133734A (en) Data processing unit
JPS5231918A (en) Thick high tension steel plate, having superior low temperature tenaci ty
ES331587A1 (en) A method of storing or transporting a gas like a mixture of liquid and solid matter. (Machine-translation by Google Translate, not legally binding)
JPS5233223A (en) Fuel tank cap for vehicle
KR830008518A (en) How to add carbon dioxide to oranges
JPS51126919A (en) Materisl for storing hydrogen and its use
JPS5231988A (en) Composition used for stabilizing organic materials
KR930002879A (en) Radiation-sensitive composition
JPS5416876A (en) Bulb
Papathanassiou MECHANISMS OF ELIMINATION REACTIONS: BASE-PROMOTED ELIMINATIONS FROM ERYTHRO-AND THREO-2-CHLORO-1, 2-DIPHENYLETHYL PARA-TOLYL SULFONES

Legal Events

Date Code Title Description
A201 Request for examination
SUBM Submission of document of abandonment before or after decision of registration