KR870001171B1 - Plasma treatment apparatus - Google Patents

Abstract

A gate(2) is made on the right edge of the housing chamber (1). A cover, which has a plasma discharging hole(3), is attached on the gate. One pair of rails (5) is arranged under the chamber(1). A rotating portion(6) consists of a supporting frame(8) and a rotor(8), which rotates around the horizontal shaft multiple wheels(9) assembled under the supporting frame(7) rotate along the rail(5). The rotor(8) is composed of a shaft(10) and a psir of right and left rotating discs(11), which is fixed on the shaft(10). A gear(12) is fixed on the left edge of the shaft(10) and a sprocket wheel(13) on the right. A speed-adjustable notor(18) is used.

Description

Plasma processing equipment

1 is a longitudinal cross-sectional view of a plasma processing apparatus embodying the present invention and an apparatus for loading and removing material to be coated onto the apparatus.

2 is a perspective view of a plasma processing apparatus.

3 is a partially enlarged cross-sectional view of a plasma processing apparatus.

Figure 4 is a partially enlarged side view showing the mating opening configuration of the housing chamber and the rotational support.

5 is a partial longitudinal cross-sectional view of FIG.

6 is a longitudinal cross-sectional view of the truck showing the positioning and securing configuration of the truck relative to the housing chamber.

7 is a top view of the truck.

8 is a partially enlarged front view showing a locking configuration of a rotating mechanism on a truck and a rotation supporting portion of the truck.

9 is a partial side view.

10 is a partially enlarged perspective view of the suspension member.

11 is a partial sectional view showing a plasma processing apparatus as a second embodiment of the present invention.

12 is a perspective view of FIG.

13 is a front view of the plasma injection tube.

14 is a cross-sectional view taken along the line XIV-XIV of FIG.

15 is a cross-sectional view taken along the line XV-XV of FIG.

Fig. 16 is a plan view showing a connection system of the exhaust pipe.

17 is an enlarged perspective view of a portion of the support base.

18 shows a plasma flow when a plasma processing apparatus is used.

19 is a partial sectional view showing another example of the second embodiment.

20 is a cross-sectional view showing a plasma processing apparatus of a third embodiment of the present invention.

FIG. 21 is a perspective view of FIG. 20. FIG.

22 is a perspective view of a plasma processing apparatus of a fourth embodiment of the present invention.

23 is a front view of a plasma generating device having a discharge detector.

24 is a front view of the plasma generator with a heat sensor.

25 is a front view of a plasma generator having an ozone generator.

26 is a front view of the plasma processing apparatus of the fourth embodiment;

27 is a left side view of the fourth embodiment.

28 is a right side view of the fourth embodiment.

29 is a piping diagram of the fourth embodiment.

30 is a perspective view of the housing chamber of the fourth embodiment.

31 is an enlarged side view of the plasma generator attached to the housing chamber.

32 is a timetable of the plasma generator.

33 and 34 are enlarged views of basic portions showing the outflow condition of the liquid in the case where the uncoated surface of the material to be coated is coated with an index standard liquid used to determine the material to be coated after the plasma treatment.

35 and 36 are perspective and front views showing the material to be painted used for the determination.

FIG. 37 is a graph showing the correlation between surface tension and contact angle by index standard liquids of polypropylene. FIG.

* Explanation of symbols for the main parts of the drawings

1,101,131,201: housing chamber 2: entrance

3,102,106,204: Exhaust part 7: Support frame

6,116: rotary support 8,215: rotating body

9,39: wheel 11: rotating disc

12,22: gear 18: variable speed drive motor

23: suspension member 28,53,118: connecting rod

33,103,104: plasma injection pipe 34: matching member

38: truck 43: positioning plate

45: 47,58: fixed lock pool

49,56: movable lock pool 56: movable matched polyol

58: fixed matching column 59: rotating mechanism

61: operation handle 64: worm

65: worm gear 102a, 106a: flow rate control valve

105,137,218a Injection hole 136,221 Plasma generator

142,238 Discharge detector 148,230b Display unit

149,230a: alarm 230: alarm

W: Substance to be painted

The present invention relates to a plasma processing apparatus for performing a plasma treatment on the surface of a material to be painted, such as a shock absorber of an automobile made of synthetic resin.

As a plasma processing apparatus of this type, there is US Patent Application No. 680511. According to this patent, the rotary support portion is rotated at a constant speed by a motor or the like while the material to be painted is supported by a plurality of suspension members. This apparatus allows plasma treatment to be performed under the same conditions even if the size, shape, surface area and number of materials to be painted are varied. Therefore, for example, when a plasma treatment is performed by accommodating a plurality of materials to be painted with a relatively complicated shape in a tank, plasma is not uniformly supplied to the entire portion of the material to be coated, which causes problems. .

Accordingly, it is an object of the present invention to provide a plasma processing apparatus in which the plasma is uniformly supplied to the entire portion of the plurality of materials to be coated even when the size and number of the materials to be coated are varied.

It is still another object of the present invention to provide a plasma processing apparatus in which a plurality of materials to be painted can be easily loaded and removed from a plurality of hanging members on a rotational support portion.

Still another object of the present invention is to provide a plasma processing apparatus in which a plurality of materials to be painted can be stably supported by a suspension material.

Another object of the present invention is that the surface of the material to be painted is not shielded by the suspension member, and the plasma can be effectively supplied even to the end of the material to be painted so that many large sizes such as shock absorbers of automobiles equipped with plasma treatment in the chamber It is to provide a plasma processing apparatus that enables a uniform plasma treatment to be performed on the entire surface of a material to be painted even when performed on a material of.

It is still another object of the present invention to provide a plasma processing apparatus in which plasma gas is sufficiently supplied to the entire portion of the housing chamber so that the plasma processing can be effectively realized and the processing time for the material to be painted can be shortened.

Still another object of the present invention is to provide a plasma processing apparatus in which the generation of plasma by the plasma generating apparatus can be easily confirmed from the outside of the plasma generating apparatus.

Still other objects of the present invention will be apparent from the examples as described below or will be apparent from the claims, and advantages not mentioned herein will be readily apparent to those skilled in the art.

An embodiment of the present invention will be described in detail with reference to the drawings.

The housing chamber 1 of the plasma processing apparatus of the present embodiment has an entrance 2 at the right end as shown in FIG. 1, which has a cover 4 having an open and close plasma exhaust 3. Is attached. At the bottom of the housing chamber 1 a pair of rails 5 are arranged at regular intervals, which extend left and right over almost the entire length of the chamber 1.

