KR880701467A - Electric control drive - Google Patents

Electric control drive

Info

Publication number
KR880701467A
KR880701467A KR1019870701255A KR870701255A KR880701467A KR 880701467 A KR880701467 A KR 880701467A KR 1019870701255 A KR1019870701255 A KR 1019870701255A KR 870701255 A KR870701255 A KR 870701255A KR 880701467 A KR880701467 A KR 880701467A
Authority
KR
South Korea
Prior art keywords
electric control
control drive
drive
electric
control
Prior art date
Application number
KR1019870701255A
Other languages
Korean (ko)
Inventor
안데르스 미하엘
하이덴 크리스토프
Original Assignee
에른스트 라이쯔 벳즐라 게엠베하
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 에른스트 라이쯔 벳즐라 게엠베하 filed Critical 에른스트 라이쯔 벳즐라 게엠베하
Publication of KR880701467A publication Critical patent/KR880701467A/en

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
    • H02N2/025—Inertial sliding motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/206—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using only longitudinal or thickness displacement, e.g. d33 or d31 type devices
KR1019870701255A 1986-05-02 1987-12-30 Electric control drive KR880701467A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3614996A DE3614996C1 (en) 1986-05-02 1986-05-02 Electrically controllable drive device
PCT/DE1987/000190 WO1987006769A1 (en) 1986-05-02 1987-04-29 Electrically controlled driving device

Publications (1)

Publication Number Publication Date
KR880701467A true KR880701467A (en) 1988-07-27

Family

ID=6300092

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019870701255A KR880701467A (en) 1986-05-02 1987-12-30 Electric control drive

Country Status (5)

Country Link
EP (1) EP0264403A1 (en)
JP (1) JPS63503191A (en)
KR (1) KR880701467A (en)
DE (1) DE3614996C1 (en)
WO (1) WO1987006769A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2619932B1 (en) * 1987-08-25 1991-08-30 Suisse Electronique Microtech DEVICE FOR FINE ADJUSTING A UNIT RELATIVE TO A REFERENCE SYSTEM AND USE OF THIS DEVICE
DE3812684A1 (en) * 1988-04-16 1989-11-02 Klaus Prof Dr Dransfeld Method for fast scanning of uneven surfaces with the scanning tunnel microscope
US5255417A (en) * 1991-07-29 1993-10-26 Herman Pearl Button Co., Inc. Decorative multi-part ornamentations and the fabrication thereof
KR20030048917A (en) * 2001-12-13 2003-06-25 엘지이노텍 주식회사 Film bulk acoustic resonator filter duplexer
DE102005023988B4 (en) * 2005-05-20 2007-03-01 Universität Hamburg Piezoelectric motor

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4087715A (en) * 1976-11-18 1978-05-02 Hughes Aircraft Company Piezoelectric electromechanical micropositioner
US4195243A (en) * 1978-11-06 1980-03-25 Sperry Corporation Piezoelectric wafer mover
DE3006973C2 (en) * 1980-02-25 1982-06-09 Siemens AG, 1000 Berlin und 8000 München Arrangement for executing a controllable linear movement
EP0071666B1 (en) * 1981-08-10 1985-02-06 International Business Machines Corporation Electric travelling support
DE3412014C1 (en) * 1984-03-31 1985-10-17 Deutsche Forschungs- und Versuchsanstalt für Luft- und Raumfahrt e.V., 5000 Köln Piezoceramic actuator for generating translation movements

Also Published As

Publication number Publication date
WO1987006769A1 (en) 1987-11-05
DE3614996C1 (en) 1987-07-30
EP0264403A1 (en) 1988-04-27
JPS63503191A (en) 1988-11-17

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application