KR920002820A - Soft magnetic metal material deposited with low electrical resistivity - Google Patents

Soft magnetic metal material deposited with low electrical resistivity

Info

Publication number
KR920002820A
KR920002820A KR1019900011600A KR900011600A KR920002820A KR 920002820 A KR920002820 A KR 920002820A KR 1019900011600 A KR1019900011600 A KR 1019900011600A KR 900011600 A KR900011600 A KR 900011600A KR 920002820 A KR920002820 A KR 920002820A
Authority
KR
South Korea
Prior art keywords
metal material
soft magnetic
magnetic metal
electrical resistivity
material deposited
Prior art date
Application number
KR1019900011600A
Other languages
Korean (ko)
Other versions
KR920005621B1 (en
Inventor
김대수
박종성
민인선
Original Assignee
주식회사 럭키금속
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 럭키금속 filed Critical 주식회사 럭키금속
Priority to KR1019900011600A priority Critical patent/KR920005621B1/en
Publication of KR920002820A publication Critical patent/KR920002820A/en
Application granted granted Critical
Publication of KR920005621B1 publication Critical patent/KR920005621B1/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Soft Magnetic Materials (AREA)
KR1019900011600A 1990-07-30 1990-07-30 Soft magnetic metal material by deposition of a small specific resistance material KR920005621B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019900011600A KR920005621B1 (en) 1990-07-30 1990-07-30 Soft magnetic metal material by deposition of a small specific resistance material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019900011600A KR920005621B1 (en) 1990-07-30 1990-07-30 Soft magnetic metal material by deposition of a small specific resistance material

Publications (2)

Publication Number Publication Date
KR920002820A true KR920002820A (en) 1992-02-28
KR920005621B1 KR920005621B1 (en) 1992-07-10

Family

ID=19301777

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019900011600A KR920005621B1 (en) 1990-07-30 1990-07-30 Soft magnetic metal material by deposition of a small specific resistance material

Country Status (1)

Country Link
KR (1) KR920005621B1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9235140B2 (en) 2010-02-23 2016-01-12 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9235140B2 (en) 2010-02-23 2016-01-12 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method

Also Published As

Publication number Publication date
KR920005621B1 (en) 1992-07-10

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Legal Events

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Payment date: 19970429

Year of fee payment: 6

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