KR910011569U - Thin film deposition device - Google Patents

Thin film deposition device

Info

Publication number
KR910011569U
KR910011569U KR2019890019808U KR890019808U KR910011569U KR 910011569 U KR910011569 U KR 910011569U KR 2019890019808 U KR2019890019808 U KR 2019890019808U KR 890019808 U KR890019808 U KR 890019808U KR 910011569 U KR910011569 U KR 910011569U
Authority
KR
South Korea
Prior art keywords
thin film
film deposition
deposition device
thin
film
Prior art date
Application number
KR2019890019808U
Other languages
Korean (ko)
Other versions
KR910007405Y1 (en
Inventor
염홍서
송준호
Original Assignee
삼성전관 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 삼성전관 주식회사 filed Critical 삼성전관 주식회사
Priority to KR2019890019808U priority Critical patent/KR910007405Y1/en
Publication of KR910011569U publication Critical patent/KR910011569U/en
Application granted granted Critical
Publication of KR910007405Y1 publication Critical patent/KR910007405Y1/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/52—Means for observation of the coating process

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
KR2019890019808U 1989-12-23 1989-12-23 Apparatus for forming thin film by vacuum evaporator KR910007405Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019890019808U KR910007405Y1 (en) 1989-12-23 1989-12-23 Apparatus for forming thin film by vacuum evaporator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019890019808U KR910007405Y1 (en) 1989-12-23 1989-12-23 Apparatus for forming thin film by vacuum evaporator

Publications (2)

Publication Number Publication Date
KR910011569U true KR910011569U (en) 1991-07-29
KR910007405Y1 KR910007405Y1 (en) 1991-09-26

Family

ID=19293907

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019890019808U KR910007405Y1 (en) 1989-12-23 1989-12-23 Apparatus for forming thin film by vacuum evaporator

Country Status (1)

Country Link
KR (1) KR910007405Y1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108396304A (en) * 2018-06-05 2018-08-14 北京铂阳顶荣光伏科技有限公司 A kind of observation device, evaporation coating device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100956261B1 (en) * 2010-01-14 2010-05-07 이동엽 Ultraviolet reflector and sterilizer within the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108396304A (en) * 2018-06-05 2018-08-14 北京铂阳顶荣光伏科技有限公司 A kind of observation device, evaporation coating device

Also Published As

Publication number Publication date
KR910007405Y1 (en) 1991-09-26

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