The rotary support part 6 is movably supported on the rail 5 so as to be input and output with respect to the housing chamber 1. As shown in FIGS. 1 to 3, the rotation support part 6 is composed of a support frame 7 and a rotating body 8 rotatably supported about a horizontal axis thereon, and both sides of the support frame 7. At the bottom of the plurality of wheels 9 are rotatably provided to rotate along the rail 5. The rotating body 8 is composed of a central rotating shaft 10 and a pair of left and right rotating disks 11 fixed to regions near both ends thereof.

As shown in FIGS. 1 to 3, outside the support frame 7, the gear 12 is fixed to the left end of the rotary shaft 10, and the sprocket wheel 13 is the right end of the rotary shaft 10. Is fixed to. The left side plate of the support frame 7 rotatably supports the gear 15 with the sprocket wheel 14 and the shaft 16, and the chain 17 extends between the sprocket wheels 13 and 14. Outside the housing chamber 1 on the left side, a variable speed motor 18 is provided on the support plate 19, and the motor shaft 20 projects through the bearing cylinder 21 into the housing chamber 1. The gear 22 is fixed to the inner end of the motor shaft 20, which gear 22 on the support frame 7 as the rotary support base 6 moves relative to the housing chamber 1. Is engaged or separated.

The motor 18 is a conical variable speed motor in which the speed can be continuously changed, and has a driving means in which the speed can be changed. Since the rotational speed of the motor 18 is freely adjusted, the rotary body 8 of the rotary support 6 can be rotated at a speed according to the size and number of materials to be painted.

For example, in the case of this embodiment, the rotational speed of the rotor 8 may vary within the range of 6.5 to 20 rpm. In the case of a material W to be painted, such as a shock absorber of a vehicle, it is selected at a low speed of 6.5 to 20 rpm, and in the case of a material W of a relatively small size, it is selected at a high speed of 10 rpm or more. In addition, when the number of plasma treatments is small, a high rotational speed is selected, but when the number of plasma treatments is large, a low rotational speed is selected.

As shown in the first, second and ten degrees, each suspension member 23 is provided at its left and right ends with a pair of side plates 24, such as support members, supported by the shaft 25 at the top. Therefore, it can be rotated inside the rotary disk 11 of the rotation support (6). A window 26 is provided in the lower center of the side plate 24, which is provided with a net 27 through which plasma gas can pass. The connecting rod 28 made of a single bar material is connected between the lower edges of the pair of left and right plates 24. As shown in FIG. 10, the left and right sides of the connecting rod 28 are provided with support members 29a extending vertically from the connecting rod 28 and the side plates 24 from the rear ends of the supporting members 29a. There is provided a reinforcing frame 29 composed of a connecting member 29b extending to the edge of the lower end and a reinforcing member 29c extending inclined with respect to the connecting rod 28 from the rear end of the supporting member 29a.

On the support member 29a of the reinforcing member 29, a pair of front and rear edge supporting protruding segments 30 protrude, and near the left and right ends of the material W to be painted, the material to be painted, such as a shock absorber of the vehicle ( A supporting member 30a for supporting W) from the inside is provided in a bent state at the upper end of the supporting protrusion segment 30. Between the support protrusion segments 30, the center support protrusion segment 31 protrudes on the support member 29a of the reinforcing member 29, and is to be painted at the center between the left and right ends of the material W to be painted. A support member 31a for supporting the material W from the inside is provided bent at the top of the support protrusion segment 31. The height of the support member 31a is higher than the height of the support member 30a. The front end of the supporting member 31a is connected to the connecting rod 28.

As shown in FIGS. 3 and 4, a plurality of support metals 32 are disposed at substantially equiangular intervals (90 ° apart in this embodiment) on the inner circumferential surface of the housing chamber 1 in a manner opposite to the material to be painted. The plasma injection tube 33 having many injection holes (not shown) is supported by the support metal 32. A plasma gas such as oxygen is introduced into the housing chamber 1 through the injection hole of the plasma injection tube 33. The surface of the material W to be painted is thus subjected to plasma treatment.

As shown in FIGS. 4 and 5, the mating member 34 is rotatably supported between the rails 5 in the inlet and outlet 2 of the housing chamber 1, and the mating polyol 35 is mating member 34. Protruding from both ends of the), the restoring portion 36 is provided between both ends of the mating member (34). A pair of left and right matching recesses 37 corresponding to the matching port 35 of the matching member 34 are formed at the lower end of the support frame 7 of the rotary support 6, and the rotary support 6 Is moved along the rail 5 and drawn into the housing chamber 1, the mating fool 35 is mated with the mating recess 37, whereby the rotary support 6 can be restored to the housing position. Are matched and stored.

As shown in FIGS. 1, 6 and 7, a truck 38 carrying the rotary support 6 is provided oppositely in the entry and exit 2 of the housing chamber 1. A plurality of wheels 39 are rotatably provided at the bottom of the truck 38, and the transport handle 40 protrudes from the left end. A pair of front and rear rails 41 extending left and right are provided on both sides of the upper surface of the truck 38, which are connected to the rails 5 in the housing chamber 1, thus supporting the frame 7. The wheels 9 on both sides of are guided and supported when the rotational support part 6 is entered and exited with respect to the housing chamber 1.

As shown in FIGS. 1, 6 and 7, the assembly member 42 extends forward and backward and is supported on the left surface of the leg portion. The pair of positioning plates 43 are provided to face the lower surface of the center of the assembly member 42 at specific intervals. In addition, the mating member 44 extends forward and backward and is supported on the lower left side of the truck 38. The mating roller 45, which can be removably mated between the positioning plates 43, is supported by the support plate 46. The positioning plate 43 and the registration roller 45 constitute a positioning means. When the truck 38 is moved to the inlet and outlet 2 of the housing chamber 1, the mating roller 45 constitutes positioning means. When the truck 38 is moved to the inlet and outlet 2 of the housing chamber 1, the mating roller 45 enters between the positioning plates 43 and is mated therein. The truck 38 is thus in a specific position with respect to the housing chamber 1.

As shown in Figs. 6 and 7, a pair of front and rear fixed lock poles 47 are provided on the assembly member 42. As shown in Figs. The rotary shaft 48 is rotatably supported on the assembly member 44. A pair of front and rear movable lockpools 49 which are removably mated with the fixed lockpool 47 are fixed to both ends of the rotary shaft 48. The fixed lockpool 47 and the movable lockpool 49 constitute a lock means. When the truck 38 is disposed opposite the housing chamber 1, the movable lockpool 49 is mated with the fixed lockpool 47 by a spring 50, whereby the truck 38 is in the housing chamber. It is fixed with respect to (1). In addition, the restoring lever 52 is rotatably supported between the pair of operation assembly plates 51 protruding from the center of the right side of the truck 38, and the movable lock forall 49 is connected to the connecting rod 53. It is restored and rotated by the rotation operation of the recovery lever 52 through.

