KR900014074A - Non-small electrode for plasma processing - Google Patents

Non-small electrode for plasma processing Download PDF

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Publication number
KR900014074A
KR900014074A KR1019890003024A KR890003024A KR900014074A KR 900014074 A KR900014074 A KR 900014074A KR 1019890003024 A KR1019890003024 A KR 1019890003024A KR 890003024 A KR890003024 A KR 890003024A KR 900014074 A KR900014074 A KR 900014074A
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KR
South Korea
Prior art keywords
plasma processing
holder
small electrode
alloy
hafnium
Prior art date
Application number
KR1019890003024A
Other languages
Korean (ko)
Inventor
세이지 미즈노
Original Assignee
고이께 요시오
고이께 산소 고오교오 가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 고이께 요시오, 고이께 산소 고오교오 가부시끼가이샤 filed Critical 고이께 요시오
Priority to KR1019890003024A priority Critical patent/KR900014074A/en
Publication of KR900014074A publication Critical patent/KR900014074A/en

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Abstract

내용 없음No content

Description

플라즈마 가공용 비소모형전극Non-small electrode for plasma processing

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제1도는, 본 발명에 의한 전극의 단면 설명도.1 is a cross-sectional explanatory diagram of an electrode according to the present invention.

제2도는, 본 발명의 요부 사시 설명도.2 is an explanatory diagram of main parts of the present invention.

제3도는, 본 발명의 전극을 사용하여 산소 플라즈마 가공을 행할 때의 모식 설명도.3 is a schematic explanatory diagram when oxygen plasma processing is performed using the electrode of the present invention.

제4도는, 본 발명의 전극과 비교하기 위하여 사용한 전극의 단면설명도이다.4 is an explanatory cross-sectional view of an electrode used for comparison with the electrode of the present invention.

Claims (1)

내부에 냉각유체를 유통시키기 위한 뚫린 구멍(1b)을 형성한 동 또는 동 합금으로 된 호울더(1)와, 상기 호울더(1)의 앞 끝단면(1a)에서 뚫린 구멍(1b)까지 관통하여 끼워 장착된 하프늄 또는 하프늄 합금으로 된 작용 인서어트(2)와를 가지며, 더욱이 상기 호울더(1)와 상기 작용 인서어트(2)와의 접촉면에 알루미늄 또는 알루미늄 합금으로 된 금속 스페이스(3)를 배치한 것을 특징으로 하는 플라즈마 가공용 비소모형 전극.The holder (1) made of copper or copper alloy having a drilled hole (1b) for circulating the cooling fluid therein, and the hole (1b) from the front end surface (1a) of the holder (1). And a working insert 2 made of hafnium or a hafnium alloy fitted therein, and furthermore, a metal space 3 made of aluminum or an aluminum alloy is arranged on the contact surface between the holder 1 and the working insert 2. Non-consumable electrode for plasma processing, characterized in that. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019890003024A 1989-03-11 1989-03-11 Non-small electrode for plasma processing KR900014074A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019890003024A KR900014074A (en) 1989-03-11 1989-03-11 Non-small electrode for plasma processing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019890003024A KR900014074A (en) 1989-03-11 1989-03-11 Non-small electrode for plasma processing

Publications (1)

Publication Number Publication Date
KR900014074A true KR900014074A (en) 1990-10-22

Family

ID=67776562

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019890003024A KR900014074A (en) 1989-03-11 1989-03-11 Non-small electrode for plasma processing

Country Status (1)

Country Link
KR (1) KR900014074A (en)

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