KR910012327A - e-beam deposition method - Google Patents

e-beam deposition method Download PDF

Info

Publication number
KR910012327A
KR910012327A KR1019890018820A KR890018820A KR910012327A KR 910012327 A KR910012327 A KR 910012327A KR 1019890018820 A KR1019890018820 A KR 1019890018820A KR 890018820 A KR890018820 A KR 890018820A KR 910012327 A KR910012327 A KR 910012327A
Authority
KR
South Korea
Prior art keywords
beam deposition
deposition method
mesh
interlocked
shutter
Prior art date
Application number
KR1019890018820A
Other languages
Korean (ko)
Other versions
KR920000244B1 (en
Inventor
송준호
Original Assignee
김정배
삼성전관 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김정배, 삼성전관 주식회사 filed Critical 김정배
Priority to KR1019890018820A priority Critical patent/KR920000244B1/en
Publication of KR910012327A publication Critical patent/KR910012327A/en
Application granted granted Critical
Publication of KR920000244B1 publication Critical patent/KR920000244B1/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process

Abstract

내용 없음No content

Description

e-빔 증착방법e-beam deposition method

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

Claims (2)

e-빔 증착에 있어서, 반응물원과 기판 사이에 메쉬를 설치하여 증착을 행하는 것을 특징으로 하는 e-빔증착방법.In the e-beam deposition, the e-beam deposition method characterized in that the deposition is carried out by installing a mesh between the reactant source and the substrate. 제1항에 있어서, 메쉬를 셔터와 연동시킴을 특징으로 하는 e-빔 증착방법.The e-beam deposition method of claim 1, wherein the mesh is interlocked with the shutter. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019890018820A 1989-12-18 1989-12-18 Process for the electrodeposition of e-beam KR920000244B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019890018820A KR920000244B1 (en) 1989-12-18 1989-12-18 Process for the electrodeposition of e-beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019890018820A KR920000244B1 (en) 1989-12-18 1989-12-18 Process for the electrodeposition of e-beam

Publications (2)

Publication Number Publication Date
KR910012327A true KR910012327A (en) 1991-08-07
KR920000244B1 KR920000244B1 (en) 1992-01-10

Family

ID=19293084

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019890018820A KR920000244B1 (en) 1989-12-18 1989-12-18 Process for the electrodeposition of e-beam

Country Status (1)

Country Link
KR (1) KR920000244B1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI281691B (en) 2004-08-23 2007-05-21 Ind Tech Res Inst Method for manufacturing a quantum-dot element

Also Published As

Publication number Publication date
KR920000244B1 (en) 1992-01-10

Similar Documents

Publication Publication Date Title
DE59005537D1 (en) Device for producing boreholes with an undercut.
KR920000892A (en) Coating film forming material
KR910012327A (en) e-beam deposition method
KR880008871A (en) Process for producing thin fiber-reinforced resin sheet
KR910009951A (en) Dichroic Plating of Jewelry
KR920006253A (en) Ceramic composition using coal ash
KR890005199A (en) Urea introduced carboxy-styrene-butadiene latex-based heavy compound
KR910009584A (en) Lightweight Mortar Composition
KR850005239A (en) Usual
KR860001197A (en) Charter Pretreatment
KR970035375A (en) Manufacturing method of sunroof with dual structure
KR920002768A (en) Phosphorylated Aminoglycoside Antibiotic High Productivity
KR860001891A (en) Decorative Golden Substitute Alloy
KR850000058A (en) A washboard recessed
KR840002687A (en) Yeonwa manufacturing method
KR900016412A (en) Tile adhesive
KR910008040A (en) Manufacturing method of decorative polyester film
KR850006309A (en) Method for preparing cyclodextrin-containing compound
KR880009580A (en) Method of manufacturing Doenjang Using Salted Fish
KR880001750A (en) Manufacturing method of flame retardant styropol
KR840001239A (en) Agricultural Vinyl Film Manufacturing Method
KR920004526A (en) Manufacturing method of colored luminous paint
KR850006011A (en) Economy alternative fuel
KR850001682A (en) Adhesive Balsam Paint
KR860002236A (en) Knitting machine

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
G160 Decision to publish patent application
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20080104

Year of fee payment: 17

LAPS Lapse due to unpaid annual fee