KR890013560U - High vacuum exhaust system - Google Patents

High vacuum exhaust system

Info

Publication number
KR890013560U
KR890013560U KR2019870021590U KR870021590U KR890013560U KR 890013560 U KR890013560 U KR 890013560U KR 2019870021590 U KR2019870021590 U KR 2019870021590U KR 870021590 U KR870021590 U KR 870021590U KR 890013560 U KR890013560 U KR 890013560U
Authority
KR
South Korea
Prior art keywords
exhaust system
high vacuum
vacuum exhaust
vacuum
exhaust
Prior art date
Application number
KR2019870021590U
Other languages
Korean (ko)
Other versions
KR900010019Y1 (en
Inventor
이찬용
Original Assignee
이찬용
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 이찬용 filed Critical 이찬용
Priority to KR2019870021590U priority Critical patent/KR900010019Y1/en
Publication of KR890013560U publication Critical patent/KR890013560U/en
Application granted granted Critical
Publication of KR900010019Y1 publication Critical patent/KR900010019Y1/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F9/00—Diffusion pumps
    • F04F9/02—Diffusion pumps of multi-stage type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/54—Installations characterised by use of jet pumps, e.g. combinations of two or more jet pumps of different type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F9/00—Diffusion pumps
    • F04F9/06—Arrangement of vapour traps
KR2019870021590U 1987-12-08 1987-12-08 Exhaust apparatus KR900010019Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019870021590U KR900010019Y1 (en) 1987-12-08 1987-12-08 Exhaust apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019870021590U KR900010019Y1 (en) 1987-12-08 1987-12-08 Exhaust apparatus

Publications (2)

Publication Number Publication Date
KR890013560U true KR890013560U (en) 1989-08-09
KR900010019Y1 KR900010019Y1 (en) 1990-10-29

Family

ID=19270171

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019870021590U KR900010019Y1 (en) 1987-12-08 1987-12-08 Exhaust apparatus

Country Status (1)

Country Link
KR (1) KR900010019Y1 (en)

Also Published As

Publication number Publication date
KR900010019Y1 (en) 1990-10-29

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Legal Events

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A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 19930722

Year of fee payment: 6

LAPS Lapse due to unpaid annual fee