As shown in FIGS. 1, 8, and 9, the rotary shaft 54 is rotatably supported on the upper part of the restoring lever 52 through the mounting plate 51 for operation, and the restoring operation lever 55. ) Are provided on the front and the rear (right and left in FIG. 9), respectively. Before and after the assembly plate 51, the movable mating pot 56 is fixed to the rotary shaft 54, the rotary shaft 54 is rotatable counterclockwise in FIG. Driven. The pair of front and rear fixed mating poles 58 protrude from the right side of the support frame 7 of the rotary support 6 in such a manner as to form a mating means together with the movable mating poles 56. When the rotary support 6 is pulled on the truck 38, the fixed registration forum 58 is mated with the movable registration forum 56, whereby the rotary support 6 moves on the truck 38. Not located and preserved.

Rotating mechanism 59 for manually rotating the rotating body 8 for loading and removing the material W to be painted on the suspension member 23 is a rotating body of the rotating support portion disposed on the truck 38 ( 8) is provided on the upper part of the assembly plate 51 for operation in the manner of being connected.

That is, the operation shaft 60 is rotatably provided on the upper portion of the rotary shaft 54 through the assembly plate 51, and the operation handle 61 is provided at the front and rear ends of the operation shaft 60. The sprocket wheel 62 is fixed on the operation shaft 60 at the rear side of the assembly plate 51 and is rotated by the rotation of the operation handle 61. The dignity reduction mechanism 63 is disposed at the upper end between the assembly plates 61, and the worm 64 and the worm gear 65 engaged with each other are provided inside.

The sprocket wheel 66 is fixed to the outer end of the worm shaft of the worm 64, and the chain 67 extends between the sprocket wheel 66 and the sprocket wheel 62. The electric gear 68 is fixed to the outer end of the gear shaft of the worm gear 65. When the rotary support 6 is pulled on the truck 38, the electric gear 68 connects the rotary body 8 and the rotary mechanism 59 for operation, and the rotary shaft 10 of the rotary body 8 Is detachably mated with the gear 12 provided at the front end.

Therefore, in the plasma processing apparatus configured as described above, when a plurality of relatively small substances to be coated (W) are accommodated in the housing chamber 1 for plasma processing, the plasma gas injected from the plasma injection pipe 33 is By adjusting the rotational speed of the variable speed motor 18 and setting the rotational speed of the rotor 8 at a high speed of 20 rpm, it is effectively agitated in accordance with the high-speed rotation of the rotor 8, so that the plasma gas is processed in large numbers. Uniform plasma treatment may be performed by uniformly supplying the entire portion of the material W to be used. The lower surface of the material W to be painted disposed on the suspending member 23 is formed of a plurality of support protrusion segments 30, 31 provided on the reinforcing member 29 at both ends of the connecting rod 28. Engaging with the upper support portions 30a and 31a, the material W to be painted is thus stably supported on the suspension member 23 from below. Under such a state, since there is no shielding material on the surface of the material W to be painted, the plasma gas injected through the plasma injection pipe 33 is equally and effectively supplied to the material W, so that a uniform plasma treatment is provided. It may be performed uniformly on the surface of the material (W).

Next will be described the operation of loading or removing the material (W) to be painted for the suspension member 23 on the rotary support (6).

The material W to be painted can be loaded and removed in the following manner. When the cover 4 of the housing chamber 1 is opened as shown in FIG. 1, the truck 38 is provided opposite the entrance 2 of the housing chamber 1. Thus, as shown in FIGS. 6 and 7, the matching roller 45 of the positioning means is matched between the positioning plates 43 for positioning the truck 38 in a specific position with respect to the housing chamber 1. The movable lockpool 49 of the lock means engages with the fixed lock pole 47 which secures the truck 38 with respect to the housing chamber 1. In this state, the rail 5 of the truck 1 is connected with the rail 5 in the housing chamber 1.

Thereafter, the mating fool 35 of the mating member 34 shown in FIGS. 4 and 5 is separated from the mating recess 37 for restoring the mating between the housing chamber 1 and the rotary support part 6. When the rotation support part 6 is pulled outward from the doorway 2 of the housing chamber 1 under this state, the rotor part 6 moves the rails 5 and 41 as shown by the dashed line in FIG. Thus moving on the truck 38. Thus, the gear 15 provided on the left side of the support frame 7 of the rotary support 6 is separated from the gear 22 on the motor shaft 20 in the housing chamber 1, The gear 12 provided on the right side engages with the electric gear 68 in the truck 38, whereby the rotor 8 of the rotary support 6 is coupled to the rotary mechanism 59 on the truck 38. . In this case, the fixed matching fool 58 of the matching means shown in FIGS. 8 and 9 engages with the movable matching fool 56 and the support frame 7 of the rotary support 6 is on the truck 38. Matched to and preserved.

When the rotating body 8 of the rotation supporting part 6 is rotated to the desired angular position through the worm reduction mechanism 63 by the rotation of the operation handle 61 under this state, the rotating body 8 is a rotating body ( Irrespective of the variation in the weight balance of 8), it is fixedly stored at a desired angular position based on the matching between the worm 64 and the worm gear 65 of the worm reduction mechanism 63. Thus, the material W to be painted can be easily ashed and removed with respect to the plurality of suspension members 23 in a short period of time while the rotating body 8 is gradually rotated for a specific angle with the operation handle 61.

In this embodiment, the actuating lever 55 for restoring the actuating handle 61 and the mating means of the rotating mechanism 59 is provided at the front and the back of the building plate 51 on the truck 38, so that the suspension member ( The material to be painted (W) 23 can be loaded and removed extremely easily in the desired position on the front and rear of the truck 38.

The first preferred embodiment of the present invention is not limited to the above configuration, and, for example, a brake motor having a brake may be used as a rotating mechanism for rotating the rotary support portion 6, or a driving means whose speed can be changed. It may be composed of a motor that rotates at a constant speed and a continuous variable gear that transmits the rotation of the motor to the rotation support base through the speed change, or a support member 24 in the form of a plate, rod, net or lattice may be used. have.

A second preferred embodiment of the present invention will now be described with reference to FIGS.

The housing chamber 101, which may seal the plasma processing apparatus, is formed like a hollow cylinder, and its front wall in FIG. 11 is provided with a door (not shown) for opening or closing the housing chamber 101. As shown in FIG. In FIG. 11, the first exhaust 102, which is used only to reduce the internal pressure of the housing chamber 101, is provided at the right center of the wall. The first exhaust 102 is assembled with an exhaust pipe 102b having a valve 102a for flow deceleration control.

The lower portion of the exhaust 102 is provided with a stainless plasma injection tube 103 for plasma gas injection, such as oxygen.

