KR860002152B1 - A lamp - Google Patents

Abstract

Electrodeless discharge lamp for use in a HF electromagnetic field, emitting light rich in near UV, comprises an envelope of light transmitting envelope, contg. sealed within it a fill of rare gas, Hg, halogen and a metal of (I) Fe, Ni, Co and/or Pd or (II) Dy, Ho, Tm and/or Sc. In the first embodiment (I), the amt.; Hg is 5-55 micromole/cm3 lamp vol.; the amt. of halogen is 0.15-6.2 micromole/ cm3; and the total amt. of metal is 0.05-0.6 micromole/cm3. In the second embodiment(II), the amt. of Hg is 17.6-53 micromole/cm3; and the amt. of total metal is 0.13-0.39 (esp. 0.25)micromole/cm3. The amt. of halogen ats. is pref. not less than 3 times the amt. of metal.

Description

Induction lamp

1 is a cross-sectional view of a microwave discharge light source device previously proposed by the present applicant.

2 is a cross-sectional view of an electrodeless discharge lamp to which the present invention is applied.

Figure 3 is a proposal example made before the present invention, when the iron, iodine and bromine in addition to mercury and argon gas in the electrodeless discharge lamp, the start time TS for the loading ratio of bromine, relative light output in the range of 350nm to 450nm Characteristic curves shown.

4 and 5 show an embodiment of the first invention, and show characteristic changes in light output (relative value) when the encapsulation metal is changed.

6 and 7 show an embodiment of the second invention, and show characteristics of light output (relative value) when the encapsulation metal is changed.

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrodeless discharge lamp for use in a microwave discharge light source device, and more particularly, to an electrodeless discharge lamp having improved near ultraviolet radiation efficiency.

Conventionally, a near-ultraviolet light source, which uses photochemical reactions such as a photolithography light source as a light source, is a high-pressure metal vapor discharge lamp having a pair of discharging electrodes at both ends of a light emitting tube, and in order to improve radiation efficiency near near ultraviolet light, The metal halide lamp which added halides, such as iron and iron, was the mainstream. This type of metal halide lamp requires about three minutes from the time that the lamp is turned on until the light output reaches a stable state (hereinafter, referred to as settling time), and has a drawback that the settling time is too long. For example, when used for exposure to photolithography, the lamp is turned on only during the exposure time because the exposure time is about 1 minute or the preparation time for the next exposure is about 1 minute. There has been provided a method in which the lamp is always turned on and the exposure is performed by opening the shutter only at the exposure time using a shutter or the like. Such a method is unreasonable in terms of power saving, and a so-called instantaneous safety light source having a short settling time has been desired. In addition, the conventional metal halide lamp has a high load, and the lamp has a short life of about 1,000 hours due to the contamination of the inner wall of the light emitting tube due to consumption of the whole country.

On the other hand, the present applicant has recently proposed a light source device using a discharge as a light source device using a discharge, in particular a microwave at a high frequency. In the light source device having the conventional electrode, the lamp life is determined by the electrode consumption or the like, whereas in the light source device using microwaves, the lamp can be used as an electrodeless electrode, so that the lamp life can be extended. There is a characteristic. In addition, since there is no heat loss by the electrode, and the impedance of discharge is small between the lighting and the stable state, the electric power is easy to be injected immediately after the lighting, and since the discharge is biased toward the lamp tube wall, the stable time can be shortened. Has characteristics. The microwave discharge light source device having such a feature has a configuration as shown in FIG. In FIG. 1, (1) is a magnetron, (2) is a magnetron antenna, (3) is a waveguide, and (4) is a cavity wall surface 5 and a cavity wall surface serving as a reflection surface of light. (5) is a cavity surrounded by a mesh plate (11) that transmits light but does not transmit microwaves, (6) is a microwave feeder installed on the cavity wall (5), (7) is a cavity ( (4) The electrodeless discharge lamp disposed in (8) is a cooling pen for cooling the magnetron (1) and the electrodeless discharge lamp, (9) the cooling air of the cooling fan (8) through the magnetron and the waveguide (3). An air duct for guiding the inside of the tube, (10) is a vent hole drilled through the wave guide (3) for introducing cooling air into the wave guide (3), and (11) is a mesh plate covering the magnetron (1), the wave guide (3), and the like.

