KR900012219U - 알루미늄 증착장치 - Google Patents

알루미늄 증착장치

Info

Publication number
KR900012219U
KR900012219U KR2019880021432U KR880021432U KR900012219U KR 900012219 U KR900012219 U KR 900012219U KR 2019880021432 U KR2019880021432 U KR 2019880021432U KR 880021432 U KR880021432 U KR 880021432U KR 900012219 U KR900012219 U KR 900012219U
Authority
KR
South Korea
Prior art keywords
deposition equipment
aluminum deposition
aluminum
equipment
deposition
Prior art date
Application number
KR2019880021432U
Other languages
English (en)
Other versions
KR910001804Y1 (ko
Inventor
최경석
Original Assignee
삼성전관 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 삼성전관 주식회사 filed Critical 삼성전관 주식회사
Priority to KR2019880021432U priority Critical patent/KR910001804Y1/ko
Publication of KR900012219U publication Critical patent/KR900012219U/ko
Application granted granted Critical
Publication of KR910001804Y1 publication Critical patent/KR910001804Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/86—Vessels; Containers; Vacuum locks
    • H01J29/88—Vessels; Containers; Vacuum locks provided with coatings on the walls thereof; Selection of materials for the coatings
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2229/00—Details of cathode ray tubes or electron beam tubes
    • H01J2229/88—Coatings
    • H01J2229/882—Coatings having particular electrical resistive or conductive properties

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
KR2019880021432U 1988-12-24 1988-12-24 알루미늄 증착장치 KR910001804Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019880021432U KR910001804Y1 (ko) 1988-12-24 1988-12-24 알루미늄 증착장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019880021432U KR910001804Y1 (ko) 1988-12-24 1988-12-24 알루미늄 증착장치

Publications (2)

Publication Number Publication Date
KR900012219U true KR900012219U (ko) 1990-07-03
KR910001804Y1 KR910001804Y1 (ko) 1991-03-28

Family

ID=19282480

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019880021432U KR910001804Y1 (ko) 1988-12-24 1988-12-24 알루미늄 증착장치

Country Status (1)

Country Link
KR (1) KR910001804Y1 (ko)

Also Published As

Publication number Publication date
KR910001804Y1 (ko) 1991-03-28

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Legal Events

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E701 Decision to grant or registration of patent right
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Payment date: 20020227

Year of fee payment: 12

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