As shown in FIG. 13, the plasma injection pipe 103 is formed about 10% longer at both ends than the total length L of the material W to be painted. That is, the total length l is expressed by the following equation.

l = L + 2 × 0.1L

The plasma supply unit of claim 13 to 15, wherein the plasma injection unit 107 formed almost in the center of the injection tube 103 is connected to the injection tube 104, and an end thereof is disposed at an outer side of the housing chamber 102. Many injection holes 105 whose placement interval is gradually reduced toward the end of the injection pipe 103 and whose inner diameter gradually increases are outside the injection pipe 103 on both sides of the plasma injection portion 107. The injection hole 105 is measured at the front side with respect to the vertical plane S 1 and measured at the rear side with respect to the hole 105a in the direction inclined by the measurement angle θ ₁ (30 ° in this embodiment) and the vertical plane. A hole 105b in a direction inclined by an angle θ ₂ (30 ° in this embodiment). The injection hole 105a inclined forward and the injection hole 105b inclined backward are alternately arranged.

The plurality of injection holes 105 on the exhaust portion 102 side, that is, the right side, from the introduction pipe 104 is set to be smaller than the number of the injection holes on the left side by about 10%.

The second exhaust portion 106 is formed to have a smaller diameter than the first exhaust portion 102 on the wall of the housing chamber 101 facing the injection pipe 103. The exhaust portion 106 has a valve for controlling the flow rate. An exhaust pipe 106b having a 106a is provided, and an exhaust pipe 102b is connected to one end of the exhaust pipe 106b. That is, as shown in FIG. 16, the exhaust pipe 106b is a side pipe of the exhaust pipe 102b.

Next, the positional relationship between the plasma injection pipe 103 and the second exhaust portion 106 will be described. In FIG. 11, the plasma injection tube 102 is provided at a position rotated by 30 ° counterclockwise from the vertical plane S ₁ with respect to the bottom of the housing chamber 101 and the second exhaust portion 106 is the same vertical. It is formed at a position rotated by 30 ° counterclockwise from the plane S ₁ .

The pedestal 110 is provided at the bottom of the housing chamber 101 at the lower side of the infusion tube 103 and the rotating device 111 described below is provided at the top of the pedestal 11. The rotating device 111 is supported by the frame 112 in the form of a square frame having a movable mechanism (not shown) as shown in FIG. 12 and a pair of lamps 113 provided on both sides of the frame 112. It mainly consists of a rotating shaft 114 rotatably supported on the top of the pillar 113 and a pair of support disks 115a and 115b fixed in the space of the rotating shaft 114. A total of six support bases 116 supporting the material W to be painted are arranged at appropriate angular intervals between the inner surfaces of the support discs 115a and 115b.

As shown in FIG. 17, each support base portion 116 includes a pair of support pieces 117 and an extension rod 118a extending between the support pieces 117 formed by bending a metal plate, and each extension rod ( It consists of a connecting rod 118b provided on the lower surface of the support piece 117 to connect both ends of the 118a, and each support piece 117 is supported by the metal 118 to the support disks 115a and 115b. Is rotatably supported. Therefore, each support base 116 is horizontally preserved while the rotary shaft 114 and the support disks 115a and 115b are rotated and are not rotated. The net 120 through which the plasma gas passes is extended to the cutout at the center of the support piece 117.

In FIG. 11, the sprocket wheel 121 is engaged with the front end of the rotary shaft 114, and the sprocket wheel 122 and the electric gear 123 rotating about the axis are provided on the frame 112. The chain 124 extends between the sprocket wheel 121 and 122, the electric gear 123 is engaged with the drive gear 125 is rotatably driven by a drive motor (not shown).

When the drive gear 125 rotates, the support disks 115a and 115b together with the rotary shaft 114 through the electric gear 123, the sprocket wheel 122, the chain 124 and the sprocket wheel 121. Is rotated.

Next, the operation of this apparatus will be explained. First, the door of the housing chamber 101 is opened, and the rotating device 111 is slid out of the housing chamber 101 together with the frame 112, and the substance W to be subjected to the plasma treatment is placed on the support base 116. Is located. (Hereinafter omitted)

The rotating device 111 then slides back into the housing chamber 101 and the door is closed. At this time, the flow rate control valve 102a is opened and the internal pressure of the housing chamber 101 is reduced to a specific pressure (about 0.5 to 0.6 Torr) (reduction device not shown). When the pressure reaches a specific value, the valve 102a is closed and the drive motor of the rotating device 111 operates. Thus, the rotary shaft 114 and the support disk 115 is rotated through the drive gear 125, the electric gear 123, the sprocket wheel 122, the chain 124 and the sprocket wheel 121. As long as the support base 116 rotates around the top with respect to the support disc 115 with the material W to be painted, the material W is kept horizontal even if the support disc 115 is rotating.

Simultaneously with the driving of the rotary device 111, plasma gas such as oxygen is supplied to the injection pipe 103 through the introduction pipe 104. Thus, the plasma gas is injected in such a manner as to enclose a plurality of materials W, the plasma gas is spread over the entire portion in the housing chamber 101, and the plurality of materials W rotates while rotating itself in the housing chamber. The surface of the two substances (W) is formed in the injection tube 103 is longer than the entire length of the substance (W) at both ends by about 10%, the injection hole 105 is about 30 degrees to the vertical plane S ₁ front side Or it can not be operated uniformly because it is formed to be inclined to the rear side.

According to the experiment, it is preferable to select angles θ ₁ and θ ₂ from 25 ° to 35 °. If this angle is larger or smaller than these values, the plasma treatment is insufficient, and the contact angle (deterioration value of the surface tension) of the material W to be painted is increased.

In this embodiment, the plurality of injection holes 105 on the exhaust portion 102 side, that is, on the right side of the introduction pipe 104 is set by 15% less than the number of the injection holes 105 on the left side. The plasma gas flow toward 102 is not biased, the gas flows uniformly, and the plasma treatment becomes more uniform with the material W to be painted.

In addition, the flow rate control valve 106a is adjusted according to the amount of the injected plasma gas, so that the exhaust velocity in the second exhaust portion 106 is set lower than the diffusion velocity of the supply gas, Internal pressure is kept constant.

In this case, since the diameter of the second exhaust portion 106 is smaller than the diameter of the first exhaust portion 102, the exhaust velocity is lower than the exhaust velocity when only the first exhaust portion 102 is opened. The exhaust velocity can be fine tuned with the control valve 106a so that the plasma gas is uniformly diffused in the housing chamber 101.

Since the exhaust 106 is provided at a position opposite the plasma injection tube by about 180 °, the plasma gas diffusion rate such as the shower from the injection hole 105 can be shown by the dotted line in FIG. This figure shows that the plasma gas is sufficiently diffused in the entire portion of the housing chamber 101 and discharged after being connected to the second exhaust portion 106. Thus, the plasma gas is effectively injected into the surface of the material W to be painted and effectively activates the entire part of the surface.