Next, the operation of the microwave light source device will be described. Microwaves generated by the magnetron 1 are radiated in the waveguide 3 at the magnetron antenna 2. This microwave propagates in the waveguide and is left in the cavity 4 through the feed port 6, and forms the electromagnetic field of the microwave in the cavity 4. The microwave electromagnetic field first discharges the starting energet gas encapsulated in the electrodeless lamp 7, heats the lamp wall, and evaporates the other encapsulated metal that has been attached to the lamp inner wall until then. It is discharged by the heat source of metal steam discharge and is in a safe state. At this time, light emission having a light emission spectrum peculiar to the metal is generated depending on the type of the encapsulated metal. By using this light emission as a light source, in order to effectively use the light from the electrodeless discharge lamp 7, as described above, the cavity wall 5 is used as the light reflection, and the front side transmits light and the microwaves transmit. It is not composed of a metal mesh plate 11, and radiates light forward. On the other hand, since the magnetron 1 and the lamp 7 need to be cooled, the magnetron 1 is cooled by the cooling fan 8, and the cooling wind is again carried out by the air blower 9, the air blower 10, and the waveguide ( 3) guided into the cavity (4) through the feeder (6), cools the electrodeless lamp (7) and is then discharged from the mesh plate (11).

However, even in such a microwave light source device, the startup time is about 15 seconds, and the startup time is too long to be used as the photolithography light source device, which is not necessarily satisfactory. Therefore, in order to shorten the startup time, an electrodeless discharge lamp having the following configuration has been proposed by the present applicant.

That is, FIG. 2 is an enlarged cross-sectional view showing the structure of the electrodeless lamp proposed above, and in FIG. 2, reference numeral 7 denotes a light emitting tube having an inner diameter of about 30 mm and a thickness of about 5 mm of the ball-shaped translucent quartz material. The inner volume is about 14.1 cm 3, and a pair of rod-shaped protrusions 12 and 13 are provided on both sides, and the protrusions 12 and 13 are placed in FIG. 1 using a suitable lamp support member (not shown). It is located in a predetermined position in the microwave cavity 4 shown. The lamp 7 is filled with a medium (not shown) capable of discharging a light emitting metal, two or more kinds of halogens, and the like, in addition to mercury and rare gas. The discharge principle of the electrodeless discharge lamp 7 shown in FIG. 2 is as described above, but the details thereof will be described again. An example when iron is used as the light emitting metal will be described. The microwave light source device used at this time is a magnetron (1), the frequency of the microwave is 2,450 (MHz), the microwave output is 700 (W), the cavity wall (5) is composed of almost half ball-shaped aluminum material, the wall surface Has a reflective surface. The front metal mesh 11 is a stainless steel mesh plate made by an etching method with a light transmittance of about 85%.

Experiment (1)

In the electrodeless lamp 7, 100 mg of mercury, 3 mg of mercury iodide, 0.3 mg of iron, and 60 torr of argon were contained in a rare gas. The light output and startup time (in this case, the time at which the light output reaches 80% of the steady state after the discharge lamp is turned on is defined as the startup time).

Experiment (2)

In (1), the light output and start-up time when the mercuric iodide was 2 mg and the mercury bromide were 1 mg were measured.

Experiment (3)

In (1), the light output and start-up time at 1 mg of mercury iodide and 2 mg of mercury bromide were measured.

Experiment (4)

In (1), the light output and start-up time when the mercury bromide was 3 mg were measured.

