KR900004675B1 - Epoxy resin composition for encapsulating semiconductor - Google Patents

Epoxy resin composition for encapsulating semiconductor Download PDF

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KR900004675B1
KR900004675B1 KR1019870000986A KR870000986A KR900004675B1 KR 900004675 B1 KR900004675 B1 KR 900004675B1 KR 1019870000986 A KR1019870000986 A KR 1019870000986A KR 870000986 A KR870000986 A KR 870000986A KR 900004675 B1 KR900004675 B1 KR 900004675B1
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epoxy resin
epoxy
silica
resin composition
softening point
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KR880010057A (en
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여종기
정규상
이제군
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주식회사 럭키
허신구
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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L63/00Compositions of epoxy resins; Compositions of derivatives of epoxy resins
    • C08L63/04Epoxynovolacs
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/29Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon

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  • Computer Hardware Design (AREA)
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  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Epoxy Resins (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)

Abstract

An epoxy resin compsn. for encapsulating semiconductor comprises: 10- 30 wt. pts. of cresolnovolac epoxy resin or phenolnovolac epoxy resin having 180-240 epoxy equivs., 60-110≰C softening point; 5-20 wt. pts. of phenolnovolac resin or cresolnovolac resin havig 70-110≰C softening point; 60-80 wt. pts. of inorg. filler; and 0.1-5 wt. pts. of hume silica having 0.010.5 of particle size, 100-300 m2 of spec. surface area. Pref. the epoxy resin comtains above 3 epoxy gp. per one molecula of that; the inorg. filler is silicon oxide, calcium carbonate, melting silica, alumina or mica.

Description

반도체 밀봉용 에폭시 수지조성물Epoxy Resin Composition for Semiconductor Sealing

본 발명은 반도체소자 밀봉용 에폭시 수지조성물, 특히 유동성 및 성형성이 우수한 반도체 밀봉용 에폭시 수지조성물에 관한 것이다.The present invention relates to an epoxy resin composition for semiconductor element sealing, in particular an epoxy resin composition for semiconductor sealing excellent in fluidity and moldability.

종래에는 트랜지스터, IC, LSI와 같은 반도체 소자의 밀봉에 유리, 금속, 세라믹등이 사용되어 왔으나, 근래에는 이들 소재대신에 에폭시계, 실리콘계, 페놀계, 프탈레이트계등의 열경화성수지가 사용되고 있다.Conventionally, glass, metals, ceramics, and the like have been used to seal semiconductor devices such as transistors, ICs, and LSIs, but in recent years, thermosetting resins such as epoxy, silicon, phenol, and phthalate systems have been used instead of these materials.

이중에서 에폭시수지는 내열성, 전기특성, 치수안정성, 접착성등이 양호하기 때문에 전기전자부품, 접착제등의 용도로 널리 사용되고 있고, 특히 근년에는 전자부품의 소형화, 경량화 추세에 따른 소자의 고밀도화, 대형화 및 복합화등에 따라 다기능성의 반도체 밀봉용 소재로 에폭시수지재료가 널리 사용되어져 왔다.Among them, epoxy resins are widely used for electric and electronic parts and adhesives because of their excellent heat resistance, electrical properties, dimensional stability, and adhesiveness.In recent years, in recent years, high-density and large-size devices have been developed due to the trend of miniaturization and light weight of electronic parts. And epoxy resin materials have been widely used as a multifunctional semiconductor sealing material according to the compounding and the like.

반도체 소자의 밀봉용 재료는 내열성, 내습성, 기계적강도가 좋아야하며, 금형을 마모시키지 않는 적당한 경도를 나타내고, 냉각사이클시 내부 밀봉물과의 열팽창계수의 차이가 적어야하며, 반도체소자의 발열을 방지하기 위하여 양호한 열전도도를 갖는 것이 바람직하다.The sealing material of the semiconductor device should have good heat resistance, moisture resistance, and mechanical strength, exhibit moderate hardness that does not wear the mold, and have a small difference in the coefficient of thermal expansion from the internal seal during the cooling cycle, and prevent heat generation of the semiconductor device. In order to do so, it is preferable to have good thermal conductivity.