The diffusion condition of the plasma gas in the housing chamber 101 can be set to a condition most suitable for the shape and number of the material W to be painted by adjusting the velocity of the exhaust gas, whereby the plasma treatment efficiency is remarkable. Can be improved, and the processing time can be shortened.

Since the exhaust pipe 106b assembled to the second exhaust unit 106 is used as the side pipe of the first exhaust pipe 102b, only one pressure reducing device is required, and the plasma processing device can be miniaturized.

By way of example, the invention of the second embodiment can be implemented as will be described later.

1) Exhaust portion 106 is not limited to the position opposite to injection tube 103, but may be provided at a position where a plasma formed like a shower is concentrated after being efficiently diffused in housing chamber 101. . By way of example, it may be provided at a position within 45 ° in the up and down directions from a position opposite to the infusion tube 103.

2) Plasma gas injected from the injection pipe 103 is absorbed, and it is absorbed and provides the exhaust pipe 126 having the same structure as the injection pipe 103 to the exhaust portion 106 as shown in FIG. By this, it is exhausted more uniformly from one hole.

3) In the case of plasma gas exhaust, the gas is exhausted by adjusting the flow rate control valve 102a of the first exhaust portion 102 not only from the second exhaust portion 106 but also from the first and second exhaust portions. Can be.

4) The second exhaust 106 may be used with the first exhaust 102 by reducing the pressure in the housing chamber 101.

Next, differences between the third embodiment and the second embodiment of the present invention will be described with reference to FIGS. 20 and 21. FIG.

An exhaust 102 that reduces the internal pressure of the housing chamber 101 is formed in the center of the right wall of the sealed housing chamber 101 of the plasma processing apparatus and has a valve 102a. The lower inner surface of the exhaust 102 The first stainless plasma injection pipe 103a for plasma injection, such as oxygen, is provided extending in the axial center of the housing chamber 101. The second injection pipe 103b is also provided in the same manner at a position rotated by 90 ° counterclockwise from the position of the first injection pipe 103a to the center of the housing chamber 1, and the third injection pipe 103c. ) Are provided in the same way at positions rotated further by 90 ° counterclockwise.

The three injection tubes 103a, 103b and 103c are formed in the same shape as the plasma injection tube 103 of the second embodiment of the present invention.

The positional relationship between the three injection pipes 103a, 103b, and 103c is as follows. That is, the injection pipes 103a, 103b, and 103c are provided substantially parallel to the axial center of the housing chamber 101, and are provided on the inner surface of the housing chamber 101. The injection pipes 103a, ( A plasma introduction portion (not shown) formed almost at the center of 103b) and 103c is connected to the introduction tube 104, and an end thereof is shown in a plasma supply device (not shown) outside of the housing chamber 101.

Effects and advantages will be described later. In the case of the second embodiment, the rotary device 111 is driven. At the same time, when plasma gas such as oxygen is supplied to the injection pipes 103a, 103b and 103c through the introduction pipe 104, the plasma gas is uniformly injected from the injection hole 105. The valve 102a of 102 slightly decreases the internal pressure of the housing chamber 101 when it is slightly opened, thereby preventing an increase in the internal pressure of the housing chamber 101 to be generated by the supply of plasma gas and maintaining it at a specific value.

In this case, since the plasma gas is injected simultaneously from the injection holes 105 of the injection pipes 103a, 103b and 103c, the plasma gas is injected only from the single injection pipe 103a as compared with the case of the housing chamber. The entire portion of 101 can be uniformly diffused within a short period of time.

The injection tubes 103a, 103b and 103c are provided on the inner wall of the housing chamber 101 in parallel with each other on the same circumference so that the plasma gas is a substance W to be painted while it rotates around the rotation shaft 114. Three times), the efficiency of the plasma treatment is improved, and the treatment time can be shortened to about 1/3 to 1/2.

The present invention of the third embodiment can also be implemented as follows.

1) Another injection pipe is provided at a position rotated counterclockwise by 90 ° from the injection pipe 103c.

2) The lengths of the injection tubes 103a, 130b and 103c are longer than the length of the material W which will not be painted by about 10% at both ends.

3) The shape and arrangement of the injection hole 105 is not limited to this embodiment. By way of example, the cross sectional view of the injection hole 105 may be formed in a circular shape, and the specific angles θ ₁ and θ ₂ in this arrangement may be freely set within a range of 0 ° to 60 °.

Next, a fourth embodiment of the present invention will be described with reference to FIGS. 22 and 23. FIG.

As shown in FIG. 22, a stainless plasma injection tube 134 for injecting a plasma gas such as oxygen is accommodated on the inclined lower side in the housing chamber 131. The introduction tube 135 is connected to the center of the plasma introduction tube 135, and the other end of the same injection tube 135 is connected to the plasma generator 136 outside the housing chamber 131. Many injection holes 137 are formed in the outer circumference of the injection tube 134.

As shown in FIG. 23, an introduction tube 135 protruding outside the housing chamber 131 is connected to a joint 138 having a core composed of a glass tube, which is connected to the plasma generator (138) through a joint 138. 136 is connected to the end.

The same apparatus 136 is composed of a plasma generating tube 139, a plasma generating furnace 140, a waveguide 141, a discharge detector 142, a tester coil 143 and a flow connector 144, the holder ( 145 is supported by the housing chamber 131.

The elongated plasma generating tube 139 composed of a quartz tube connected to the other end of the joint 138 is supplied with oxygen gas through the flow connector 144 described below. This generating tube 139 has a cooling portion 146 at a portion thereof. The cylindrical plasma generating furnace 140 has a cooling unit 147, is provided in a manner surrounding the outer circumference of the plasma generating tube 139, and cools the heat generated by the plasma discharge. The waveguide 141 is assembled at an angle of 90 ° with respect to the axial direction at almost the center of the plasma generator 140. The high frequency signal supplied through the waveguide 141 excites oxygen atoms in the plasma generation tube 139 of the plasma generation path 140 to realize plasma discharge.

The discharge detector 142 is assembled in such a manner that the discharge detector 142 is not affected by external light on the outer side of the plasma generating chamber 140 and the outer side of the plasma generating tube 139. In this embodiment, a cardium cell (hereinafter referred to as Cds) that senses light is used. When the discharge detector 142 receives the plasma discharge light, the resistance value changes according to the received light amount, and outputs an electric signal to the display unit described later.

The display unit 148 includes a detection circuit (not shown) for detecting plasma discharge and is connected to the alarm 149 and the alarm lamp 150.