를 취하며, 세로축은 시동시간 T_S(실선) 및 상대 광출력 P(파선)을 나타낸다. 제3도에 명배한 바와 같이 요오드 또는 브롬을 단독으로 봉입했을 경우의 시동시간은 각기 13.5(초), 16.2(초)이며, 요오드와 브롬을 봉입했을 경우는 시동시간이 단축되고 R이 10-77.5% 범위에서 선택하면 10초 이하로 할 수 있다. 이와 같이 할로겐 원소를 단독이 아니고 두 종류를 병용함으로써 시동시간을 단축할 수 있는 이유는 발광금속의 할로겐화물의 증기압이 최소한 두 종류의 금속할로겐화물의 증기압의 합이 되므로, 방전 등의 관벽온도가 안정상태에 달했을 때 보다도 낮은 온도의 시점에서 적정한 금혹할로겐화물의 증기압을 얻을 수 있기 때문이다.The measurement results are shown in FIG. Claim 3 and also a horizontal axis, each m _I, m _Br gram atoms the amount of amount, bromine of iodine to be introduced in, bromine inclusion ratio

The vertical axis represents the starting time T _S (solid line) and the relative light output P (dashed line). As noted in Fig. 3, the starting time when iodine or bromine is added alone is 13.5 (second) and 16.2 (second), respectively. When iodine and bromine are charged, the starting time is shortened and R is 10-. If you select in the range of 77.5%, it can be 10 seconds or less. The reason why the start time can be shortened by using two types of halogen elements alone is that the vapor pressure of the halides of the light emitting metal is the sum of the vapor pressures of at least two metal halides. This is because an appropriate vapor pressure of the halogenated halide can be obtained at a lower temperature than when the steady state is reached.

The light output in FIG. 3 shows that in the case of the halide of iron, when the iodine and the bromine are encapsulated, the light output P of the emission in the range of 350 to 450 nm is increased as compared with the case where both are encapsulated alone. When only mercury is encapsulated, the light output is 31.0, and the light output of iron halides is about 3.2 times.

In this embodiment, the examples in which bromine and iodine are used as iron and halogen as light emitting metals have been described. However, when iodine and chlorine, bromine and chlorine, iodine and bromine and chlorine are encapsulated, the start time is shortened. The effect was confirmed. In addition, in the case of a metal other than iron as the light emitting metal, it is considered that the starting time can be shortened in principle.

In addition, although the ball-shaped discharge lamp was used in these Examples, it is thought that the same effect as that of a ball-shape is exhibited even if it is applied to a cylindrical or ellipsoidal discharge lamp.

In this way, the vapor pressure of the halide of the light emitting metal can be increased and the startup time can be shortened compared with the conventional one in which one type of halogen is encapsulated. However, in this type of electrodeless discharge lamp, the light output is not necessarily sufficient for a specific wavelength, for example, a wavelength of 350 to 450 nm, even if it is based on the proposal as described above, in particular mercury and argon. In addition to the addition of gallium and halogen, the light output for the near-ultraviolet light source, especially in the 350-450nm range, was not necessarily satisfactory.

It is an object of the present invention to provide an electrodeless discharge lamp containing metal halides, which is particularly suitable for emitting near-ultraviolet light source devices using microwaves, which emits strong light in the wavelength range of 350 to 450 nm. In addition, the invention of the present application made in view of such a point will be described next.

First, the first invention will be described. In the first invention, the electrodeless discharge lamp using the rare earth element as a light emitting metal that can be used as an ultraviolet light source is the result of various studies. In a ball-shaped electrodeless discharge lamp to be lit, mercury having 0.5 × 10 ⁻⁵ gram atoms / cm 3 to 5.5 × 10 ⁻⁵ gram atoms / cm 3 and 1.5 × 10 ⁻⁷ gram atoms / cm 3 to 6.2 to the lamp contents × 10 ^-6 gram atoms / ㎤ halogen and, dysprosium (dysprosium), holmium (holmium), one kind or more of tolryum (thulium) and scandium (scandium) 0.5 × 10 ^-7 gram atom / ㎤ to 6.0 × 10 ^{- It} is characterized by containing ⁷ grams of atoms and rare gas for starting. That is, in a ball-shaped discharge lamp having an inner diameter of 30 (mm), a fleshy brown (0.5) and an inner volume of about 14.1 (cm 3), argon gas is 100 (torr) as a starting gas and mercury is 100 (mg) as a buffer gas. ), And this is made constant, and the wavelength range of 355 (mm)-425 (mm) when mercuric iodide was enclosed and the amount of dysprosium was changed so that the ratio of dysprosium iodine and mercury might be 1.5 to a gram molecular weight. This is a relative value of the light output emitted by As apparent from the figure, as the amount of dysprosium encapsulation is increased, the light output initially increases drastically, and the amount of encapsulation reaches a maximum at about 0.25 × 10 ⁻⁶ gram atoms / cm 3, and thereafter decreases slightly. From this, the amount of dispromote encapsulation is 0.05 × 10 ^-6 gram atoms / cm 3 to 0.6 × 10 ^-6 gram atoms / cm 3, which is more than this range or at least notable improvement in light output is not seen.

