KR880002096U - 회동식 진공 조형장치 - Google Patents

회동식 진공 조형장치

Info

Publication number
KR880002096U
KR880002096U KR2019860010518U KR860010518U KR880002096U KR 880002096 U KR880002096 U KR 880002096U KR 2019860010518 U KR2019860010518 U KR 2019860010518U KR 860010518 U KR860010518 U KR 860010518U KR 880002096 U KR880002096 U KR 880002096U
Authority
KR
South Korea
Prior art keywords
molding machine
vacuum molding
rotating vacuum
rotating
machine
Prior art date
Application number
KR2019860010518U
Other languages
English (en)
Other versions
KR910006825Y1 (ko
Inventor
정선영
Original Assignee
김용한
정선영
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김용한, 정선영 filed Critical 김용한
Priority to KR2019860010518U priority Critical patent/KR910006825Y1/ko
Publication of KR880002096U publication Critical patent/KR880002096U/ko
Application granted granted Critical
Publication of KR910006825Y1 publication Critical patent/KR910006825Y1/ko

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
KR2019860010518U 1986-07-19 1986-07-19 회동식 진공 조형장치 KR910006825Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019860010518U KR910006825Y1 (ko) 1986-07-19 1986-07-19 회동식 진공 조형장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019860010518U KR910006825Y1 (ko) 1986-07-19 1986-07-19 회동식 진공 조형장치

Publications (2)

Publication Number Publication Date
KR880002096U true KR880002096U (ko) 1988-04-07
KR910006825Y1 KR910006825Y1 (ko) 1991-09-12

Family

ID=19253917

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019860010518U KR910006825Y1 (ko) 1986-07-19 1986-07-19 회동식 진공 조형장치

Country Status (1)

Country Link
KR (1) KR910006825Y1 (ko)

Also Published As

Publication number Publication date
KR910006825Y1 (ko) 1991-09-12

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application
E902 Notification of reason for refusal
J2X1 Appeal (before the patent court)

Free format text: APPEAL AGAINST DECISION TO DECLINE REFUSAL

E701 Decision to grant or registration of patent right
NORF Unpaid initial registration fee