KR870010768A - Wafer Transfer Loading Device - Google Patents
Wafer Transfer Loading Device Download PDFInfo
- Publication number
- KR870010768A KR870010768A KR1019860003323A KR860003323A KR870010768A KR 870010768 A KR870010768 A KR 870010768A KR 1019860003323 A KR1019860003323 A KR 1019860003323A KR 860003323 A KR860003323 A KR 860003323A KR 870010768 A KR870010768 A KR 870010768A
- Authority
- KR
- South Korea
- Prior art keywords
- wafer
- wafer transfer
- loading device
- slots
- transfer loading
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/02—Feeding of components
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
내용 없음No content
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제1도는 본 발명의 전체 사시도1 is an overall perspective view of the present invention
제2도는 본 발명의 웨이퍼 선가의 제1실시예를 나타낸 사시도로서, 50스로트 선가의 사시도.2 is a perspective view showing a first embodiment of the wafer cost of the present invention, a perspective view of a 50-throw cost.
Claims (3)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019860003323A KR890002135B1 (en) | 1986-04-29 | 1986-04-29 | Wapor transfer devices |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019860003323A KR890002135B1 (en) | 1986-04-29 | 1986-04-29 | Wapor transfer devices |
Publications (2)
Publication Number | Publication Date |
---|---|
KR870010768A true KR870010768A (en) | 1987-11-30 |
KR890002135B1 KR890002135B1 (en) | 1989-06-20 |
Family
ID=19249686
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019860003323A KR890002135B1 (en) | 1986-04-29 | 1986-04-29 | Wapor transfer devices |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR890002135B1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100252206B1 (en) * | 1997-01-04 | 2000-04-15 | 윤종용 | Apparatus for transferring wafers in the facility for manufacturing semiconductor device |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101363568B1 (en) * | 2013-10-10 | 2014-02-19 | 유니온테크 주식회사 | Apparatus for alining wafers into a form of steps |
KR101381296B1 (en) * | 2013-11-21 | 2014-04-04 | 유니온테크 주식회사 | Apparatus for alining wafers into a form of steps having cassette setting unit |
-
1986
- 1986-04-29 KR KR1019860003323A patent/KR890002135B1/en active IP Right Grant
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100252206B1 (en) * | 1997-01-04 | 2000-04-15 | 윤종용 | Apparatus for transferring wafers in the facility for manufacturing semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
KR890002135B1 (en) | 1989-06-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
G160 | Decision to publish patent application | ||
E701 | Decision to grant or registration of patent right | ||
NORF | Unpaid initial registration fee |