KR890007409A - 세라믹 기판의 소성방법 - Google Patents

세라믹 기판의 소성방법 Download PDF

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Publication number
KR890007409A
KR890007409A KR870011074A KR870011074A KR890007409A KR 890007409 A KR890007409 A KR 890007409A KR 870011074 A KR870011074 A KR 870011074A KR 870011074 A KR870011074 A KR 870011074A KR 890007409 A KR890007409 A KR 890007409A
Authority
KR
South Korea
Prior art keywords
firing method
load
ceramic substrate
substrate
firing
Prior art date
Application number
KR870011074A
Other languages
English (en)
Other versions
KR910009180B1 (ko
Inventor
정태영
Original Assignee
한형수
삼성코닝 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 한형수, 삼성코닝 주식회사 filed Critical 한형수
Priority to KR1019870011074A priority Critical patent/KR910009180B1/ko
Publication of KR890007409A publication Critical patent/KR890007409A/ko
Application granted granted Critical
Publication of KR910009180B1 publication Critical patent/KR910009180B1/ko

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/02—Containers; Seals
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B33/00—Clay-wares
    • C04B33/02—Preparing or treating the raw materials individually or as batches

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Dispersion Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Furnace Charging Or Discharging (AREA)

Abstract

내용 없음

Description

세라믹 기판의 소성방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제3도는 본 발명 세라믹 기판의 소성방법을 나타낸 분해 사시도.
제4도는 본 발명 세라믹기판의 소성된 상태를 나타낸 단면도.

Claims (3)

  1. 90°내각을 가진 소정형상의 받침판(1)상에 미소성기판(2)을 탑재하고 이위에 하중판(4)(5)을 90°각도 재치하여 두측하중에 소성할 수 있게한 것을 특징으로하는 세라믹기판의 소성방법.
  2. 제1항에 있어서, 상기 하중판(4)(5)각각의 일측 단면에 요부(4a)와 철부(5a)를 형성하여 일정소성후 무하중상태를 유지할 수 있도록한 것을 특징으로하는 사세라믹기판의 소성방법.
  3. 제1항에 있어서, 상기 소정형상의 받침판(1)과 하중판(4)(5)을 몰리브덴 (Mo)금속으로 형성하여 소성기판(2)의 표면을 매끄럽게할 수 있도록 한 것을 특징으로하는 세라믹기판의 소성방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임
KR1019870011074A 1987-10-05 1987-10-05 세라믹 기판의 소성방법 KR910009180B1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019870011074A KR910009180B1 (ko) 1987-10-05 1987-10-05 세라믹 기판의 소성방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019870011074A KR910009180B1 (ko) 1987-10-05 1987-10-05 세라믹 기판의 소성방법

Publications (2)

Publication Number Publication Date
KR890007409A true KR890007409A (ko) 1989-06-19
KR910009180B1 KR910009180B1 (ko) 1991-11-04

Family

ID=19264991

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019870011074A KR910009180B1 (ko) 1987-10-05 1987-10-05 세라믹 기판의 소성방법

Country Status (1)

Country Link
KR (1) KR910009180B1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113402281A (zh) * 2021-08-03 2021-09-17 合肥商德应用材料有限公司 发热体及其制备方法和应用

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113402281A (zh) * 2021-08-03 2021-09-17 合肥商德应用材料有限公司 发热体及其制备方法和应用

Also Published As

Publication number Publication date
KR910009180B1 (ko) 1991-11-04

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