KR900014074A - Non-small electrode for plasma processing - Google Patents
Non-small electrode for plasma processing Download PDFInfo
- Publication number
- KR900014074A KR900014074A KR1019890003024A KR890003024A KR900014074A KR 900014074 A KR900014074 A KR 900014074A KR 1019890003024 A KR1019890003024 A KR 1019890003024A KR 890003024 A KR890003024 A KR 890003024A KR 900014074 A KR900014074 A KR 900014074A
- Authority
- KR
- South Korea
- Prior art keywords
- plasma processing
- holder
- small electrode
- alloy
- hafnium
- Prior art date
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Abstract
내용 없음No content
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제1도는, 본 발명에 의한 전극의 단면 설명도.1 is a cross-sectional explanatory diagram of an electrode according to the present invention.
제2도는, 본 발명의 요부 사시 설명도.2 is an explanatory diagram of main parts of the present invention.
제3도는, 본 발명의 전극을 사용하여 산소 플라즈마 가공을 행할 때의 모식 설명도.3 is a schematic explanatory diagram when oxygen plasma processing is performed using the electrode of the present invention.
제4도는, 본 발명의 전극과 비교하기 위하여 사용한 전극의 단면설명도이다.4 is an explanatory cross-sectional view of an electrode used for comparison with the electrode of the present invention.
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019890003024A KR900014074A (en) | 1989-03-11 | 1989-03-11 | Non-small electrode for plasma processing |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019890003024A KR900014074A (en) | 1989-03-11 | 1989-03-11 | Non-small electrode for plasma processing |
Publications (1)
Publication Number | Publication Date |
---|---|
KR900014074A true KR900014074A (en) | 1990-10-22 |
Family
ID=67776562
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019890003024A KR900014074A (en) | 1989-03-11 | 1989-03-11 | Non-small electrode for plasma processing |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR900014074A (en) |
-
1989
- 1989-03-11 KR KR1019890003024A patent/KR900014074A/en not_active Application Discontinuation
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Legal Events
Date | Code | Title | Description |
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A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E601 | Decision to refuse application |