전술한 일반적인 요구 특성외에 특히, 유동성이 우수한 밀봉용 재료가 요구되고 있다. 그러나, 유동성이 너무 높을 경우 성형시 금형의 작은 틈으로 수지가 흘러들어가 후레쉬(Flash)가 발생하여 작업성을 저하시킨다.In addition to the general required properties described above, a sealing material having excellent fluidity is particularly desired. However, if the fluidity is too high, resin flows into a small gap of the mold during molding, causing flash to deteriorate workability.

이와같은 반도체 부품의 리드선상에 발생하는 후레쉬를 제거하지 않을 경우 납땜등의 공정시 불량을 생기게하는 원인이 된다. 그래서 최적의 유동성을 가지며 후레쉬 발생이 억제된 성형성이 우수한 밀봉용 조성물을 필요로 하게 되었다.Failure to remove the flash generated on the lead wire of the semiconductor component may cause defects during the soldering process. Therefore, there is a need for a sealing composition having optimum flowability and excellent moldability in which generation of flash is suppressed.

종래의 반도체소자의 밀봉용 수지로서 사용된 에폭시수지조성물을 전술한 일반적인 요구특성을 만족시켰으나 유동성 및 성형성의 면에서 불량하며, 또한 에폭시수지의 종류 및 양을 조정하고, 무기충진제의 입자크기 및 입도분포를 조절한 결과 유동성 및 성형성은 어느 정도 만족되었지만 기계적강도 및 내습성의 저하를 가져왔다.The epoxy resin composition used as a sealing resin of the conventional semiconductor device satisfies the above general requirements, but is poor in fluidity and formability, and also adjusts the type and amount of the epoxy resin, and the particle size and particle size of the inorganic filler. As a result of adjusting the distribution, the fluidity and moldability were satisfactorily satisfied, but the mechanical strength and the moisture resistance were lowered.

따라서, 본 발명자들은 전술한 반도체 밀봉용 에폭시수지의 요구특성을 만족시키며 기계적강도의 저하와 내습성의 저하를 제거한 다음의 성분을 주성분으로하는 에폭시수지조성물을 발명하였다.Accordingly, the present inventors have invented an epoxy resin composition containing the following components as a main component that satisfies the above-described requirements of the epoxy resin for semiconductor encapsulation and removes a decrease in mechanical strength and a decrease in moisture resistance.

1) 에폭시당량 180-240, 연화점 60-110℃의 크레졸노블락에폭시수지 또는 페놀노볼락에폭시수지 10-30중량부.1) 10-30 parts by weight of a cresol noblock epoxy resin or a phenol novolac epoxy resin having an epoxy equivalent of 180-240 and a softening point of 60-110 ° C.

2) 70-110℃의 연화점을 갖는 페놀노볼락수지 또는 크레졸노볼락수지 5-20중량부.2) 5-20 parts by weight of a phenol novolak resin or cresol novolak resin having a softening point of 70-110 ° C.

3) 무기충전제 60-80중량부.3) 60-80 parts by weight of inorganic filler.

4) 입자크기가 0.01-0.05μ이고 비표면적인 100-300m2/g인 형상이 연기같은 흄실리카 0.1-5중량부.4) 0.1-5 parts by weight of fume silica, which has a particle size of 0.01-0.05μ and a specific surface of 100-300m 2 / g.

본 발명에 사용한 1)성분의 크레졸노볼락계수지와 페놀노볼락계수지는 에폭시당량이 180-240이고, 연화점이 60-110℃의 의 범위인 크레졸노볼락에폭시수지 또는 페놀노볼락에폭시수지로서 1분자중에 3개 이상의 에폭시기를 함유하는 것으로 에폭시당량이 240 이상이면 가교밀도의 감소로 인하여 충분한 내열성, 기계적강도를 얻을 수 없으며 연화점이 110℃이상일 경우는 유동성의 저하로 밀봉작업에 어려움이 생긴다.The cresol novolak resin and phenol novolak resin of component 1) used in the present invention are epoxy equivalent 180-240 and have a softening point in the range of 60-110 ° C. as a cresol novolak epoxy resin or phenol novolac epoxy resin. If the epoxy equivalent is 240 or more in the molecule, if the epoxy equivalent is more than 240, sufficient heat resistance and mechanical strength cannot be obtained due to the decrease in crosslinking density.