The fourth turning inner diameter 30 (mm), flesh thickness 0.5 (mm), as a noble gas argon 100 for start-up in the quartz lamps of the ball-shaped information have 14.1 (㎤) (torr), dysprosium serving as the light emitting metal is 0.26 × 10 ^-6 The figure shows the light output (relative value) when the gram atoms / cm 3 and 0.39 × 10 ⁻⁶ gram atoms / cm 3 of mercuric iodide are kept constant, and the amount of mercury is changed. In this case, the light output suddenly increases at first, and the amount of mercury is saturated at about 5 × 10 ⁻⁵ gram atoms / cm 3 and then becomes constant thereafter. The amount of mercury encapsulated is practically suitable in the range of 0.5 x 10 ^-5 gram atoms / cm 3 to 5.5 x 10 ^-5 gram atoms / cm 3. The reason for this is that when the amount of mercury contained is less than 0.5 × 10 ^-5 gram atoms / cm 3, the light output is small, and when it exceeds 5.5 × 10 ^-5 gram atoms / cm 3, the light emission shows streaks of light emission and becomes unstable by shaking. Because.

In addition, the amount of iodine encapsulated is required to be a sufficient amount to form a substantially effective amount of dysprosium iodide (DyI ₃ ), and the maximum amount of encapsulation is 1.4 mg / cm 3 or 6.2 × when encapsulated as mercury iodide. It can contain up to 10 ^-6 gram atoms / cm 3. The reason for this is that when the amount of iodine encapsulated exceeds 6.2 x 10 ^-6 gram atoms / cm 3, the light emission of the lamp during contacting will be defective, and the discharge will be shaken and unstable. Thus, the amount of iodine encapsulated is not in the range of 1.5 × 10 ⁻⁷ gram atoms / cm 3 to 6.2 × 10 ⁻⁶ gram atoms / cm 3 required to form the lowest dysprosium iodide (DyI ₃ ) 0.5 × 10 ⁻⁷ gram atoms / cm 3. Can not be done. In addition, the amount of iodine may be excessive or insufficient with respect to dysprosium in balance with the loading amount of dysprosium when an effective disodium iodide (DyI ₃ ) is formed. Example 1 0.6 mm (mg) of dysprosium and 4 (mg) in a lamp having a diameter of 30 mm, a thickness of 0.5 mm, and an internal volume of 14.1 cm 3, or a lamp having a diameter of 3 mm and a length of 10 mm at both ends thereof. When using a lamp in which mercury iodide of 118 (mg) of mercury and 100 (torr) of argon gas was encapsulated, a stable light output (relative value) of 186 was obtained. This is about 3.72 times that of mercury only. The time until the light output reached 80% of the stability was taken as the stabilization time, which was 22.0 (seconds).

When using the lamp used in Example 1 as Example 2, 0.3 (mg) scandium, 4 (mg) mercury iodide, 118 (mg) mercury and 100 (torr) argon gas were charged in the lamp. The light output was 152 arbitrary units, only mercury obtained 3.04 times, and the settling time was 20.0 (seconds).

Table 1 shows the results of a series of experiments performed by the inventors.