The discharge is triggered by generating a spark in the tester coil 143 attached to the outer circumference of the slender tube at the rear of the plasma generating tube 139, whereby the plasma is easily generated in the plasma generating tube 139. Can be.

In the above configuration, the generation of the plasma discharge at the start of the operation of the plasma generator 136 will be described later.

First, oxygen for plasma generation is supplied to the plasma generation tube 139 through the flow connector 144.

Next, the tester coil 143 generates a spark by applying a voltage, and a high frequency signal is also applied to the waveguide 141. Thus, plasma is generated in the plasma generating tube 139. The discharge detector 142 provided inside the plasma generator 140 detects the generated plasma light. The resistance value changes in accordance with the amount of light generated, and an electrical signal is generated for the detection circuit.

After the measurement of the electrical signal is sent from the discharge detector 142 for a certain period of time, if the display unit 148 determines that no plasma discharge has occurred, it is an alarm 149 and a warning lamp 150 that warn the operator. Is operated, and the supply of voltage to the test coil 143 is stopped.

Therefore, it is not necessary to confirm the occurrence of plasma discharge after operating the plasma generator 136.

In the fourth embodiment, Cds is used as the discharge detector 142 for detecting light, but other elements such as a phototransistor, a photodiode or a silicon blue cell (SBS) may be used as the photodetector.

When the plasma is discharged, not only light but also heat and ozone are generated. Therefore, it is also possible to detect the plasma discharge by detecting the elements as described below.

1) A heat sensor 152, such as a thermocouple or a thermostat, may be attached to the plasma generating tube 139 as shown in FIG.

2) As the ozone detector 153, a ceramic semiconductor may be used as an example, which is attached to the inside of the joint 138 as shown in FIG. 25, and placed in contact with the generated ozone.

Next, a fifth embodiment of the present invention will be described with reference to FIGS. 26 to 32 degrees.

The hemispherically sealed housing chamber 201 of the plasma processing apparatus is formed like a hollow cylinder cylinder. A safety valve 203 for preventing an abnormal rise in pressure in the housing chamber 201 is provided on the upper left side of the outer circumference of the housing chamber 201.

The plasma exhaust portion 204 connected in the housing chamber 201 is provided on the upper right side of the chamber 201 and is connected to the main valve 206 through the flange 205 of the plasma exhaust portion 204. Is connected to a mechanical booster 208 that vacuums the housing chamber 201 through an exhaust air conduit 207 having a flange. The mechanical booster 208 is also connected to the rotary pump 209 through which the housing chamber 201 is evacuated via the exhaust pipe 207.

As shown in FIGS. 30 and 31, the pressure sensor 210 protrudes into the housing chamber 201 from the right side of the outside. The pressure sensor 210 is provided outside the housing chamber 201 and connected to a mechanical booster 208, a rotary pump 209 and a control device A for controlling the high frequency oscillator, the Tesla coil and the electromagnetic valve. .

A pair of parallel rails 213 are provided at the bottom of the housing chamber 201, and the rotation support portion 214 is set to be movable on the same rail 213. A rotating body 215 that suspends the material W to be painted made of synthetic resin and a transmission device 216 that transmits rotation to the rotating body 215 are loaded on the rotating support 214. The delivery device 216 is removably engaged with the gear 217a on the drive shaft protruding into the housing chamber 201 from the drive motor 217 mounted on the outside of the housing chamber 201.

As shown in FIG. 31, there are many injection holes 218a, and a stainless plasma injection column 218 for injecting plasma gas is fixed to the lower right side of the housing chamber 201. An introduction tube 219 is connected, and the introduction tube 219 is connected to the plasma generator 221 through the joint 220 from the housing chamber 201.

The plasma generator 221 is configured as described below. The joint 220 is connected to the plasma generating tube 222. The plasma generating tube 222 is made of a quartz tube having a cooling portion 223 in a portion thereof, and the rear portion is formed as a thin tube having a reduced diameter. A test coil 224 that triggers the generation of a plasma is provided parallel to the thin tube. The rear end of the thin tube is connected with a hole 225 for supplying a raw material. Further, as shown in FIGS. 26 and 29, the hose 225 is connected to the electromagnetic valve 226 and is connected to the source gas pump 228 through the contact regulator 227.

The electromagnetic valve 226 is regulated by the degree of vacuum in the housing chamber 201, ie the pressure sensor 210 and the regulator A.

The contact regulator 227 is provided with a gauge 227a indicating the pressure in the pump 228 and a gauge 227b indicating the hydraulic pressure at the time of exhaust of the source gas.

This regulator 227 has a pressure switch 229 which operates when the pressure in the pump 228 is lower than the measured pressure. When the switch 229 is operated, the adjusting device A informs the operator of the shortage of raw material gas through the display panel 230 and the alarm 230 provided as the alarm device 30.

In this embodiment, oxygen is used as source gas.

As shown in FIG. 31, the outer cylindrical member 232 is loaded around the plasma generating tube 222 through a space 213 having an open lower portion. A cooling unit (not shown) is provided inside the outer cylindrical member 232 and is connected to the cooling unit 223. This cooling part is connected to the hose 234 which supplies cooling water.

The other end of the hose 234 is connected to the coolant supply pipe 237 provided in the working room through the leak detector 236 through which the electromagnetic valve 235 detects the flow of the coolant. When the flow of coolant is no longer detected, the leak detector 236 closes the electromagnetic valve 235.

The cooling water may be collected in a water tank (not shown) using the recovery hose 223a provided to the cooling unit 223 of the plasma generating tube 222 after being used to cool the cooling device.

The discharge detector 228 for detecting the occurrence of the discharge is provided inside the outer cylindrical member 232. When the discharge detector 238 can no longer detect the plasma discharge, the adjusting device A notifies the operator that the plasma discharge is not generated by the alarm device 230 and stops the generation of the plasma processing device.

The waveguide 239 is attached at right angles to the axial direction at about the center of the outer cylindrical member 232, and a hose 240 for supplying cooling air is mounted on the lower side. The other end of the hose 240 is coupled to the cooling air supply line 243 through a detector 242 through which an electromagnetic valve 241 detects an interruption of the cooling air flow. The detector 242 closes the electromagnetic valve 241 when it detects no air flows.

The other end of the waveguide 239 is coupled to the high frequency oscillator 244, which supplies a high frequency signal to the plasma generating tube 222. When the high frequency oscillator 244 starts its operation, the Tesla coil 224 synchronously forms a strike and triggers the generation of plasma at a high frequency.

The regulating device A is provided with a timer (not shown) for setting the plasma processing time, and the main valve 206, the mechanical booster 208, the rotary pump 209, the driving motor 217 through the cable B. , The tester coil 224, the contact regulator 227, the alarm 230, and the electromagnetic valves 226, 235, and 241.

