KR910001366A - Pressure sensor - Google Patents

Pressure sensor Download PDF

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Publication number
KR910001366A
KR910001366A KR1019900008578A KR900008578A KR910001366A KR 910001366 A KR910001366 A KR 910001366A KR 1019900008578 A KR1019900008578 A KR 1019900008578A KR 900008578 A KR900008578 A KR 900008578A KR 910001366 A KR910001366 A KR 910001366A
Authority
KR
South Korea
Prior art keywords
pressure sensor
circuit board
electronic component
fixed electrode
diaphragm
Prior art date
Application number
KR1019900008578A
Other languages
Korean (ko)
Inventor
미끼오 다까다
도시지 다까하시
Original Assignee
원본미기재
오므론 가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 원본미기재, 오므론 가부시끼가이샤 filed Critical 원본미기재
Publication of KR910001366A publication Critical patent/KR910001366A/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/08—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of piezoelectric devices, i.e. electric circuits therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

내용 없음No content

Description

압력 센서Pressure sensor

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제1도는 본 발명에 따른 압력 센서의 실시예를 도시하는 단면도,1 is a cross-sectional view showing an embodiment of a pressure sensor according to the present invention;

제2도는 제1도에 따른 압력 센서의 실시예를 도시하는 사시도,2 is a perspective view showing an embodiment of the pressure sensor according to FIG.

제3도는 본 발명에 따른 압력 센서의 다른 실시예를 도시하는 단면도.3 is a cross-sectional view showing another embodiment of the pressure sensor according to the present invention.

Claims (4)

하방으로 돌출하는 압력 유도관이 있는 바닥부와 상부 개구를 구비하는 센서 몸체와, 다이어프램과, 디이어프램에 고정된 이동 가능한 전극과, 이동 가능한 전극 위에 평행하게 위치하며 센서 몸체의 상부 개구를 덮는 고정된 전극 및, 고정된 전극 위로 예정된 거리에 전개되어 있고 전자 부품이 장착되는 진동 회로판을 구비하는 것을 특징으로 하는 압력 센서.A sensor body having a bottom portion and an upper opening with a downwardly directed pressure induction tube, a diaphragm, a movable electrode fixed to the diaphragm, and positioned parallel to the movable electrode and covering the upper opening of the sensor body. And a fixed electrode and a vibrating circuit board which is deployed at a predetermined distance over the fixed electrode and to which the electronic component is mounted. 제1항에 있어서, 상기 전자 부품은 진동 회로판의 상부 표면상에 위치하는 것을 특징으로 하는 압력 센서.The pressure sensor of claim 1, wherein the electronic component is located on an upper surface of the vibration circuit board. 제1항에 있어서, 상기 진동회로판의 전자 부품은 고정된 전극을 향하고 있는 것을 특징으로 하는 압력 센서.The pressure sensor according to claim 1, wherein the electronic component of the vibrating circuit board faces a fixed electrode. 제3항에 있어서, 상기 진동회로판의 상부 표면상에 금속막이 형성되는 것을 특징으로 하는 압력 센서.4. The pressure sensor according to claim 3, wherein a metal film is formed on the upper surface of the vibration circuit board. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019900008578A 1989-06-12 1990-06-12 Pressure sensor KR910001366A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP1989068251U JPH038738U (en) 1989-06-12 1989-06-12
JP1-68251 1989-06-12

Publications (1)

Publication Number Publication Date
KR910001366A true KR910001366A (en) 1991-01-30

Family

ID=13368352

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019900008578A KR910001366A (en) 1989-06-12 1990-06-12 Pressure sensor

Country Status (3)

Country Link
EP (1) EP0402818A1 (en)
JP (1) JPH038738U (en)
KR (1) KR910001366A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101255449B1 (en) * 2008-09-19 2013-04-17 니혼샤신 인사츠 가부시키가이샤 Pressure sensor
US8457332B2 (en) 2009-01-07 2013-06-04 Knowles Electronics, Llc Microphone and orientation sensor assembly

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3114570B2 (en) * 1995-05-26 2000-12-04 オムロン株式会社 Capacitive pressure sensor
CN101982864B (en) * 2010-09-30 2015-03-04 深圳市金亿帝科技有限公司 Movable electrode of variable capacitor, pressure sensor and blood pressure measuring equipment
KR20180073179A (en) 2016-12-22 2018-07-02 엘에스산전 주식회사 Vacuum interrupter

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4128006A (en) * 1976-12-13 1978-12-05 Bunker Ramo Corporation Packaging of pressure sensor cells
CA1137781A (en) * 1979-04-16 1982-12-21 Mark A. Brooks Pressure sensor
JPS62174249U (en) * 1986-04-24 1987-11-05

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101255449B1 (en) * 2008-09-19 2013-04-17 니혼샤신 인사츠 가부시키가이샤 Pressure sensor
US8457332B2 (en) 2009-01-07 2013-06-04 Knowles Electronics, Llc Microphone and orientation sensor assembly

Also Published As

Publication number Publication date
EP0402818A1 (en) 1990-12-19
JPH038738U (en) 1991-01-28

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application