KR920008843A - Cap structure in vertical furnace with cover - Google Patents

Cap structure in vertical furnace with cover Download PDF

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Publication number
KR920008843A
KR920008843A KR1019900016250A KR900016250A KR920008843A KR 920008843 A KR920008843 A KR 920008843A KR 1019900016250 A KR1019900016250 A KR 1019900016250A KR 900016250 A KR900016250 A KR 900016250A KR 920008843 A KR920008843 A KR 920008843A
Authority
KR
South Korea
Prior art keywords
cover
cap structure
vertical furnace
cap
fastened
Prior art date
Application number
KR1019900016250A
Other languages
Korean (ko)
Other versions
KR930008852B1 (en
Inventor
송종부
Original Assignee
문정환
금성일렉트론 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 문정환, 금성일렉트론 주식회사 filed Critical 문정환
Priority to KR1019900016250A priority Critical patent/KR930008852B1/en
Publication of KR920008843A publication Critical patent/KR920008843A/en
Application granted granted Critical
Publication of KR930008852B1 publication Critical patent/KR930008852B1/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Closures For Containers (AREA)
  • Pressure Vessels And Lids Thereof (AREA)

Abstract

내용 없음.No content.

Description

커버를 갖는 수직로의 캡 구조Cap structure in vertical furnace with cover

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제 1 도는 종래의 수직로 도시도.1 is a conventional vertical drawing.

제 2 도는 종래 캡의 상세 사시도.2 is a detailed perspective view of a conventional cap.

제 3 도는 본 발명에 의한 캡 커버의 상면도 및 단면도.3 is a top view and a cross-sectional view of the cap cover according to the present invention.

* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings

1, 1' : 캡 커버 2, 2' : 핀구멍1, 1 ': cap cover 2, 2': pin hole

3 : 캡3: cap

Claims (3)

스테인레스(SUS)캡을 갖는 수직로에 있어서, 캡의 상면을 덮는 수정커버(3)를 포함하도록 구성된 것을 특징으로 하는 수직로의 캡구조.A vertical furnace having a stainless steel (SUS) cap, the cap structure of the vertical furnace characterized in that it comprises a crystal cover (3) covering the upper surface of the cap. 제 1 항에 있어서, 상기 수정 커버(3)는 두부분으로 분리 및 체결 가능토록 구성된 것을 특징으로 하는 수직로의 캡 구조.2. The cap structure of claim 1, wherein the modification cover (3) is configured to be detachable and fastened in two parts. 제 2 항에 있어서, 상기 수정 커버(3)는 핀에 의해 분리 및 체결되는 것을 특징으로 하는 수직로의 캡 구조.3. The cap structure as claimed in claim 2, characterized in that the correction cover (3) is separated and fastened by a pin. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019900016250A 1990-10-13 1990-10-13 Cap structure of vertical furnace with cover KR930008852B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019900016250A KR930008852B1 (en) 1990-10-13 1990-10-13 Cap structure of vertical furnace with cover

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019900016250A KR930008852B1 (en) 1990-10-13 1990-10-13 Cap structure of vertical furnace with cover

Publications (2)

Publication Number Publication Date
KR920008843A true KR920008843A (en) 1992-05-28
KR930008852B1 KR930008852B1 (en) 1993-09-16

Family

ID=19304603

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019900016250A KR930008852B1 (en) 1990-10-13 1990-10-13 Cap structure of vertical furnace with cover

Country Status (1)

Country Link
KR (1) KR930008852B1 (en)

Also Published As

Publication number Publication date
KR930008852B1 (en) 1993-09-16

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