KR860700138A - Semiconductor wafer processing apparatus and method - Google Patents

Semiconductor wafer processing apparatus and method

Info

Publication number
KR860700138A
KR860700138A KR1019860700076A KR860700076A KR860700138A KR 860700138 A KR860700138 A KR 860700138A KR 1019860700076 A KR1019860700076 A KR 1019860700076A KR 860700076 A KR860700076 A KR 860700076A KR 860700138 A KR860700138 A KR 860700138A
Authority
KR
South Korea
Prior art keywords
processing apparatus
semiconductor wafer
wafer processing
semiconductor
wafer
Prior art date
Application number
KR1019860700076A
Other languages
Korean (ko)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from PCT/US1985/000926 external-priority patent/WO1986000096A1/en
Application filed filed Critical
Publication of KR860700138A publication Critical patent/KR860700138A/en

Links

KR1019860700076A 1984-06-13 1986-02-07 Semiconductor wafer processing apparatus and method KR860700138A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB620246 1984-06-13
PCT/US1985/000926 WO1986000096A1 (en) 1984-06-13 1985-05-17 Method and apparatus for reducing temperature variations across a semiconductor wafer during heating

Publications (1)

Publication Number Publication Date
KR860700138A true KR860700138A (en) 1986-03-31

Family

ID=69103935

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019860700076A KR860700138A (en) 1984-06-13 1986-02-07 Semiconductor wafer processing apparatus and method

Country Status (1)

Country Link
KR (1) KR860700138A (en)

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application