This control device A operates the devices with the pressure sensor 210 used as the center device.

First, the plasma processing time is set in consideration of the material to be processed by a timer (not shown) of the adjusting device A, and the power switch is turned on.

Thus, as shown in FIG. 32, the rotary pump 209 operates, and the main valve 206 opens after a few seconds. The housing chamber 201 gradually decreases the internal pressure and operates the mechanical booster 208 when the degree of vacuum reaches P ₁ . When the housing chamber 201 further decreases the internal pressure and the degree of vacuum reaches P ₂ , the driving motor 217 and the rotating body 215 start to rotate, and the electromagnetic valve 226 opens, thereby the source gas. Is supplied to the plasma generating tube 222. When the vacuum degree of the housing chamber 201 reaches P ₃ , the high frequency oscillator 244, the tester coil 224 and the discharge detector 238 operate almost simultaneously and the electromagnetic valves 235 and 241 are opened. Allow cooling air to flow. Thus, the plasma discharge is generated in the plasma generating tube 222, the source gas plasma may be generated.

Thus, the generated plasma is injected into the material to be painted from the injection hole 218a of the injection pipe 218 during the preset period of the timer.

After a certain period of time, the main valve 206, the mechanical booster 208, the rotating body 215, the operating motor 217, the electromagnetic valve 226 and the high frequency oscillator 244 are a rotary pump 209 and a safety valve (203). ) Is stopped except that is opened.

After this, the electromagnetic valves 235 and 241 are closed. After a certain time, the safety valve 203 is closed to complete the plasma treatment.

If the pressure in the source gas pump 228 is lowered for some reason (for example, the consumption of source gas) during the plasma treatment even when the pressure in the source gas pump 228 has not reached the specific processing time, the pressure switch 229 in the contact controller 227 It works. Thus, the adjusting device A notifies the operator of the shortage of the raw material gas by the alarm 230a and the display panel 230b. If the degree of vacuum is further lowered, the electromagnetic valve 226 is closed.

If the supply of cooling water or cooling air is interrupted due to a leak or compressor failure, the leak detector 236 or 242 closes the electromagnetic valves 235 and 241.

When one of the above-mentioned electromagnetic valves 226, 235, and 241 is closed, the adjusting device A receives a signal from the closed electromagnetic valve, and operates the alarm 230a and the display panel 230b. The operator is informed that the electromagnetic valve is closed, and the plasma processing apparatus is stopped.

A method of determining whether the material W to be coated is properly or not subjected to plasma processing by the plasma processing apparatus will be described with reference to FIGS. 33 to 36.

35 and 36 degrees are front enlarged perspective views of the shock absorber of the automobile prepared as the material W to be painted. The surface of this material W is subjected to plasma treatment. Material W is assigned to surface 161 to be painted white and surface 161 to be free of any paint. These surfaces 161 and 162 are subjected to plasma treatment.

The plurality of unpainted surfaces 162 are covered with a wet count standard liquid 164, and the plasma treatment conditions may be determined by observing the conditions of the effluent liquid on the unpainted surfaces 162.

Next, a method of supplying the wet coefficient standard liquid 164 will be described.

The wet coefficient standard liquid 164 may be obtained by mixing ethylene glycol monoethyl ether and homoamide in a specific ratio. As an example, a standard liquid 164 manufactured by Wako Poor Chemical Company, Limited is used in this embodiment.

In this method, the cotton rod is immersed in the wet coefficient standard liquid 164 and the surface 162 to be painted is quickly covered with such liquid. In this case, it is preferable that the surface 162 not to be painted is selected from various parts of the material W to detect the activation conditions of the entire part of the material W, and the desired covering area is preferably about 6 cm ² . .

The following describes the method of determination. That is, the wet coefficient standard liquid 164 is applied to the surface. It is determined whether the outflow of liquid after 2 seconds has occurred at the surface 162 which will not be painted for 2 seconds. In the case where the liquid outflow situation is not generated as shown in FIG. 33, it is determined that the plasma processing is appropriately performed. When the outflow situation of the liquid occurs as shown in FIG. 34, it is determined how much the plasma treatment has been performed by repeatedly supplying the wet count standard liquid 164 at different mixing ratios and observing the surface. It is considered to be a standard liquid having a surface tension of 52 dynes / cm ² or more.

The linear characteristic 165 shown in FIG. 17 shows the correlation between the contact angle (with water) and the surface tension (by water) by the polypropylene resin of the polypropylene resin forming the material to be coated (W) of the present invention. will be. It can be seen from this figure that the effect in plasma treatment can be seen when the surface has a surface tension of 52 dynes / cm ² or more. As an example, the untreated polypropylene resin (CJ 944) has a surface tension of 31 dyne / cm ² at a temperature of 20 ° C. and a humidity of 45%.

That is, suitability of the plasma treatment is determined by observing the outflow state of the liquid two seconds after the supply of the wet coefficient standard liquid 164 having a surface tension of 52 dynes / cm ² or more.

The determination method will be described in more detail. Surface 162 that will not be painted is freely selected at ten points. When the outflow state of the liquid does not occur every ten points, it is determined that the plasma has been performed, but if this condition does not occur at any one point, the plasma treatment is determined to be insufficient and the material W is sent back for processing. Lose. Table 1 shows the liquid composition of a standard liquid having a surface tension of 52 dynes / cm ² .

TABLE 1

That is, as described above, the activation state of the entire surface of the material W to be painted can be determined, which can be guided by the coating properties by observing the outflow state of the liquid on the surface 162 to be painted. Therefore, this may be used as a criterion for determining the painting.

As described above, since the activity of the surface of the substance W can be searched in detail for the substance W to be coated by the above-described discrimination, good control of each product can be realized, and the precise activity has a cotton rod. It can be visually observed through simple processing such as the supply of standard liquids. Therefore, the treatment efficiency can be described above, and the untreated material can be prevented from being sent in the next coating treatment.

The buffer to be described as the material W to be coated in the above-described determination method may be replaced by a non-polar synthetic resin product which requires painting such as polypropylene, for example, fender, side step, spoiler and the like.

The foregoing and other variations in form and detail are possible without departing from the spirit and scope of the invention, and thus the invention is not limited to the specific embodiments thereof.