또한 60℃ 이하일 경우에는 후레쉬의 발생이 현저하게 많아진다. 크레졸노볼락에폭시수지 또는 페놀노볼락에폭시수지 이외의 비스페놀형 에폭시수지는 에폭시 당량을 240 이하로 할 경우 저점도 액상이 되어 후레쉬 발생 억제특성이 현저히 저하되고 성형시의 내열성도 저하된다.In addition, when it is 60 degrees C or less, generation | occurrence | production of a flash becomes remarkably large. Bisphenol type epoxy resins other than cresol novolac epoxy resins or phenol novolac epoxy resins have a low viscosity liquid phase when the epoxy equivalent is 240 or less, resulting in a markedly low flash generation suppression property and a low heat resistance during molding.

또한, 상기 1)성분의 크레졸노볼락에폭시수지 또는 페놀노볼락에폭시수지의 성형재료에 난연성을 부여하기 위하여 전 에폭시수지중에 통상 10-30중량%의 브롬화에폭시수지를 사용하는 것이 바람직하다.In order to impart flame retardance to the molding material of cresol novolac epoxy resin or phenol novolac epoxy resin of component 1) above, it is preferable to use 10-30% by weight of brominated epoxy resin in all epoxy resins.

브롬화에폭시수지는 브롬화페놀노볼락에폭시수지, 브롬화크레졸노볼락에폭시수지등의 노볼락형 에폭시수지와 브롬화비스페놀 A형의 에폭시수지가 사용된다. 여기서 에폭시당량과 연화점은 제한이 없고 종래에 사용된 공지의 것을 사용할 수 있다.Brominated epoxy resins include novolac epoxy resins such as brominated phenol novolac epoxy resins and brominated cresol novolac epoxy resins and brominated bisphenol A epoxy resins. Here, the epoxy equivalent and softening point are not limited and known ones conventionally used can be used.

본 발명에 사용된 2)성분은 상기 1)성분을 주성분으로한 에폭시수지의 경화제로서 분자내에 수산기를 2개 이상 함유하는 페놀노볼락수지, 크레졸노볼락수지등의 노볼락계수지로서 연화점이 70-110℃인 것이 사용된다. 노볼락수지이외의 경화제로 아민경화제와 산무수물계 경화제를 사용할 경우 내습성이 나빠져서 부적당하다.The component 2) used in the present invention is a curing agent for epoxy resins based on the component 1) as a novolak resin such as phenol novolak resins or cresol novolak resins containing two or more hydroxyl groups in a molecule, and has a softening point of 70. What is used is -110 ° C. When the amine hardener and the acid anhydride hardener are used as the hardener other than the novolak resin, the moisture resistance is deteriorated, which is inappropriate.

연화점이 70℃보다 낮으면 후레쉬생성이 현저하며 110℃보다 높으면 유동성이 나빠져서 밀봉작업에 어려움이 생긴다. 2)성분의 사용량은 1)성분 100중량에 대하여 501-150중량의 범위에서 사용하는 것이 좋다. 이 범위 이외에서는 경화불량을 일으키고, 내습성, 내열성등의 물성저하를 일으킨다.If the softening point is lower than 70 ℃, the freshness is remarkable. If the softening point is higher than 110 ℃, the fluidity is worsened, which causes difficulty in sealing work. 2) The usage-amount of a component is good to use in the range of 501-150 weight with respect to 100 weight of 1) components. Outside this range, hardening defects are caused and physical properties such as moisture resistance and heat resistance are reduced.

본 발명에 사용된 3)성분의 무기충진제로는 예를 들면 산화실리콘, 탄산칼슘, 알루미나, 용융실리카, 결정성실리카, 유리, 마그네사이트, 석고, 흑연, 시멘트, 철카르보닐, 타르, 마이카, 규사, 카오린, 수산화알루미늄, 석면등이 있으며 2종이상 병행하여 사용할 수 있다. 좋기로는 중간입경이 5-30μ인 결정성 실리카 및 용융실리카로서, 전조성물중량당 60-80중량%가 사용된다.As the inorganic filler of 3) component used in the present invention, for example, silicon oxide, calcium carbonate, alumina, molten silica, crystalline silica, glass, magnesite, gypsum, graphite, cement, iron carbonyl, tar, mica, silica sand , Kaolin, aluminum hydroxide, asbestos, etc., can be used in combination of two or more. Preferably, as crystalline silica and fused silica having a median particle size of 5-30 mu, 60-80 wt% is used per weight of the precursor composition.

