KR890008909A - Semiconductor Manufacturing Method - Google Patents

Semiconductor Manufacturing Method

Info

Publication number
KR890008909A
KR890008909A KR1019880010958A KR880010958A KR890008909A KR 890008909 A KR890008909 A KR 890008909A KR 1019880010958 A KR1019880010958 A KR 1019880010958A KR 880010958 A KR880010958 A KR 880010958A KR 890008909 A KR890008909 A KR 890008909A
Authority
KR
South Korea
Prior art keywords
semiconductor manufacturing
semiconductor
manufacturing
Prior art date
Application number
KR1019880010958A
Other languages
Korean (ko)
Other versions
KR950014604B1 (en
Inventor
아끼라 요시노
겐지 오꾸무라
도시하루 오오니시
Original Assignee
다이또오 산소 가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 다이또오 산소 가부시끼가이샤 filed Critical 다이또오 산소 가부시끼가이샤
Publication of KR890008909A publication Critical patent/KR890008909A/en
Application granted granted Critical
Publication of KR950014604B1 publication Critical patent/KR950014604B1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
KR1019880010958A 1987-11-30 1988-08-27 Manufacturing method of semiconductor KR950014604B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP30420687 1987-11-30
JP??62-304206 1987-11-30

Publications (2)

Publication Number Publication Date
KR890008909A true KR890008909A (en) 1989-07-13
KR950014604B1 KR950014604B1 (en) 1995-12-11

Family

ID=17930294

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019880010958A KR950014604B1 (en) 1987-11-30 1988-08-27 Manufacturing method of semiconductor

Country Status (1)

Country Link
KR (1) KR950014604B1 (en)

Also Published As

Publication number Publication date
KR950014604B1 (en) 1995-12-11

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Legal Events

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Year of fee payment: 15

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