KR920010419U - 웨이퍼 절단기의 x축 구동장치 - Google Patents

웨이퍼 절단기의 x축 구동장치

Info

Publication number
KR920010419U
KR920010419U KR2019900017331U KR900017331U KR920010419U KR 920010419 U KR920010419 U KR 920010419U KR 2019900017331 U KR2019900017331 U KR 2019900017331U KR 900017331 U KR900017331 U KR 900017331U KR 920010419 U KR920010419 U KR 920010419U
Authority
KR
South Korea
Prior art keywords
cutting machine
axis drive
wafer cutting
wafer
axis
Prior art date
Application number
KR2019900017331U
Other languages
English (en)
Other versions
KR930007705Y1 (ko
Inventor
박정근
Original Assignee
금성일렉트론 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 금성일렉트론 주식회사 filed Critical 금성일렉트론 주식회사
Priority to KR2019900017331U priority Critical patent/KR930007705Y1/ko
Publication of KR920010419U publication Critical patent/KR920010419U/ko
Application granted granted Critical
Publication of KR930007705Y1 publication Critical patent/KR930007705Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67092—Apparatus for mechanical treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Transmission Devices (AREA)
KR2019900017331U 1990-11-12 1990-11-12 웨이퍼 절단기의 x축 구동장치 KR930007705Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019900017331U KR930007705Y1 (ko) 1990-11-12 1990-11-12 웨이퍼 절단기의 x축 구동장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019900017331U KR930007705Y1 (ko) 1990-11-12 1990-11-12 웨이퍼 절단기의 x축 구동장치

Publications (2)

Publication Number Publication Date
KR920010419U true KR920010419U (ko) 1992-06-17
KR930007705Y1 KR930007705Y1 (ko) 1993-11-12

Family

ID=19305287

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019900017331U KR930007705Y1 (ko) 1990-11-12 1990-11-12 웨이퍼 절단기의 x축 구동장치

Country Status (1)

Country Link
KR (1) KR930007705Y1 (ko)

Also Published As

Publication number Publication date
KR930007705Y1 (ko) 1993-11-12

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Legal Events

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E701 Decision to grant or registration of patent right
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Payment date: 20041018

Year of fee payment: 12

EXPY Expiration of term