60중량% 이하 사용시는 열팽창율이 커져서 반도체 밀봉장치인 경우 내열성 및 내크랙(crack)성, 내습성 등의 물성이 저하되며 80중량% 이상 사용시는 유동성이 저하되어 반도체소자와 리드를 연결하는 본딩와이어가 절단되거나 심할때는 밀봉체의 밀봉이 불가능하여진다.When using 60 wt% or less, the coefficient of thermal expansion increases, so that in the case of a semiconductor sealing device, physical properties such as heat resistance, crack resistance, and moisture resistance are deteriorated. When the wire is cut or severe, the seal becomes impossible to seal.

본 발명에 사용된 4)성분인 흄실리카는 본 발명에서만 사용하는 성분으로 3)성분의 실리카와는 달리 실리콘사염소증기를 수소와 산소로 연소시킴으로서 가수분해되어 생성된 콜로이드(colloid)상태의 실리콘 디옥사이드며 피로제닉(pyrogenic)실라카라고도 한다.The fume silica, 4) component used in the present invention, is a component used only in the present invention, and unlike silica of 3) component, colloidal silicon produced by hydrolysis by burning silicon tetrachlorine vapor with hydrogen and oxygen. Dioxide, also called pyrogenic silica.

이 성분은 3)성분의 천연실리카와는 달리 연기와 같은 형상을 지녀 흄실리카라하며 분리시켰을 경우 결합을 형성하는 경향이 있으며 외력의 존재정도에 따라 선택적으로 형성되거나 파괴되는 3차원 망상구조를 갖는다.Unlike natural silica of 3), this component has the same shape as smoke and is called fume silica, and when separated, it has a tendency to form bonds and has a three-dimensional network structure that is selectively formed or destroyed depending on the presence of external force. .

또한, 흄실리카의 생성동안 수산기가 입자표면의 실리콘원자에 붙어있어서 흄실리카의 표면을 친수성을 띠게하여 다른 원료들과 수소결합을 할 수 있으며 그 결과 자유유동(free flow) 특성을 조절하는데 뛰어난 특성을 지닌 것으로 입경이 0.01-0.05μ 비표면적인 100-300m2/g 범위이며 X선 형상이 무정형이다. 좋기로는 입경이 0.012-0.2μ인 것을 사용하는 것이 본 발명의 특성을 만족시키는데 좋다.In addition, the hydroxyl group is attached to the silicon atom on the particle surface during the production of fume silica, which makes the surface of the fume silica hydrophilic, allowing hydrogen bonding with other raw materials. As a result, it is excellent in controlling the free flow characteristics. It has a particle size of 0.01-0.05μ specific surface area in the range of 100-300m 2 / g and its X-ray shape is amorphous. Preferably, the particle diameter of 0.012-0.2 µm is used to satisfy the characteristics of the present invention.

입경이 0.01μ보다 작으면 점도상승으로 인한 성형시 본딩와이어의 절단 등의 문제가 생기며 입경이 0.05μ 보다 크면 후레쉬(flash) 발생억제능력이 현저히 떨어지는 등의 문제가 생긴다. 또한 전체조성물 중량당 5중량% 이상을 첨가하면 점도상승폭이 너무 커서 자유유동성이 현저히 저하되어 성형시 본딩와이어가 절단되거나 심할 경우 밀봉이 불가능하여지며 0.1중량% 이하로 사용시는 유동성 및 후레쉬발생억제의 물성개선능력을 나타낼 수 없다.If the particle diameter is smaller than 0.01 μ, problems such as cutting of the bonding wire during molding due to the viscosity increase may occur. If the particle diameter is larger than 0.05 μ, a problem such as a remarkable decrease in the ability to suppress flash generation may occur. In addition, if more than 5% by weight of the total composition is added, the viscosity increase is so large that the free flow is remarkably lowered, so that when the bonding wire is cut or severe during molding, sealing becomes impossible and when used at 0.1% by weight or less, It cannot show the ability to improve properties.