TABLE 1

In Table 1, * encapsulated amount of dysprosium is expressed in gram atoms / cm 3.

** Iodine fraction in the amount of mercury iodide encapsulated is expressed in gram atoms / cm 3.

*** Mercury loading.

**** Total amount of mercury, including mercury in iodide.

* Total mercury is expressed in gram atoms / cm 3.

** Shows the ratio of light output when only mercury is contained in a homogeneous lamp.

*** The ratio of the maximum light output obtained by encapsulating dysprosium iodide (DyI ₃ ) in%.

For the experiments shown in Table 1, a little explanation here, Experiments A to D show the amount of loading of dysprosium and the light extraction when the dysprosium contains the amount of mercury iodide that is required to produce dysprosium iodide (DyI ₃ ). Display and start time. In the range of 1.3x10 <^-7> mol / cm <3> thru | or 3.9x10 <^-7> mol / cm <3> loading of the dysprosium iodide, light output of about 70% or more of the maximum obtained by encapsulating iodide of dysprosium is obtained.

Experimental D-H This is a case where the loading amount of dysprosium and mercury iodide is fixed and the amount of mercury is changed, and the loading amount is about 1.76 × 10 ⁻⁵ gram atoms / cm 3 to 5.66 × 10 ⁻⁵ gram atoms / cm 3 More than 80% light output is obtained.

Experiment D and experiments I-K show that the amount of dysprosium total mercury loading is constant, and the amount of excess iodine is changed. The light output is 80% or more of the maximum value obtained by encapsulating dysprosium iodide (DyI ₃ ), but when less mercury iodide is contained than that obtained in the experiment I, dysprosium iodide (DyI ₃ ), that is, dysprosium is excessive In this case, since the quartz tube of the lamp loses transparency for a short time while the iodine is excessively encapsulated during lighting, it is preferable to encapsulate the excess iodine.

As described above, according to the electrodeless discharge lamp, the light output radiating in the wavelength range of 350 (mm) to 450 (mm) can be increased, and the settling time can be shortened. In addition, since the lamp is an electrodeless lamp, it is possible to provide a lamp having a long lifetime with low attenuation of the light output during operation.

In the above description, although dysprosium and scandium have been described, rare earth metals such as holmium and thulium can be used as the light emitting metal.

Next, the second invention will be described.

The second invention is the result of various studies on an electrodeless discharge lamp that can be used as an ultraviolet light source, and the configuration of the invention is 0.7 x 10 ^- for an electrodeless discharge lamp that is lit in a microwave electromagnetic field. Mercury from ⁵ gram atoms / cm 3 to 5.5 × 10 ⁻⁵ gram atoms / cm 3 and 0.2 × 10 ⁻⁶ gram atoms / cm 3 to 6.2 × 10 ⁻⁶ gram atoms / cm 3 halogen and one of iron, nickel, cobalt and palladium The above is characterized by encapsulating 0.1 × 10 ⁻⁶ gram atoms / cm 3 to 2.3 × 10 ⁻⁶ gram atoms / cm 3 and starting rare gas in the total amount. In other words, 100 (torr) of argon gas as a starting gas and 120 (mg) of mercury (4.2 x 10 ^-5 gram atoms / cm3) were charged in a ball lamp, and iron iodide FeI ₂ was again enclosed (iron And mercury iodide). It shows the light output (relative value) of the ultraviolet-ray in the wavelength range of 355-425 nm when the amount of encapsulation of iron iodide is changed. And the large power of the ultraviolet ray of the lamp enclosed with gallium as the metal which the applicant of this application proposed previously is 65. As evident in this figure, if the amount of iron iodide (FeI ₂ ) is increased, the light output (relative value) is initially increased rapidly, obtaining a maximum between 0.5 × 10 ⁻⁶ and 1 × 10 ⁻⁶ mol / cm 3, Then decreases. The amount of the iron iodide (FeI ₂ ) encapsulated is practically effective in the range of 0.1 × 10 ⁻⁶ mol / cm 3 to 2.3 × 10 ⁻⁶ mol / cm 3. The reason for this is that when the amount of iron iodide encapsulated is less than 0.1 × 10 ⁻⁶ mol / cm 3, it is difficult to encapsulate with high precision due to the accuracy of weighing and the nonuniformity during manufacturing, and the light output nonuniformity is large and difficult to manufacture. It is also because the discharge is unstable if it exceeds 2.3 × 10 ⁻⁶ mol / cm 3, and the light emission streaks and streaks, which is not desirable.