Claims (39)

A housing chamber containing a material to be painted made of synthetic resin, a rotation support portion provided in the housing chamber to rotate the material to be painted, and a plurality of suspension members provided on the rotation support portion to support the material to be painted and the housing chamber 10. A plasma processing apparatus comprising at least one plasma injection tube provided therein to perform plasma processing on a surface of a material to be painted by injecting a plasma gas into the housing chamber. A plasma processing apparatus according to claim 1, wherein variable speed drive means are provided for rotating the rotational support portion at a speed in accordance with the shape and number of the materials. A rotating support portion can be inserted and withdrawn relative to the housing chamber, wherein the rotation support portion is connected to the drive means via a pair of gears, wherein the pair of gears are in a state where they are installed in the housing chamber. Plasma processing apparatus which may be matched or separated relative to one another under one another. The plasma processing apparatus according to claim 3, wherein the driving means is a variable speed motor. 2. A truck according to claim 1, wherein the rotary support can be inserted and withdrawn relative to the housing chamber, wherein the rotary support is positioned on the surface of the truck and the truck for transporting the rotary support provided against the entrance and exit of the housing chamber. And a rotation mechanism coupled to the rotation support portion in such a state that the rotation support portion rotates in the case of loading and unloading the material on the suspension member. A plasma processing apparatus according to claim 5, wherein the rotating mechanisms comprise worms and worm gears which mesh with each other, and operation handles for rotating the worms. 6. The plasma processing apparatus of claim 5 wherein the truck is positioned opposite the entrance and exit of the housing chamber by positioning means provided between the truck and the housing chamber. 8. The plasma processing apparatus of claim 7, wherein the positioning means comprises a pair of positioning plates attached to the housing chamber and matching rollers that can be matched and separated between these positioning plates. 6. The plasma processing apparatus of claim 5, wherein the truck is lockably reset against the housing chamber by locking means provided between the truck and the housing chamber. 10. The plasma processing apparatus of claim 9, wherein the lock means comprises a pair of fixed lockpools provided in the housing chamber and movable lockpools attached to the truck and matched with and separated from the fixed lockpools. 6. The rotary support unit according to claim 5, wherein the rotary support unit guides the pair of support frames having a plurality of wheels on both lower sides thereof, the rotating body supported by the support frame, the wheels on the housing chamber, and the truck to be coupled thereto. Plasma processing apparatus consisting of a rail to be. 6. The plasma processing apparatus of claim 5, wherein the rotation support portion is connected to the rotating mechanism through a pair of gears that are mated and separated from each other while being positioned on the truck. 6. The plasma processing apparatus of claim 5, wherein the rotation support portion is detachably matched with a matching means provided between the rotation support portion and the truck while being positioned on the truck. The plasma processing apparatus according to claim 13, wherein the matching means comprises a fixed matching fool attached to the rotating support part and a movable matching fool attached to a truck to be matched or separated from the fixed matching fool. The material of claim 1, wherein the suspension member is supported by a pair of opposing support members rotatably supported by a rotatable support portion at an upper portion thereof and a connecting rod extending from a lower end of the support members. A plasma processing apparatus comprising a plurality of support protrusion pieces protruding from the connecting film object. [16] The rotating support part of claim 15, wherein the rotation support part is composed of a support frame and a support member rotatably supported by the support frame and a suspension member rotatably supported between the rotation disks of the rotating body and the rotation disks of the rotating body. Plasma processing apparatus. A housing chamber containing a material to be painted made of synthetic resin and at least one plasma inlet tube and plasma pressure injecting plasma gas to effect plasma pressure on the surface of the material to be painted to reduce internal pressure in the housing chamber. Plasma processing apparatus comprising a first exhaust. 18. The plasma processing apparatus according to claim 17, wherein the second exhaust portion is provided at a position opposite to the plasma injection pipe in the housing chamber to exhaust and adjust the supply gas during the plasma irradiation. 19. The plasma processing apparatus of claim 18, wherein the second exhaust portion has a diameter for balancing the supply gas amount and the exhaust velocity. 19. The plasma processing apparatus of claim 18, wherein the second exhaust portion has a side pipe of an exhaust pipe connected to the first exhaust part, and the side pipe is provided with a gas flow rate control valve. The plasma processing apparatus of claim 20, wherein the exhaust pipe has a flow rate control valve. 22. The plasma processing apparatus of claim 21, wherein the second exhaust portion is formed at a position separated by 180 degrees from the plasma injection tube. 18. The plasma processing apparatus of claim 17, wherein the plasma injection tube is formed longer than the length of the material to be painted, and many injection holes are formed on the outer circumference of the injection tube. 24. A plasma processing apparatus according to claim 23, wherein many injection holes are located at both sides of the center of the plasma injection pipe in the longitudinal direction, and the spacing of these injection holes decreases gradually in the region near the end of the injection pipe, and the internal diameter gradually increases. The method of claim 24, wherein the many injection holes are holes in the direction inclined to one side by a specific angle (θ ₁ ) along the outer surface of the injection tube with respect to the vertical plane and a hole in the direction inclined by a specific angle (θ ₂ ) to the other And, these two types of holes are alternately provided. A plasma processing apparatus according to claim 25, wherein the specific angles (θ ₁ , θ ₂ ) are 25 ° to 35 °, respectively. 24. The plasma processing apparatus of claim 23, wherein a plurality of plasma injection tubes are provided. The apparatus of claim 27, wherein injection tubes are provided in the housing chamber at equal intervals. 29. The plasma processing device of claim 28, wherein three injection pipes are provided in the housing chamber at 90 ° intervals. 28. The plasma processing device of claim 27, wherein the prismatic injection tube has a length at its end that projects outwardly from both ends of the material by about 10% of the total length of the material. A plasma processing apparatus comprising a discharge detector provided at a position where light, heat, and ozone are generated by plasma generation by a plasma generator, and a display unit connected to the discharge detector. 32. The plasma processing apparatus of claim 31, wherein the discharge detector is a light sensor for detecting the intensity of light. 32. The plasma processing apparatus of claim 31, wherein the discharge detector is a heat sensor that detects a rise in temperature. 32. The plasma processing apparatus of claim 31, wherein the discharge detector is an ozone detector for detecting ozone generation. A housing chamber containing a material to be painted made of synthetic resin and a source gas and a cooling fluid for plasma treatment supplied to a plasma generating device to detect an underpressure of the raw material gas to stop the flow of the cooling fluid; And a control device for stopping the operation of the plasma processing device according to the detection operation of the detector, and an alarm device for notifying the operator of the operation interruption by the control device. 36. The plasma processing apparatus of claim 35, wherein the detector for detecting the underpressure of the source gas is a pressure sensor provided in the housing chamber. 36. The plasma processing apparatus of claim 35, wherein the cooling fluid is coolant flowing in the hose, and the detector for detecting the interruption of the coolant flow is a leak detector provided in the path of the hose. 36. The plasma processing apparatus of claim 35, wherein the cooling fluid is cooling air flowing in the hose, and the detector for detecting interruption of the cooling air flow is a defective air flow detector provided during condensation of the hose. 36. The plasma processing device of claim 35, wherein the alarm device comprises an alarm and a display unit.

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