본 발명의 반도체소자 밀봉용 에폭시수지조성물은 상기 기술한 1), 2), 3), 4) 성분을 필수성분으로 하며 또한, 성형시의 경화속도를 촉진하는 목적으로 이미다졸, 2-메틸이미다졸, 1,2-디메틸이미다졸, 2-페닐이미다졸, 2-에틸이미다졸등의 이미다졸류와 트리페닐포스핀, 트리부틸포스핀, 디메틸포스핀등의 유기포스핀계가 전조성물 중량당 0.1-1중량%, 삼산화안티몬등의 무기계난연조제, 착색제, 이형제, 커플링제, 열화방지제등의 공지의 첨가제를 10중량% 이하로 배합하여 사용함이 바람직하다.The epoxy resin composition for sealing a semiconductor device of the present invention contains the above-mentioned components 1), 2), 3) and 4) as an essential component, and imidazole and 2-methyl ions for the purpose of promoting the curing rate during molding. Imidazoles such as midazole, 1,2-dimethylimidazole, 2-phenylimidazole, 2-ethylimidazole and organic phosphine systems such as triphenylphosphine, tributylphosphine and dimethylphosphine 0.1-1% by weight per weight of the precursor, inorganic flame retardants such as antimony trioxide, colorants, mold release agents, coupling agents, deterioration inhibitors, and other known additives are preferably used in combination at 10% by weight or less.

본 발명의 반도체 밀봉용 에폭시수지 성형재료는 필요로 하는 각 성분을 롤(roll) 및 니더(Kneader)등의 혼합장치를 사용하여 균일하게 혼합하여서 얻어지며 혼합순서등의 구체적인 조작방법에는 특별한 제한은 없다.The epoxy resin molding material for semiconductor encapsulation of the present invention is obtained by uniformly mixing each component required using a mixing device such as a roll and a kneader, and the specific operation method such as the mixing procedure is not particularly limited. none.

본 발명의 에폭시수지조성물을 이용하여 실제로 각종반도체를 트랜스퍼 몰딩성형법으로 수지밀봉할 경우 종래의 내습성, 기계적강도, 열전도성등의 일반적인 특성을 만족하며 최적의 유동성 및 후레쉬발생억제에 탁월한 효과를 얻을 수 있었다.When using the epoxy resin composition of the present invention to actually seal various semiconductors by the transfer molding method, it satisfies general characteristics such as moisture resistance, mechanical strength, and thermal conductivity, and obtains excellent effects on optimum fluidity and freshness suppression. Could.

이하 본 발명의 효과를 실시예와 비교예를 들어 설명하겠다.Hereinafter, the effects of the present invention will be described with reference to Examples and Comparative Examples.

각 실시예 및 비교예에 사용된 크레졸노볼락에폭시수지는 에폭시당량 213, 연화점 79℃이고 브롬화 페놀노볼락에폭시수지는 에폭시당량 270, 연화점 92℃이며 페놀노볼락수지의 연화점은 100℃이다.The cresol novolac epoxy resins used in the examples and comparative examples were epoxy equivalent 213 and a softening point of 79 ° C., and brominated phenol novolac epoxy resins had an epoxy equivalent of 270 and a softening point of 92 ° C., and a phenol novolac resin had a softening point of 100 ° C.

본 발명에 사용된 무기충진제는 용융실리카 및 결정성실리카로서 중간 입경이 12-20μ인 것을 단독사용 및 혼용하였다.Inorganic fillers used in the present invention were used alone and mixed as molten silica and crystalline silica, having a median particle size of 12-20 µ.

[실시예 1-4]Example 1-4

크레졸노볼락에폭시수지, 브롬화페놀노볼락수지, 페놀노볼락수지에 표 1의 A, B, C, D의 흄실리카를 사용하고 여기에 2-메틸이미다졸, 카나우바와스, 삼산화안티몬, 카본블랙, 커플링제 및 용융실리카와 결정성실리카를 표 1의 양으로 배합하여 2개의 롤(Roll) 사이에서 85-95℃로 가열혼련시켜 일정한 입도로 분쇄하여 사용하기 편리하도록 타정(Tableting)하여 본 발명의 4종의 반도체밀봉용 에폭시수지조성물을 얻었다. 각 조성물의 스파이랄후로 및 후레쉬 특성을 표 1에 표시하였다. 후레쉬특성은 5μ 및 50μ의 틈새를 갖고 있는 후레쉬측정용 몰드를 사용하여 성형시의 후레쉬크기를 측μ정하였다.For the cresol novolac epoxy resin, brominated phenol novolak resin and phenol novolac resin, fumes silica of A, B, C and D shown in Table 1 was used, and 2-methylimidazole, carnaubawas, antimony trioxide, Carbon black, coupling agent, melted silica and crystalline silica are blended in the amounts shown in Table 1, and heat-kneaded between two rolls at 85-95 ° C. to be pulverized to a certain particle size for convenient use. Four kinds of epoxy resin compositions for semiconductor sealing of the present invention were obtained. The spiral and fresh properties of each composition are shown in Table 1. The freshness characteristics were measured by measuring the size of the flash at the time of molding using a mold for measuring freshness having a gap of 5 mu and 50 mu.

