KR890018226U - Wafer chip separator - Google Patents

Wafer chip separator

Info

Publication number
KR890018226U
KR890018226U KR2019880002650U KR880002650U KR890018226U KR 890018226 U KR890018226 U KR 890018226U KR 2019880002650 U KR2019880002650 U KR 2019880002650U KR 880002650 U KR880002650 U KR 880002650U KR 890018226 U KR890018226 U KR 890018226U
Authority
KR
South Korea
Prior art keywords
wafer chip
chip separator
separator
wafer
chip
Prior art date
Application number
KR2019880002650U
Other languages
Korean (ko)
Other versions
KR910003003Y1 (en
Inventor
신순희
Original Assignee
삼성항공산업 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 삼성항공산업 주식회사 filed Critical 삼성항공산업 주식회사
Priority to KR2019880002650U priority Critical patent/KR910003003Y1/en
Publication of KR890018226U publication Critical patent/KR890018226U/en
Application granted granted Critical
Publication of KR910003003Y1 publication Critical patent/KR910003003Y1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67092—Apparatus for mechanical treatment
KR2019880002650U 1988-02-29 1988-02-29 Wafer chip separation device KR910003003Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019880002650U KR910003003Y1 (en) 1988-02-29 1988-02-29 Wafer chip separation device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019880002650U KR910003003Y1 (en) 1988-02-29 1988-02-29 Wafer chip separation device

Publications (2)

Publication Number Publication Date
KR890018226U true KR890018226U (en) 1989-09-09
KR910003003Y1 KR910003003Y1 (en) 1991-05-03

Family

ID=19272817

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019880002650U KR910003003Y1 (en) 1988-02-29 1988-02-29 Wafer chip separation device

Country Status (1)

Country Link
KR (1) KR910003003Y1 (en)

Also Published As

Publication number Publication date
KR910003003Y1 (en) 1991-05-03

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Legal Events

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A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
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FPAY Annual fee payment

Payment date: 19940503

Year of fee payment: 4

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