KR910001604U - 플런지 업 유니트의 핀홀더 - Google Patents

플런지 업 유니트의 핀홀더

Info

Publication number
KR910001604U
KR910001604U KR2019890009212U KR890009212U KR910001604U KR 910001604 U KR910001604 U KR 910001604U KR 2019890009212 U KR2019890009212 U KR 2019890009212U KR 890009212 U KR890009212 U KR 890009212U KR 910001604 U KR910001604 U KR 910001604U
Authority
KR
South Korea
Prior art keywords
plunge
unit
pin holder
holder
pin
Prior art date
Application number
KR2019890009212U
Other languages
English (en)
Other versions
KR920002163Y1 (ko
Inventor
신순희
Original Assignee
삼성항공산업 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 삼성항공산업 주식회사 filed Critical 삼성항공산업 주식회사
Priority to KR2019890009212U priority Critical patent/KR920002163Y1/ko
Publication of KR910001604U publication Critical patent/KR910001604U/ko
Application granted granted Critical
Publication of KR920002163Y1 publication Critical patent/KR920002163Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by supporting substrates others than wafers, e.g. chips
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67092—Apparatus for mechanical treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR2019890009212U 1989-06-29 1989-06-29 플런지 업 유니트의 핀홀더 KR920002163Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019890009212U KR920002163Y1 (ko) 1989-06-29 1989-06-29 플런지 업 유니트의 핀홀더

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019890009212U KR920002163Y1 (ko) 1989-06-29 1989-06-29 플런지 업 유니트의 핀홀더

Publications (2)

Publication Number Publication Date
KR910001604U true KR910001604U (ko) 1991-01-24
KR920002163Y1 KR920002163Y1 (ko) 1992-03-28

Family

ID=19287666

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019890009212U KR920002163Y1 (ko) 1989-06-29 1989-06-29 플런지 업 유니트의 핀홀더

Country Status (1)

Country Link
KR (1) KR920002163Y1 (ko)

Also Published As

Publication number Publication date
KR920002163Y1 (ko) 1992-03-28

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Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
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FPAY Annual fee payment

Payment date: 20010220

Year of fee payment: 10

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