[비교예 1-4][Comparative Example 1-4]

본 발명의 흄실리카 효과를 알아보기 위해 흄실리카를 사용치 않은 경우와 입경이 다른 흄실리카를 사용한 경우의 비교예를 표 1에 나타난 성분 및 양으로 배합하여 이하 실시예와 동일한 조건으로 성형하여 각 조성물의 스파이랄후로 값과 후레쉬특성을 표 1에 함께 나타내었다.In order to examine the fume silica effect of the present invention, the comparative examples of the case where no fume silica is used and the fume silica having different particle diameters are combined with the components and amounts shown in Table 1, and molded under the same conditions as in the following examples. The values and fresh characteristics of the composition after the spiral are shown in Table 1.

[표 1]TABLE 1

Figure kpo00001
Figure kpo00001

* 주) 2실시예에서 제조한 에폭시수지조성물은 최적의 스파이랄후로 값을 나타내며 트랜스퍼성형법으로 반도체소자를 밀봉할 때 탁월한 효과를 발휘하였으며, 후레쉬의 생성방지 효과도 뛰어나게 우수하였다. 여기서 스파이랄후로의 측정방법은 공지의 측정방법으로 스파이랄 금형을 이용하여 EMMI 1-66(Epoxy Molding Material Institute : Society of Plastic Industry)에 준하여 측정된 값이다.* Note) The epoxy resin composition prepared in Example 2 shows the optimal spiral thickness and shows excellent effect when sealing the semiconductor device by transfer molding method. Here, the measurement method of spiral fluoro is a value measured according to EMMI 1-66 (Epoxy Molding Material Institute: Society of Plastic Industry) using a spiral mold as a known measurement method.

에폭시수지조성물은 측정치가 70-120cm일 때 양호하며, 더 좋기로는 80-110cm정도의 스파이랄후로 값을 나타내어야 한다.Epoxy resin compositions are good when the measurement is 70-120cm, more preferably 80-110cm.

Claims (3)

에폭시당량 180-240, 연화점 60-110℃의 크레졸노볼락에폭시수지 또는 페놀노볼락에폭시수지 10-30중량부, 70-110℃의 연화점을 갖는 페놀노볼락수지 또는 크레졸노볼락수지 5-20중량부, 무기충진제 60-80중량부 및 입자크기가 0.01-0.5μ이고, 비표면적인 100-300m2/g인 흄실리카 0.1-5중량부로 구성된 반도체 밀봉용 에폭시수지조성물.Epoxy equivalent 180-240, 10-30 parts of cresol novolac epoxy resin or phenol novolac epoxy resin at softening point of 60-110 ° C., 5-20 weight of phenol novolak resin or cresol novolac resin having softening point of 70-110 ° C. Part, 60-80 parts by weight of inorganic filler and 0.01-0.5μ particle size, 0.1-5 parts by weight of fume silica having a specific surface of 100-300m 2 / g epoxy resin composition for semiconductor sealing. 제1항에 있어서, 에폭시수지는 1분자중에 3이상의 에폭시기를 함유하는 것임을 특징으로 하는 반도체 밀봉용 에폭시수지조성물.The epoxy resin composition for semiconductor encapsulation according to claim 1, wherein the epoxy resin contains three or more epoxy groups in one molecule. 제1항에 있어서, 무기충진제가 산화실리콘, 탄산칼슘, 용융실리카, 결정성실리카, 알루미나, 마이카 임을 특징으로 하는 반도체 밀봉용 에폭시수지조성물.The epoxy resin composition for semiconductor encapsulation according to claim 1, wherein the inorganic filler is silicon oxide, calcium carbonate, molten silica, crystalline silica, alumina, mica.
KR1019870000986A 1987-02-07 1987-02-07 Epoxy resin composition for encapsulating semiconductor KR900004675B1 (en)

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