KR920010369U - Falling device for coating solution of coating head - Google Patents

Falling device for coating solution of coating head

Info

Publication number
KR920010369U
KR920010369U KR2019900018362U KR900018362U KR920010369U KR 920010369 U KR920010369 U KR 920010369U KR 2019900018362 U KR2019900018362 U KR 2019900018362U KR 900018362 U KR900018362 U KR 900018362U KR 920010369 U KR920010369 U KR 920010369U
Authority
KR
South Korea
Prior art keywords
coating
falling device
head
coating solution
solution
Prior art date
Application number
KR2019900018362U
Other languages
Korean (ko)
Other versions
KR940000401Y1 (en
Inventor
정관호
Original Assignee
현대전자산업 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업 주식회사 filed Critical 현대전자산업 주식회사
Priority to KR2019900018362U priority Critical patent/KR940000401Y1/en
Publication of KR920010369U publication Critical patent/KR920010369U/en
Application granted granted Critical
Publication of KR940000401Y1 publication Critical patent/KR940000401Y1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1039—Recovery of excess liquid or other fluent material; Controlling means therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Coating Apparatus (AREA)
KR2019900018362U 1990-11-27 1990-11-27 Apparatus for preventing drop of coating solution KR940000401Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019900018362U KR940000401Y1 (en) 1990-11-27 1990-11-27 Apparatus for preventing drop of coating solution

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019900018362U KR940000401Y1 (en) 1990-11-27 1990-11-27 Apparatus for preventing drop of coating solution

Publications (2)

Publication Number Publication Date
KR920010369U true KR920010369U (en) 1992-06-17
KR940000401Y1 KR940000401Y1 (en) 1994-01-24

Family

ID=19305986

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019900018362U KR940000401Y1 (en) 1990-11-27 1990-11-27 Apparatus for preventing drop of coating solution

Country Status (1)

Country Link
KR (1) KR940000401Y1 (en)

Also Published As

Publication number Publication date
KR940000401Y1 (en) 1994-01-24

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