KR910019141A - Exposure device around the object - Google Patents
Exposure device around the objectInfo
- Publication number
- KR910019141A KR910019141A KR1019900006042A KR900006042A KR910019141A KR 910019141 A KR910019141 A KR 910019141A KR 1019900006042 A KR1019900006042 A KR 1019900006042A KR 900006042 A KR900006042 A KR 900006042A KR 910019141 A KR910019141 A KR 910019141A
- Authority
- KR
- South Korea
- Prior art keywords
- exposure device
- device around
- around
- exposure
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP89-109291 | 1989-04-28 | ||
JP1109291A JPH0612756B2 (en) | 1989-04-28 | 1989-04-28 | Wafer peripheral exposure device |
JP1147174A JP2707732B2 (en) | 1989-06-09 | 1989-06-09 | Wafer peripheral exposure system |
JP89-147174 | 1989-06-09 | ||
JP1209850A JPH0713998B2 (en) | 1989-08-14 | 1989-08-14 | Wafer position detector |
JP89-209850 | 1989-08-14 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR910019141A true KR910019141A (en) | 1991-11-30 |
KR930007097B1 KR930007097B1 (en) | 1993-07-29 |
Family
ID=27311433
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019900006042A KR930007097B1 (en) | 1989-04-28 | 1990-04-28 | Exposing apparatus of semiconductor wafer |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR930007097B1 (en) |
-
1990
- 1990-04-28 KR KR1019900006042A patent/KR930007097B1/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR930007097B1 (en) | 1993-07-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
G160 | Decision to publish patent application | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
FPAY | Annual fee payment |
Payment date: 20040723 Year of fee payment: 12 |
|
LAPS | Lapse due to unpaid annual fee |