KR910019160A - EM measuring device - Google Patents

EM measuring device Download PDF

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Publication number
KR910019160A
KR910019160A KR1019900005124A KR900005124A KR910019160A KR 910019160 A KR910019160 A KR 910019160A KR 1019900005124 A KR1019900005124 A KR 1019900005124A KR 900005124 A KR900005124 A KR 900005124A KR 910019160 A KR910019160 A KR 910019160A
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KR
South Korea
Prior art keywords
measuring device
current sensor
sample
current change
current
Prior art date
Application number
KR1019900005124A
Other languages
Korean (ko)
Other versions
KR920010755B1 (en
Inventor
신봉조
전종빈
김흥식
Original Assignee
문정환
금성일렉트론 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 문정환, 금성일렉트론 주식회사 filed Critical 문정환
Priority to KR1019900005124A priority Critical patent/KR920010755B1/en
Publication of KR910019160A publication Critical patent/KR910019160A/en
Application granted granted Critical
Publication of KR920010755B1 publication Critical patent/KR920010755B1/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Measurement Of Resistance Or Impedance (AREA)

Abstract

내용 없음No content

Description

EM측정장치EM measuring device

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제 2 도 (가)는 본 발명에 따른 EM측정장치의 구성도, (나)는 본 발명에 따른 시료 회로도, 제 3 도 (가)(나)는 본 발명의 동작 설명을 위한 회로도.Figure 2 (a) is a block diagram of the EM measuring apparatus according to the present invention, (b) is a sample circuit diagram according to the present invention, Figure 3 (a) (b) is a circuit diagram for explaining the operation of the present invention.

Claims (1)

히티브 스테이지(23)위에 웨이퍼(Wafer)(25)를 올려놓고 측정하는 EM측정장치에 있어서, 파워 소오소로 사용하는 정전압원(21)과, 측정되는 시료의 전류변화를 감지하는 전류감지기(20)와, 상기 전류감지기(20)에 의해 감지된 전류 변화에 따라 시료의 페일 타임을 타임을 기록하는 타임기록계(24)를 포함하여 한번 측정시 여러개의 데이타를 얻도록 제작된 시료를 측정하는 것을 특징으로 하는 EM측정장치.In the EM measuring apparatus in which a wafer 25 is placed on the active stage 23, a constant voltage source 21 used as a power source and a current sensor 20 for detecting a current change of a sample to be measured are used. And a time recorder 24 for recording the fail time of the sample according to the current change sensed by the current sensor 20. Featuring an EM measuring device. ※ 참고사항 : 최초출원내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019900005124A 1990-04-13 1990-04-13 Electro migration measuring apparatus KR920010755B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019900005124A KR920010755B1 (en) 1990-04-13 1990-04-13 Electro migration measuring apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019900005124A KR920010755B1 (en) 1990-04-13 1990-04-13 Electro migration measuring apparatus

Publications (2)

Publication Number Publication Date
KR910019160A true KR910019160A (en) 1991-11-30
KR920010755B1 KR920010755B1 (en) 1992-12-14

Family

ID=19297969

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019900005124A KR920010755B1 (en) 1990-04-13 1990-04-13 Electro migration measuring apparatus

Country Status (1)

Country Link
KR (1) KR920010755B1 (en)

Also Published As

Publication number Publication date
KR920010755B1 (en) 1992-12-14

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