FIG. 5 shows a ball-shaped quartz lamp having an inner diameter of 30 (mm), a thickness of 0.5 mm and an inner volume of 14.1 cm 3, argon 100 (torr) as a starting rare gas and iron as a light emitting metal 063 × 10 ^-6 gram atoms / cm 3 Is a diagram showing the light output (relative value) when the mercury iodide of 0.62 x 10 ^-6 mol / cm3 is encapsulated and made constant, and the amount of mercury is changed. The light output is increased, and the mercury loading shows the maximum high power at about 2.5 × 10 ⁻⁵ gram atoms / cm 3, and then the light output gradually decreases. The amount of mercury encapsulated is practically suitable in the range of 0.7 × 10 ⁻⁵ gram atoms / cm 3 to 5.5 × 10 ⁻⁵ gram atoms / cm 3. The reason for this is that when the amount of mercury contained is less than 0.7 × 10 ^-5 gram atoms / cm 3, the light output is small, and when it exceeds 5.5 × 10 ^-5 gram atoms / cm 3, the light emission shows streaks in the light emission and is unstable due to shaking. For losing.

0.63 × 10 ^-6 gram atoms / cm 3 of mercury iodide and 0.62 × 10 ^-6 mol / cm 3 of iron in a quartz ball-shaped lamp having an inner diameter of 30 mm, a thickness of 0.5 mm, and an inner volume of about 14.1 cm, When argon encapsulation pressure is changed to 1, 5, 10, 40, 100, 200, 300 (torr) at room temperature, when argon encapsulation pressure is 1 (torr) Something happened, and the lamp did not start lighting at 300 (torr). Therefore, argon encapsulation pressure is appropriately in the range of 10 to 200 (torr).

In addition, the amount of iodine encapsulated is sufficient to form a practically effective amount of iron iodide, and the maximum amount of encapsulated 1.4 mg / cm 3 or 6.2 × 10 ^-5 gram atoms / cm 3 when encapsulated as mercuric iodide I can enclose it. The reason for this is that when the amount of iodine contained exceeds 6.2 x 10 ^-6 gram atoms / cm 3, the luminescence of the lit lamp will be uneven and the discharge will be unstable and unstable. Therefore, the amount of iodine encapsulation must be in the range of 0.2 × 10 ⁻⁶ gram atoms / cm 3 to 6.2 × 10 ⁻⁶ gram atoms / cm 3 required to form the lowest iron iodide 0.1 × 10 ⁻⁶ gram atoms / cm 3.

Example 1 is a lamp made of light transmissive quartz having an inner diameter of 30 mm, a flesh thickness of 0.5 mm, and an internal volume of 14.1 cm 3, and having 0.5 mm of iron and 4 mg of mercuric iodide in a lamp having projections of 3 mm in diameter and 10 mm in length of the same material. When using a lamp in which 118 mg of mercury and 100 (torr) of argon gas were enclosed, an arbitrary unit of stable light output (relative value) 206 was obtained. This is about 4.1 times that of mercury only. The time until the light output reached 80% of the rest was taken as the stabilization time, which was 17.0 seconds.

When the lamp used in Example 1 was burned as Example 2 and 1.0 mg of palladium and 4 mg of mercuric iodide were charged with 118 mg of mercury and 100 (torr) of argon gas, the light output was 103 arbitrary. Only 2.1 times of mercury was obtained in units of and the settling time was 19.0 seconds.

Here, Table 2 shows a series of experiments carried out by the inventors.

TABLE 2

In Table 2, the * loading amount of iron is expressed in gram atoms / cm 3.

