KR860009472A - Light exposure device - Google Patents
Light exposure deviceInfo
- Publication number
- KR860009472A KR860009472A KR1019860003573A KR860003573A KR860009472A KR 860009472 A KR860009472 A KR 860009472A KR 1019860003573 A KR1019860003573 A KR 1019860003573A KR 860003573 A KR860003573 A KR 860003573A KR 860009472 A KR860009472 A KR 860009472A
- Authority
- KR
- South Korea
- Prior art keywords
- exposure device
- light exposure
- light
- exposure
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60096685A JPS6263426A (en) | 1985-05-09 | 1985-05-09 | Exposure system |
JP60-96685 | 1985-05-09 | ||
JP60108160A JPS61267321A (en) | 1985-05-22 | 1985-05-22 | X-ray exposure equipment |
JP60-108160 | 1985-05-22 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR860009472A true KR860009472A (en) | 1986-12-23 |
KR900001655B1 KR900001655B1 (en) | 1990-03-17 |
Family
ID=26437862
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019860003573A KR900001655B1 (en) | 1985-05-09 | 1986-05-08 | Light exposure apparatus |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR900001655B1 (en) |
-
1986
- 1986-05-08 KR KR1019860003573A patent/KR900001655B1/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR900001655B1 (en) | 1990-03-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
G160 | Decision to publish patent application | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
FPAY | Annual fee payment |
Payment date: 20060306 Year of fee payment: 17 |
|
EXPY | Expiration of term |