KR920013674U - Sleeve direction detection device - Google Patents

Sleeve direction detection device

Info

Publication number
KR920013674U
KR920013674U KR2019900019847U KR900019847U KR920013674U KR 920013674 U KR920013674 U KR 920013674U KR 2019900019847 U KR2019900019847 U KR 2019900019847U KR 900019847 U KR900019847 U KR 900019847U KR 920013674 U KR920013674 U KR 920013674U
Authority
KR
South Korea
Prior art keywords
detection device
direction detection
sleeve direction
sleeve
detection
Prior art date
Application number
KR2019900019847U
Other languages
Korean (ko)
Other versions
KR0113509Y1 (en
Inventor
성용규
Original Assignee
엘지반도체 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체 주식회사 filed Critical 엘지반도체 주식회사
Priority to KR2019900019847U priority Critical patent/KR0113509Y1/en
Publication of KR920013674U publication Critical patent/KR920013674U/en
Application granted granted Critical
Publication of KR0113509Y1 publication Critical patent/KR0113509Y1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Geophysics And Detection Of Objects (AREA)
KR2019900019847U 1990-12-14 1990-12-14 Slip direction detection apparatus KR0113509Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019900019847U KR0113509Y1 (en) 1990-12-14 1990-12-14 Slip direction detection apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019900019847U KR0113509Y1 (en) 1990-12-14 1990-12-14 Slip direction detection apparatus

Publications (2)

Publication Number Publication Date
KR920013674U true KR920013674U (en) 1992-07-27
KR0113509Y1 KR0113509Y1 (en) 1998-04-16

Family

ID=19307004

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019900019847U KR0113509Y1 (en) 1990-12-14 1990-12-14 Slip direction detection apparatus

Country Status (1)

Country Link
KR (1) KR0113509Y1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102153292B1 (en) * 2018-06-18 2020-09-08 조남신 Manufacturing equipment of marble panel sample

Also Published As

Publication number Publication date
KR0113509Y1 (en) 1998-04-16

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Legal Events

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A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
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FPAY Annual fee payment

Payment date: 20041018

Year of fee payment: 8

EXPY Expiration of term