** The iodine component in the amount of mercury iodide encapsulated is expressed in gram atoms / cm 3.

*** Mercury loading.

**** Total amount of mercury, including mercury in iodide.

* Total mercury loading is expressed in gram atoms / cm 3.

** Shows the ratio of light output when only mercury is contained in a homogeneous lamp.

*** The ratio of the maximum light output value obtained by encapsulating silver iodide in%.

Here, with a little explanation for the experiment shown in Table 2, Example 1 and Experiments A to D described above change the amount of iron encapsulation, and almost enough iodine to iron iodide (FeI ₂ ) is added to mercury iodide (HgI). ⁽² ) When the lamp is turned on (when the lamp is turned on, the iron iodide of mercury iodide reacts to produce iron iodide), the iron iodide is enclosed in a range of 3.8 × 10 ⁻⁷ mol / cm 3 to 19.1 × 10 ⁻⁷ mol / cm 3 When it does, the light output of about 90% or more of the highest value (Example 14) of the light output obtained by encapsulating iron iodide can be obtained.

Example I and Experiment E-H mentioned above make the amount of cloth constant, change the amount of mercury iodide, and the excess amount of iodine rather than iron iodide in the amount of iodine which is insufficient to become iron iodide with respect to iron encapsulated As the scent of, the light output of almost 90% or more of the maximum light output was obtained at an amount of excess iodine of 20 × 10 ⁻⁷ gram atoms / cm 3 or less. In addition, when the amount of iodine that is insufficient, rather than iron iodide, is obtained, iron iodide obtained with respect to the amount of iodine encapsulated, the metal of iron becomes excess, and the amount of iron iodide produced is excessive. In comparison with the encapsulation, the inner wall of the quartz tube forming the lamp with a rather short lighting time tends to lose transparency. Therefore, the amount of excess iodine is preferably about 0.2 × 10 ⁻⁷ gram atoms / cm 3 to about 20 × 10 ⁻⁷ gram atoms / cm 3.

In experiments I to K, the amount of iron and mercury iodide in the inclusion was made constant and the amount of mercury encapsulated was changed, and the iron iodide was encapsulated in a range of about 1.76 × 10 ⁻⁵ to 4.13 × 10 ⁻⁵ gram atoms / cm 3. About 90% or more of the maximum light output obtained is obtained.

Examples I and Experiments L to P described above were made of iron and mercury iodide and mercury, and the argon pressure was varied. In the range of 20 to 150 (torr), the highest light output obtained by encapsulating iron iodide Values and higher light output and 95% or more light output were obtained. In the case of Experiment L, there was a tendency to turn off midway from the time of turning on the lamp to stabilization. In the case of Example 18, it tends to be a little hard to light, and it is preferable to enclose about 30-130 (torr) argon.

As described above, the light output emitted in the wavelength range of 350 nm to 450 nm of the electrodeless discharge lamp can be increased, and further, the settling time can be shortened. In addition, since the lamp is an electrodeless, the light output of the operation is less attenuated and can provide a long-life lamp.

In the above description, iron and palladium have been described as encapsulation metals, but it has been confirmed that nickel and cobalt of iron groups can also be used as light emitting metals other than this.

Claims (21)

