KR870010768A - Wafer Transfer Loading Device - Google Patents

Wafer Transfer Loading Device Download PDF

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Publication number
KR870010768A
KR870010768A KR1019860003323A KR860003323A KR870010768A KR 870010768 A KR870010768 A KR 870010768A KR 1019860003323 A KR1019860003323 A KR 1019860003323A KR 860003323 A KR860003323 A KR 860003323A KR 870010768 A KR870010768 A KR 870010768A
Authority
KR
South Korea
Prior art keywords
wafer
wafer transfer
loading device
slots
transfer loading
Prior art date
Application number
KR1019860003323A
Other languages
Korean (ko)
Other versions
KR890002135B1 (en
Inventor
김정덕
윤인철
Original Assignee
삼성 항공산업공업 주식회사
이동복
삼성정밀공업 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 삼성 항공산업공업 주식회사, 이동복, 삼성정밀공업 주식회사 filed Critical 삼성 항공산업공업 주식회사
Priority to KR1019860003323A priority Critical patent/KR890002135B1/en
Publication of KR870010768A publication Critical patent/KR870010768A/en
Application granted granted Critical
Publication of KR890002135B1 publication Critical patent/KR890002135B1/en

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/02—Feeding of components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

내용 없음No content

Description

웨이퍼 이송적재 장치Wafer Transfer Loading Device

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제1도는 본 발명의 전체 사시도1 is an overall perspective view of the present invention

제2도는 본 발명의 웨이퍼 선가의 제1실시예를 나타낸 사시도로서, 50스로트 선가의 사시도.2 is a perspective view showing a first embodiment of the wafer cost of the present invention, a perspective view of a 50-throw cost.

Claims (3)

웨이퍼 이송적재 장치에 있어,In the wafer transfer device, 웨이퍼 또는 수정보우트를 재치하여 승강, 이송시켜 주기 위한 보우트치구를 구비한 승강수단과, 보우 트치구에 의해 상승한 웨이퍼를 협지 고정시켜 주기 위한 웨이퍼선가 수단과, 테프론 케리어를 지지 고정하는 보우트가이드 수단과, 수정보우트가 정확한 소정에 위치로 위치시키기 위한 스톱퍼 수단을 구비함을 특징으로 하는 웨이퍼 이송적재 장치.Elevating means having a bolt fixture for placing and lifting and transporting a wafer or a waterboat; And a stopper means for positioning the water nut in the correct predetermined position. 제1항에 있어서,The method of claim 1, 웨이퍼 선가 수단은 25스로트의 웨이퍼 협지홈을 구비함을 특징으로 하는 웨이퍼 이송적재 장치.A wafer transfer device comprising a wafer slotting groove of 25 slots. 제1항에 있어서,The method of claim 1, 웨이퍼선가 수단은 25스로트의 웨이퍼 협지홈과 25스로트의 바이패스홈을 교호로 구비함을 특징으로 하는 웨이퍼 이송적재 장치.The wafer carrier means is provided with a wafer slotting groove of 25 slots and a bypass slot of 25 slots alternately provided. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019860003323A 1986-04-29 1986-04-29 Wapor transfer devices KR890002135B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019860003323A KR890002135B1 (en) 1986-04-29 1986-04-29 Wapor transfer devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019860003323A KR890002135B1 (en) 1986-04-29 1986-04-29 Wapor transfer devices

Publications (2)

Publication Number Publication Date
KR870010768A true KR870010768A (en) 1987-11-30
KR890002135B1 KR890002135B1 (en) 1989-06-20

Family

ID=19249686

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019860003323A KR890002135B1 (en) 1986-04-29 1986-04-29 Wapor transfer devices

Country Status (1)

Country Link
KR (1) KR890002135B1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100252206B1 (en) * 1997-01-04 2000-04-15 윤종용 Apparatus for transferring wafers in the facility for manufacturing semiconductor device

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101363568B1 (en) * 2013-10-10 2014-02-19 유니온테크 주식회사 Apparatus for alining wafers into a form of steps
KR101381296B1 (en) * 2013-11-21 2014-04-04 유니온테크 주식회사 Apparatus for alining wafers into a form of steps having cassette setting unit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100252206B1 (en) * 1997-01-04 2000-04-15 윤종용 Apparatus for transferring wafers in the facility for manufacturing semiconductor device

Also Published As

Publication number Publication date
KR890002135B1 (en) 1989-06-20

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