KR920007042U - Gate side sidewall spacer structure - Google Patents
Gate side sidewall spacer structureInfo
- Publication number
- KR920007042U KR920007042U KR2019900014150U KR900014150U KR920007042U KR 920007042 U KR920007042 U KR 920007042U KR 2019900014150 U KR2019900014150 U KR 2019900014150U KR 900014150 U KR900014150 U KR 900014150U KR 920007042 U KR920007042 U KR 920007042U
- Authority
- KR
- South Korea
- Prior art keywords
- sidewall spacer
- spacer structure
- gate side
- side sidewall
- gate
- Prior art date
Links
- 125000006850 spacer group Chemical group 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28247—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon passivation or protection of the electrode, e.g. using re-oxidation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/4983—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET with a lateral structure, e.g. a Polysilicon gate with a lateral doping variation or with a lateral composition variation or characterised by the sidewalls being composed of conductive, resistive or dielectric material
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019900014150U KR930006282Y1 (en) | 1990-09-13 | 1990-09-13 | Side-wall space structure for gate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019900014150U KR930006282Y1 (en) | 1990-09-13 | 1990-09-13 | Side-wall space structure for gate |
Publications (2)
Publication Number | Publication Date |
---|---|
KR920007042U true KR920007042U (en) | 1992-04-22 |
KR930006282Y1 KR930006282Y1 (en) | 1993-09-17 |
Family
ID=19303362
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019900014150U KR930006282Y1 (en) | 1990-09-13 | 1990-09-13 | Side-wall space structure for gate |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR930006282Y1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102584397B1 (en) * | 2016-02-05 | 2023-09-27 | 중부대학교 산학협력단 | Elderly Pedestrain-friendly exercise equipment |
-
1990
- 1990-09-13 KR KR2019900014150U patent/KR930006282Y1/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR930006282Y1 (en) | 1993-09-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E701 | Decision to grant or registration of patent right | ||
REGI | Registration of establishment | ||
FPAY | Annual fee payment |
Payment date: 20020820 Year of fee payment: 10 |
|
LAPS | Lapse due to unpaid annual fee |