(Correction) In a non-electrode discharge lamp in which a material to be lit in a microwave electromagnetic field is formed in a shape of a ball and a ball-shaped electrode, 0.5 × 10 ^-5 gram atoms / cm 3 to 5.5 × 10 ^-5 gram atoms / 0.5 x 10 ^-7 total amount of cm 3 mercury, 1.5 x 10 ^-7 gram atoms / cm 3 to 6.2 x 10 ^-6 gram atoms / cm 3 halogen, and additive metals of one type of dysprosium, holmium, thulium and scandium An electrodeless discharge lamp comprising gram atoms / cm 3 to 6 × 10 ⁻⁷ gram atoms / cm 3 and rare gas for starting. (Correction) The method according to claim 1, wherein mercury is 1.76 × 10 ⁻⁵ gram atoms / cm 3 to 5.3 × 10 ⁻⁵ gram atoms / cm 3 with respect to the lamp content, and 1.3 × 10 ⁻⁷ gram atoms / cm 3 in total amount of the added metal. To 3.9 × 10 ⁻⁷ gram atoms / cm 3. (Correction) The method according to claim 1, wherein mercury is 1.76 × 10 ⁻⁵ gram atoms / cm 3 to 5.3 × 10 ⁻⁵ gram atoms / cm 3 with respect to the lamp content, and 2.5 × 10 ⁻⁷ gram atoms / cm 3 in total amount of the added metal. An electrodeless discharge lamp, characterized in that sealed. (Correction) The electrodeless discharge lamp according to claim 3, wherein the halogen is encapsulated at least three times the total amount of the added metal in a numerical value in units of gram atoms / cm 3. (Correction) The electrodeless discharge lamp according to claim 3, wherein halogen is encapsulated in the amount of gram atoms / cm 3 or more in the total amount of the additive metal. (Correction) The electrodeless discharge lamp according to claim 3, wherein the halogen is iodine. (Correction) The electrodeless discharge lamp according to claim 3, wherein the rare gas is argon. (delete) (delete) (Correction) In a non-electrode discharge lamp whose material is lit in a microwave electromagnetic field and whose shape is ball-shaped, in addition to the rare gas for starting inside, from 0.7 x 10 ^-5 gram atoms / cm 3 to the lamp contents Mercury of 5.5 x 10 ^-5 gram atoms / cm 3, halogen of 0.2 x 10 ^-6 gram atoms / cm 3 to 6.2 x 10 ^-6 gram atoms / cm 3, and one or more additional metals of iron, nickel, cobalt and palladium An electrodeless discharge lamp comprising 0.1 x 10 ^-6 gram atoms / cm 3 to 2.3 x 10 ^-6 gram atoms / cm 3 encapsulated in total amount. (Correction) The method according to claim 10, wherein mercury is 1.76 × 10 ⁻⁶ gram atoms / cm 3 to 4.13 × 10 ⁻⁵ gram atoms / cm 3 with respect to the lamp content, and 3.8 × 10 ⁻⁷ gram atoms / cm 3 in total amount of the added metal. To 1.91 x 10 ^-6 gram atoms / cm 3 encapsulated electrodeless discharge lamp. (Correction) Under 10, mercury is 2.5 × 10 ^-5 gram atoms / cm 3, and halogen is 0.2 × 10 ^-6 gram atoms / cm 3 to 6.2 × 10 ^-6 gram atoms / cm 3 with respect to the lamp content. An electrodeless discharge lamp comprising a total amount of 0.5 x 10 ^-6 gram atoms / cm 3 to 1.0 x 10 ^-6 gram atoms / cm 3 encapsulated. (Correction) The electrodeless discharge lamp according to any one of claims 10 to 12, wherein rare gas is encapsulated in 10 to 200 torr. (Correction) The electrodeless discharge lamp according to any one of claims 10 to 12, wherein a rare gas is sealed in an amount of 20 to 150 torr. (Correction) The electrodeless discharge lamp according to any one of claims 10 to 12, wherein rare gas is sealed in 30 to 130 torr. (Correction) The electrodeless discharge lamp according to any one of claims 10 to 12, wherein halogen is encapsulated at least twice the total amount of the added metal in a value of a unit of gram atoms / cm 3. (Correction) The electrodeless discharge lamp according to any one of claims 10 to 12, wherein halogen is iodine. (Correction) The electrodeless discharge lamp according to any one of claims 10 to 12, which is rare gaseous argon. (delete) (delete) (Correction) The method according to claim 16, wherein the halogen is added at a numerical value in gram atoms / cm 3 and at least twice the total amount of the additive metal, and the excess amount is 0.2 × 10 ^-7 gram atoms / cm 3 to 20 × 10 ^-7 gram atoms / cm 3 An electrodeless discharge lamp, characterized in that sealed to be.

Images